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1. 发明申请

US20140035702A1 HYBRID FILTER INCLUDING LC- AND MEMS-BASED RESONATORS 审中-公开
标题翻译：混合滤波器，包括基于LC和MEMS的谐振器
公开(公告)号：US20140035702A1
公开(公告)日：2014-02-06
申请号：US13563252
申请日：2012-07-31
申请人： Justin Phelps Black , Philip Jason Stephanou , Jonghae Kim , Je-Hsiung Jeffrey Lan , Sang-June Park , Changhan Hobie Yun , Chi Shun Lo , Chengjie Zuo
发明人： Justin Phelps Black , Philip Jason Stephanou , Jonghae Kim , Je-Hsiung Jeffrey Lan , Sang-June Park , Changhan Hobie Yun , Chi Shun Lo , Chengjie Zuo
IPC分类号： H03H9/00 , H03H7/01
CPC分类号： H03H7/075 , H03H9/465 , H03H2007/006
摘要： This disclosure provides implementations of filters and filter topologies, circuits, structures, devices, apparatus, systems, and related processes. In one aspect, a device includes one or more LC resonant circuit stages. In some implementations, each LC stage includes an inductor and a capacitor. Each LC stage also has a corresponding resonant frequency. The one or more LC stages are arranged to produce an unmodified passband over a range of frequencies having a corresponding bandwidth. One or more microelectromechanical systems (MEMS) resonators are arranged with the one or more LC stages. The one or more MEMS resonators are arranged with the one or more LC stages so as to modify characteristics of the unmodified passband such that the hybrid filter produces a modified passband having a modified bandwidth and one or more other modified band characteristics.
摘要翻译：本公开提供了滤波器和滤波器拓扑，电路，结构，设备，装置，系统和相关过程的实现。在一个方面，器件包括一个或多个LC谐振电路级。在一些实现中，每个LC级包括电感器和电容器。每个LC级还具有相应的谐振频率。一个或多个LC级布置成在具有相应带宽的频率范围上产生未修改的通带。一个或多个微机电系统（MEMS）谐振器与一个或多个LC级布置。一个或多个MEMS谐振器被布置成具有一个或多个LC级，以便修改未修改的通带的特性，使得混合滤波器产生具有修改的带宽和一个或多个其它修改的频带特性的修改的通带。

2. 发明授权

US09083300B2 Electromechanical systems piezoelectric contour mode differential resonators and filters 有权
标题翻译：机电系统压电轮廓模式差动谐振器和滤波器
公开(公告)号：US09083300B2
公开(公告)日：2015-07-14
申请号：US13094707
申请日：2011-04-26
申请人： Chi Shun Lo , Jonghae Kim , Sang-June Park , Sanghoon Joo , Chengjie Zuo , Changhan Yun
发明人： Chi Shun Lo , Jonghae Kim , Sang-June Park , Sanghoon Joo , Chengjie Zuo , Changhan Yun
IPC分类号： H03H9/70 , H03H9/00 , H01P1/213 , H03H9/02 , H03H9/24 , H03H9/56 , G09G3/34 , H03H3/02
CPC分类号： H03H9/0095 , G09G3/3493 , G09G2310/0267 , G09G2310/027 , H01P1/2135 , H03H9/0014 , H03H9/02228 , H03H9/2431 , H03H9/2436 , H03H9/2463 , H03H9/564 , H03H2003/027 , H03H2009/02496 , H03H2009/02527 , H03H2009/241
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode at which a first input signal can be provided and a second electrode at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode proximate the first electrode of the first conductive layer and a second electrode proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes.
摘要翻译：本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。一方面，轮廓模式谐振器装置包括具有多个第一层电极的第一导电层，所述第一导电层包括能够提供第一输入信号的第一电极和可以提供第一输出信号的第二电极。第二导电层包括多个第二层电极，其包括靠近第一导电层的第一电极的第一电极和靠近第一导电层的第二电极的第二电极。可以在第二导电层的第一电极或第二电极处提供第二信号，以与第一输入信号或第一输出信号配合以限定差分信号。压电层设置在第一导电层和第二导电层之间。压电层包括压电材料。压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。

3. 发明申请

US20130120951A1 STACKED CMOS CHIPSET HAVING AN INSULATING LAYER AND A SECONDARY LAYER AND METHOD OF FORMING SAME 有权
标题翻译：具有绝缘层和二次层的堆叠CMOS芯片及其形成方法
公开(公告)号：US20130120951A1
公开(公告)日：2013-05-16
申请号：US13356717
申请日：2012-01-24
申请人： Chengjie Zuo , Changhan Yun , Sang-June Park , Chi Shun Lo , Mario F. Velez , Jonghae Kim
发明人： Chengjie Zuo , Changhan Yun , Sang-June Park , Chi Shun Lo , Mario F. Velez , Jonghae Kim
IPC分类号： H05K1/03 , H01L21/60 , H05K7/06 , H01L21/58
CPC分类号： H01L27/0688 , H01L2224/18
摘要： A chipset includes a sheet of glass, quartz or sapphire and a first wafer having at least one first circuit layer on a first side of a first substrate layer. The first wafer is connected to the sheet such that the at least one first circuit layer is located between the first substrate layer and the sheet. A second wafer having at least one second circuit layer on a first side of a second substrate layer is connected to the first substrate layer such that the at least one second circuit layer is located between the second substrate layer and the first substrate layer. Also a method of forming a chipset.
摘要翻译：芯片组包括玻璃板，石英或蓝宝石片，以及在第一基底层的第一面上具有至少一个第一电路层的第一晶片。第一晶片连接到片材，使得至少一个第一电路层位于第一基片层和片之间。具有在第二衬底层的第一侧上的至少一个第二电路层的第二晶片连接到第一衬底层，使得至少一个第二电路层位于第二衬底层和第一衬底层之间。还有一种形成芯片组的方法。

4. 发明授权

US09496255B2 Stacked CMOS chipset having an insulating layer and a secondary layer and method of forming same 有权
标题翻译：具有绝缘层和二次层的叠层CMOS芯片组及其形成方法
公开(公告)号：US09496255B2
公开(公告)日：2016-11-15
申请号：US13356717
申请日：2012-01-24
申请人： Chengjie Zuo , Changhan Yun , Sang-June Park , Chi Shun Lo , Mario F. Velez , Jonghae Kim
发明人： Chengjie Zuo , Changhan Yun , Sang-June Park , Chi Shun Lo , Mario F. Velez , Jonghae Kim
IPC分类号： H01L21/00 , H01L27/06
CPC分类号： H01L27/0688 , H01L2224/18
摘要： A chipset includes a sheet of glass, quartz or sapphire and a first wafer having at least one first circuit layer on a first side of a first substrate layer. The first wafer is connected to the sheet such that the at least one first circuit layer is located between the first substrate layer and the sheet. A second wafer having at least one second circuit layer on a first side of a second substrate layer is connected to the first substrate layer such that the at least one second circuit layer is located between the second substrate layer and the first substrate layer. Also a method of forming a chipset.
摘要翻译：芯片组包括玻璃板，石英或蓝宝石片，以及在第一基底层的第一面上具有至少一个第一电路层的第一晶片。第一晶片连接到片材，使得至少一个第一电路层位于第一基片层和片之间。具有在第二衬底层的第一侧上的至少一个第二电路层的第二晶片连接到第一衬底层，使得至少一个第二电路层位于第二衬底层和第一衬底层之间。还有一种形成芯片组的方法。

5. 发明申请

US20120050236A1 ELECTROMECHANICAL SYSTEMS PIEZOELECTRIC CONTOUR MODE DIFFERENTIAL RESONATORS AND FILTERS 有权
标题翻译：电动系统压电体模式差分共振器和过滤器
公开(公告)号：US20120050236A1
公开(公告)日：2012-03-01
申请号：US13094707
申请日：2011-04-26
申请人： Chi Shun Lo , Jonghae Kim , Sang-June Park , Sanghoon Joo , Chengjie Zuo , Changhan Yun
发明人： Chi Shun Lo , Jonghae Kim , Sang-June Park , Sanghoon Joo , Chengjie Zuo , Changhan Yun
IPC分类号： H01P7/00 , H04B1/04 , H04B1/06 , H01P5/12 , G09G5/00
CPC分类号： H03H9/0095 , G09G3/3493 , G09G2310/0267 , G09G2310/027 , H01P1/2135 , H03H9/0014 , H03H9/02228 , H03H9/2431 , H03H9/2436 , H03H9/2463 , H03H9/564 , H03H2003/027 , H03H2009/02496 , H03H2009/02527 , H03H2009/241
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode at which a first input signal can be provided and a second electrode at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode proximate the first electrode of the first conductive layer and a second electrode proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes.
摘要翻译：本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。一方面，轮廓模式谐振器装置包括具有多个第一层电极的第一导电层，所述第一导电层包括能够提供第一输入信号的第一电极和可以提供第一输出信号的第二电极。第二导电层包括多个第二层电极，其包括靠近第一导电层的第一电极的第一电极和靠近第一导电层的第二电极的第二电极。可以在第二导电层的第一电极或第二电极处提供第二信号，以与第一输入信号或第一输出信号配合以限定差分信号。压电层设置在第一导电层和第二导电层之间。压电层包括压电材料。压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。

6. 发明申请

US20120293520A1 PIEZOELECTRIC RESONATORS WITH CONFIGURATIONS HAVING NO GROUND CONNECTIONS TO ENHANCE ELECTROMECHANICAL COUPLING 审中-公开
标题翻译：具有无接地连接的配置的压电谐振器，以增强机电耦合
公开(公告)号：US20120293520A1
公开(公告)日：2012-11-22
申请号：US13111683
申请日：2011-05-19
申请人： Changhan Yun , Sang-June Park , Chi Shun Lo , Jonghae Kim , Je-Hsiung Lan , Sanghoon Joo
发明人： Changhan Yun , Sang-June Park , Chi Shun Lo , Jonghae Kim , Je-Hsiung Lan , Sanghoon Joo
IPC分类号： G06T1/00 , H03H9/17
CPC分类号： H03H9/173 , H03H9/02228
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, resonator apparatus includes a first conductive layer including a first electrode and a second electrode. The first electrode is coupled to receive a first input signal, and the second electrode is coupled to provide a first output signal. A piezoelectric layer includes a piezoelectric material. The piezoelectric layer has a first side and a second side opposite the first side. The first side is proximate the first conductive layer, and the second side is electrically isolated from ground. In some examples, the second side of the piezoelectric layer can be exposed and/or electrically de-coupled from one or more components.
摘要翻译：本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，谐振器装置包括包括第一电极和第二电极的第一导电层。第一电极被耦合以接收第一输入信号，并且第二电极被耦合以提供第一输出信号。压电层包括压电材料。压电层具有与第一侧相对的第一侧和第二侧。第一侧靠近第一导电层，第二侧与地电隔离。在一些示例中，压电层的第二面可以暴露和/或从一个或多个部件电脱耦合。

7. 发明授权

US08884725B2 In-plane resonator structures for evanescent-mode electromagnetic-wave cavity resonators 有权
标题翻译：用于ev逝模式电磁波谐振腔谐振器的平面内谐振器结构
公开(公告)号：US08884725B2
公开(公告)日：2014-11-11
申请号：US13451397
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： H01P7/06 , H01P1/205
CPC分类号： H01P1/2088 , H01P7/065
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the cavity resonator includes a lower cavity portion and an upper cavity portion that together form a volume. The cavity resonator also includes an in-plane lithographically-defined resonator structure having a portion that is located at least partially within the volume to support one or more evanescent electromagnetic wave modes. In some implementations, an upper surface of the resonator structure is connected with the upper cavity portion while a lower mating surface is connected with the lower cavity portion. A distal surface of the resonator structure is separated or electrically insulated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially upon the gap distance.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，一种器件包括ev逝模式电磁波谐振腔谐振器。在一些实施方案中，空腔谐振器包括一起形成体积的下部空腔部分和上部空腔部分。空腔谐振器还包括平面内光刻定义的谐振器结构，其具有至少部分位于体积内的部分，以支持一个或多个瞬逝电磁波模式。在一些实施方案中，谐振器结构的上表面与上空腔部分连接，而下配合表面与下腔体部分连接。谐振器结构的远端表面与距离其最近的表面分开或电绝缘间隙距离，空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离。

8. 发明申请

US20130278998A1 IN-PLANE RESONATOR STRUCTURES FOR EVANESCENT-MODE ELECTROMAGNETIC-WAVE CAVITY RESONATORS 有权
标题翻译：用于EVANESCENT-MODE电磁波腔谐振器的平面内共振器结构
公开(公告)号：US20130278998A1
公开(公告)日：2013-10-24
申请号：US13451397
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： H01S3/086 , H01S3/08
CPC分类号： H01P1/2088 , H01P7/065
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the cavity resonator includes a lower cavity portion and an upper cavity portion that together form a volume. The cavity resonator also includes an in-plane lithographically-defined resonator structure having a portion that is located at least partially within the volume to support one or more evanescent electromagnetic wave modes. In some implementations, an upper surface of the resonator structure is connected with the upper cavity portion while a lower mating surface is connected with the lower cavity portion. A distal surface of the resonator structure is separated or electrically insulated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially upon the gap distance.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，一种器件包括ev逝模式电磁波谐振腔谐振器。在一些实施方案中，空腔谐振器包括一起形成体积的下部空腔部分和上部空腔部分。空腔谐振器还包括平面内光刻定义的谐振器结构，其具有至少部分位于体积内的部分，以支持一个或多个瞬逝电磁波模式。在一些实施方案中，谐振器结构的上表面与上空腔部分连接，而下配合表面与下腔体部分连接。谐振器结构的远端表面与距离其最近的表面分开或电绝缘间隙距离，空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离。

9. 发明申请

US20130278610A1 TOPPED-POST DESIGNS FOR EVANESCENT-MODE ELECTROMAGNETIC-WAVE CAVITY RESONATORS 审中-公开
标题翻译：用于EVANESCENT-MODE电磁波腔谐振器的TOPPED-POST设计
公开(公告)号：US20130278610A1
公开(公告)日：2013-10-24
申请号：US13451392
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： G06T1/00 , H01P7/06
CPC分类号： H01P1/208 , H01P7/06
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator that includes a cavity operable to support one or more evanescent electromagnetic wave modes. The resonator includes a cavity ceiling arranged to form a volume in conjunction with the cavity. The resonator also includes a capacitive tuning structure. In some implementations, the resonator also includes a post top positioned at a distal surface of the capacitive tuning structure. In some implementations, the post top has a dimension that is larger than a corresponding dimension of the capacitive tuning structure. In some implementations, a distal surface of the post top is separated from a surface by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially upon the gap distance and the dimension of the post top.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，一种装置包括ev逝模式电磁波谐振腔谐振器，其包括可操作以支持一个或多个ev逝电磁波模式的空腔。谐振器包括设置成与空腔结合形成体积的空腔顶板。谐振器还包括电容调谐结构。在一些实施方案中，谐振器还包括位于电容调谐结构的远端表面处的柱顶。在一些实施方案中，柱顶具有大于电容调谐结构的对应尺寸的尺寸。在一些实施方案中，柱顶部的远端表面与表面分开间隙距离，空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离和柱顶的尺寸。

10. 发明申请

US20130278359A1 TWO- AND THREE-SUBSTRATE LEVEL PROCESSES FOR PRODUCING EVANESCENT MODE ELECTROMAGNETIC WAVE CAVITY RESONATORS 审中-公开
标题翻译：用于生产EVANESCENT模式电磁波腔谐振器的两基板和三基板级
公开(公告)号：US20130278359A1
公开(公告)日：2013-10-24
申请号：US13451400
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： H01P7/06 , H01P11/00 , H01L41/22
CPC分类号： H01P1/2088 , H01P7/065 , Y10T29/42 , Y10T29/4902
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a method includes providing a first substrate and a second substrate. In some implementations, the first substrate includes a cavity ceiling, an array of dielectric spacers, and an assembly platform arranged adjacent the array of dielectric spacers opposite the cavity ceiling surface. The assembly platform includes a plurality of post tops. In some implementations, the second substrate has an array of cavities and an array of resonator posts. In some implementations, the method includes mating the first substrate with the second substrate, connecting the post tops with the posts to form an array that includes a plurality of evanescent-mode electromagnetic wave cavity resonators, wherein at least a statically-defined magnitude of a gap distance between the distal surface of each post top and the cavity ceiling is defined by the dielectric spacers.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。一方面，一种方法包括提供第一基底和第二基底。在一些实施方案中，第一衬底包括空腔顶板，电介质间隔件的阵列以及与腔体顶表面相对的电介质隔片阵列附近布置的组装平台。组装平台包括多个柱顶。在一些实施方案中，第二衬底具有空腔阵列和谐振器柱阵列。在一些实施方式中，该方法包括将第一衬底与第二衬底配合，将柱顶与柱连接以形成包括多个渐逝模式电磁波腔共振器的阵列，其中至少一个静态限定的量级每个柱顶的远端表面和腔顶之间的间隙距离由介电间隔物限定。

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