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    • 7. 发明授权
    • Apparatus for producing semiconductor film
    • 半导体膜制造装置
    • US5252132A
    • 1993-10-12
    • US796618
    • 1991-11-22
    • Masao OdaYoshiyuki GotoToyomi OsigeTatsuya IwasaYoshimi KinoshitaKatsuhisa KitanoKazuo Yoshida
    • Masao OdaYoshiyuki GotoToyomi OsigeTatsuya IwasaYoshimi KinoshitaKatsuhisa KitanoKazuo Yoshida
    • C23C16/48C30B25/10C30B25/14H01L21/00C23C16/00
    • H01L21/67115C23C16/481C23C16/488C30B25/105C30B25/14
    • A semiconductor film production apparatus includes a reaction vessel for containing a substrate and including a gas supply port for supplying a reaction gas to the vessel, a gas discharge port for discharging the reaction gas from the vessel after reaction, and a light-transmitting glass window; a light source disposed outside the reaction vessel for irradiating a substrate in the reaction vessel through the light-transmitting glass window to heat the substrate; a cylindrical substrate holder disposed in the reaction vessel for holding the substrate with a first surface facing the light source and a second surface, opposed to the first surface, exposed to the reaction gas; a ring plate having a central opening with an area smaller than the substrate and an outside diameter dividing the reaction vessel into two compartments, the ring plate contacting the first surface of the substrate; a carrier gas supply port for introducing a carrier gas between the substrate and the light-transmitting glass window; and a reaction gas supply nozzle disposed in the substrate holder connected to said gas supply port and opposing the second surface of the substrate.
    • 半导体膜制造装置包括:容纳基板的反应容器,具有用于向容器供给反应气体的气体供给口;反应后从反应容器排出反应气体的气体排出口;透光性玻璃窗 ; 设置在所述反应容器的外部的光源,用于通过所述透光玻璃窗照射反应容器中的基板以加热所述基板; 设置在所述反应容器中的圆柱形衬底保持器,用于保持所述衬底具有面向所述光源的第一表面和与所述第一表面相对的暴露于所述反应气体的第二表面; 环形板,具有中心开口,面积小于基板,外径将反应容器分成两个隔室,环板接触基板的第一表面; 用于在基板和透光玻璃窗之间引入载气的载气供给口; 以及反应气体供给喷嘴,其设置在与所述气体供给口连接并与所述基板的第二表面相对的所述基板保持件中。
    • 8. 发明申请
    • Mold for molding disk, adjustment member, and method of molding disk substrate
    • 用于成型盘,调节构件的模具,以及成形盘基片的方法
    • US20070176311A1
    • 2007-08-02
    • US10591132
    • 2005-03-07
    • Hiroyuki SawaishiYoshiyuki Goto
    • Hiroyuki SawaishiYoshiyuki Goto
    • B29D17/00B29C59/00
    • B29C45/14639B29C45/2632B29C2045/2667G11B7/263
    • A mold for molding a disk and a method of molding a disk substrate which can enhance flatness and thus quality of a molded product are provided. The mold for molding a disk includes a first mirror-surface disk; a stamper (29) attached to the first mirror-surface disk; a second mirror-surface disk disposed in opposition to the first mirror-surface disk and forming a cavity therebetween at the time of mold clamping; and an adjustment member having a surface allowing the stamper (29) to slide thereon, formed near an outer circumference of the first mirror-surface disk, extending radially outward, and projecting toward the cavity. Even when, during the entire disk substrate being cooled, shrinkage of the disk substrate near the outer circumference thereof is small, whereas shrinkage of the remaining portion thereof is large, an increase in thickness of the disk substrate near the outer circumference thereof can be prevented.
    • 提供了一种用于模制盘的模具和一种可以提高成型产品的平坦度和因此提高其质量的盘基片的成型方法。 用于成型盘的模具包括:第一镜面盘; 附接到第一镜面盘的压模(29); 第二镜面盘与第一镜面盘相对设置并且在夹紧时形成腔; 以及具有允许压模(29)在其上滑动的表面的调节构件,其形成在第一镜面盘的外周附近,径向向外延伸并朝向空腔突出。 即使在整个盘基板被冷却时,盘基板的外周附近的收缩也小,其余部分的收缩较大,可以防止其外周附近的盘基板的厚度增加 。
    • 9. 发明申请
    • Mold For Molding Disk, Mirror-Surface Disk, And Molded Product
    • 模具盘,镜面盘和成型产品
    • US20070275115A1
    • 2007-11-29
    • US10594508
    • 2005-03-30
    • Yuichi InadaHiroyuki SawaishiYuji ShibutaniYoshiyuki Goto
    • Yuichi InadaHiroyuki SawaishiYuji ShibutaniYoshiyuki Goto
    • B28B1/00
    • B29C45/263B29C2045/2661B29C2045/2667B29L2017/005G11B7/263
    • The invention provides a mold for molding a disk which can uniformly cool a molded product and prevent generation of printing unevenness in a printing region of the molded product, and a molded product molded by use of the mold. The mold includes a first mold plate; a first mirror-surface disk; a second mold plate disposed to advance and retreat in relation to the first mold plate; a second mirror-surface disk forming a cavity in cooperation with the first mirror-surface disk in a mold-clamped condition; a stamper (32) attached to one of the first and second mirror-surface disks and having a fine pattern formed on a front end surface thereof; and a bush (55) extending through the other of the first and second mirror-surface disks. On a front end surface of the other mirror-surface disk, the bush (55) is disposed radially inward of a region for forming a clamp area. In this case, since the area of the front end surface of the bush (55) decreases, lowering of the performance of cooling the molded product can be prevented.
    • 本发明提供了一种用于模制盘的模具,其可以均匀地冷却模制产品并防止在模制产品的打印区域中产生印刷不均匀性,以及使用模具模制的模制产品。 模具包括第一模板; 第一个镜面盘; 设置成相对于第一模板前进和后退的第二模板; 在模具夹紧状态下与第一镜面盘协作形成腔的第二镜面盘; 附接到所述第一和第二镜面盘之一并且具有形成在其前端表面上的精细图案的压模(32); 以及延伸穿过第一和第二镜面盘中的另一个的衬套(55)。 在另一个镜面盘的前端面上,衬套(55)位于用于形成夹紧区域的区域的径向内侧。 在这种情况下,由于衬套(55)的前端面的面积减小,因此可以防止冷却成形品的性能的降低。