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    • 3. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07915655B2
    • 2011-03-29
    • US12056603
    • 2008-03-27
    • Naohiro Ueda
    • Naohiro Ueda
    • H01L27/108
    • H01L21/823418H01L27/088H01L29/42324H01L29/6659H01L29/7833
    • A semiconductor device includes a semiconductor substrate and a metal-oxide semiconductor transistor. A first dielectric layer of the metal oxide semiconductor transistor overlaps source and drain electrodes and a channel region of the transistor. A first drain region is away from the channel region and the first dielectric layer. A second drain region is between the first drain region and the channel region. A gate electrode is on the first dielectric layer and connected to a gate wire, and includes first and second gate layers and a dielectric layer therebetween. The first gate layer has one edge laterally spaced from the first drain region and resting over the second drain region, and is isolated from the gate wire. The second gate layer is over the first gate layer and is connected to the gate wire.
    • 半导体器件包括半导体衬底和金属氧化物半导体晶体管。 金属氧化物半导体晶体管的第一电介质层与源极和漏极以及晶体管的沟道区重叠。 第一漏极区域远离沟道区域和第一介电层。 第二漏区在第一漏区和沟道区之间。 栅电极位于第一电介质层上并连接到栅极线,并且包括第一和第二栅极层和介电层之间。 第一栅极层具有与第一漏极区域横向间隔开并且搁置在第二漏极区域上的一个边缘,并且与栅极线隔离。 第二栅极层在第一栅极层上方并且连接到栅极线。
    • 5. 发明授权
    • Semiconductor device placing high, medium, and low voltage transistors on the same substrate
    • 将高,中,低压晶体管放置在同一衬底上的半导体器件
    • US07084035B2
    • 2006-08-01
    • US11104433
    • 2005-04-13
    • Naohiro Ueda
    • Naohiro Ueda
    • H01L21/8234
    • H01L27/0629H01L21/82345H01L21/823462Y10S438/981
    • A method for forming three kinds of MOS transistors on a single semiconductor substrate, each provided with gate oxides different in thickness from each other, without detracting from the device characteristics. The method includes the steps of forming a dielectric layer for device isolation for defining first, second, and third regions, and buffer oxide layers on the surface of a semiconductor substrate; after forming an oxidation resistance layer, which has an opening for exposing the first region, performing a first thermal oxidation process for forming a first gate oxide layer overlaying the first region; forming a first gate electrode on the first gate oxide layer; removing the buffer oxide layer overlying the third region, having an opening for exposing the third region; performing a second thermal oxidation process for forming a second gate oxide layer, having a thickness different from the first gate oxide, and for forming a third gate oxide layer having a thickness different from the first, and the second gate oxides.
    • 一种用于在单个半导体衬底上形成三种MOS晶体管的方法,每个半导体衬底均设置有彼此不同厚度的栅极氧化物,而不会降低器件特性。 该方法包括以下步骤:在半导体衬底的表面上形成用于器件隔离的介电层,用于限定第一,第二和第三区域以及缓冲氧化物层; 在形成具有用于暴露第一区域的开口的抗氧化层之后,进行用于形成覆盖第一区域的第一栅极氧化物层的第一热氧化工艺; 在所述第一栅极氧化物层上形成第一栅电极; 去除覆盖在第三区域上的缓冲氧化物层,具有用于暴露第三区域的开口; 进行第二热氧化工艺以形成具有不同于第一栅极氧化物的厚度的第二栅极氧化物层,以及用于形成具有不同于第一栅极氧化物的厚度的第三栅极氧化物层。
    • 6. 发明授权
    • Semiconductor integrated device
    • 半导体集成器件
    • US06917081B2
    • 2005-07-12
    • US10422786
    • 2003-04-25
    • Naohiro UedaYoshinori Ueda
    • Naohiro UedaYoshinori Ueda
    • H01L21/8238H01L27/092H01L29/76
    • H01L21/823857H01L21/823892H01L27/0922H01L27/0928
    • A semiconductor device is provided comprising several device components formed in the same substrate, such as a P-substrate having an offset Nch transistor including N-type source and drain each formed in a P-well spatially separated from one another, and the drain surrounded by a low concentration N-type diffusion layer; an offset Pch transistor including P-type source and drain each formed in an N-well spatially separated from one another, and the drain surrounded by a low concentration P-type diffusion layer; a triple well including a deep N-well, and a P-type IP well formed therein; a normal N-well for forming a Pch MOS transistor; and a normal P-well for forming an Nch MOS transistor; in which simultaneously formed are the low concentration N-type diffusion layer, N-well and normal N-well; the P-well and normal P-well; and the low concentration P-type diffusion layer and IP well.
    • 提供了一种半导体器件,其包括形成在同一衬底中的若干器件组件,例如具有偏置N沟道晶体管的P衬底,其中N型晶体管包括N型源极和漏极,其各自形成在彼此空间上分离的P阱中,并且漏极包围 通过低浓度N型扩散层; 偏移Pch晶体管,包括P型源极和漏极,各自形成在空间上彼此分离的N阱中,并且由低浓度P型扩散层包围的漏极; 包括深N阱的三阱和在其中形成的P型IP阱; 用于形成Pch MOS晶体管的正常N阱; 以及用于形成Nch MOS晶体管的正常P阱; 其中同时形成低浓度N型扩散层,N阱和正常N阱; P井和正常P井; 和低浓度P型扩散层和IP井。
    • 9. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20090050978A1
    • 2009-02-26
    • US11914872
    • 2007-03-12
    • Naohiro Ueda
    • Naohiro Ueda
    • H01L27/088
    • H01L29/78H01L27/088
    • A disclosed semiconductor device includes a driver transistor including a source and a drain of a second conductive type provided with an interval therebetween in a semiconductor substrate of a first conductive type, a gate electrode extending in a predetermined direction and provided on the semiconductor substrate via a gate insulating film between the source and the drain, plural insular back gate diffusion layers of the first conductive type provided in the source so as to be in contact with the semiconductor substrate, wherein the back gate diffusion layers are spaced apart and arranged in the predetermined direction in the source, and a contact hole extending in the predetermined direction on the source and at least one of the back gate diffusion layers.
    • 所公开的半导体器件包括驱动晶体管,其包括在第一导电类型的半导体衬底中设置有间隔的第二导电类型的源极和漏极,沿预定方向延伸的栅电极,并且经由 源极和漏极之间的栅极绝缘膜,设置在源极中的第一导电类型的多个岛状后栅极扩散层以与半导体衬底接触,其中后栅极扩散层间隔开并布置成预定的 在源极上的方向,以及在源极和至少一个背栅扩散层上沿预定方向延伸的接触孔。
    • 10. 发明申请
    • Method of forming semiconductor integrated device
    • 形成半导体集成器件的方法
    • US20050221551A1
    • 2005-10-06
    • US11134386
    • 2005-05-23
    • Naohiro UedaYoshinori Ueda
    • Naohiro UedaYoshinori Ueda
    • H01L21/8238H01L27/092
    • H01L21/823857H01L21/823892H01L27/0922H01L27/0928
    • A semiconductor device is provided comprising several device components formed in the same substrate, such as a P-substrate having an offset Nch transistor including N-type source and drain each formed in a P-well spatially separated from one another, and the drain surrounded by a low concentration N-type diffusion layer; an offset Pch transistor including P-type source and drain each formed in an N-well spatially separated from one another, and the drain surrounded by a low concentration P-type diffusion layer; a triple well including a deep N-well, and a P-type IP well formed therein; a normal N-well for forming a Pch MOS transistor; and a normal P-well for forming an Nch MOS transistor; in which simultaneously formed are the low concentration N-type diffusion layer, N-well and normal N-well; the P-well and normal P-well; and the low concentration P-type diffusion layer and IP well.
    • 提供了一种半导体器件,其包括形成在同一衬底中的若干器件组件,例如具有偏置N沟道晶体管的P衬底,其中N型晶体管包括N型源极和漏极,其各自形成在彼此空间上分离的P阱中,并且漏极包围 通过低浓度N型扩散层; 偏移Pch晶体管,包括P型源极和漏极,各自形成在空间上彼此分离的N阱中,并且由低浓度P型扩散层包围的漏极; 包括深N阱的三阱和在其中形成的P型IP阱; 用于形成Pch MOS晶体管的正常N阱; 以及用于形成Nch MOS晶体管的正常P阱; 其中同时形成低浓度N型扩散层,N阱和正常N阱; P井和正常P井; 和低浓度P型扩散层和IP井。