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    • 5. 发明申请
    • THIN FILM DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE APPARATUS, AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE MANUFACTURED BY USING THE METHOD
    • 薄膜沉积装置,使用装置制造有机发光显示装置的方法,以及使用该方法制造的有机发光显示装置
    • US20110186820A1
    • 2011-08-04
    • US12984289
    • 2011-01-04
    • Jung-Yeon KIMUn-Cheol SUNG
    • Jung-Yeon KIMUn-Cheol SUNG
    • H01L51/52H01L51/56
    • C23C14/243C23C14/044C23C14/12C23C14/562H01L51/56
    • A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured using the method. In the thin film deposition apparatus for forming a thin film on a substrate, the apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a common deposition region at an end of the patterning slit sheet and a plurality of patterning slits on the other end in a second direction perpendicular to the first direction, where each of the plurality of pattering slits includes a plurality of patterning sub slits that are different in length; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a deposition space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces. The thin film deposition apparatus is separated from the substrate by a predetermined distance. The thin film deposition apparatus and the substrate are movable relative to each other.
    • 薄膜沉积装置,使用薄膜沉积装置制造有机发光显示装置的方法和使用该方法制造的有机发光显示装置。 在用于在基板上形成薄膜的薄膜沉积装置中,该装置包括:放电沉积材料的沉积源; 沉积源喷嘴单元,设置在沉积源的一侧,并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片,与所述沉积源喷嘴单元相对设置并且包括在所述图案化缝隙片的端部处的共同沉积区域和在垂直于所述第一方向的第二方向上的另一端上的多个图案化缝隙, 多个图案狭缝包括长度不同的多个构图子狭缝; 以及阻挡板组件,其设置在所述沉积源喷嘴单元和所述图案化缝隙片之间的第一方向上,并且包括将所述沉积源喷嘴单元和所述图案化缝隙片之间的沉积空间分隔成多个子区的多个阻挡板 - 定位空间。 薄膜沉积设备与衬底分离预定距离。 薄膜沉积装置和基板可相对于彼此移动。