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    • 6. 发明申请
    • METHOD AND DEVICE FOR VISUALIZING DISTRIBUTION OF LOCAL ELECTRIC FIELD
    • 用于可视化局部电场分布的方法和装置
    • US20110068266A1
    • 2011-03-24
    • US12921991
    • 2009-03-13
    • Jun-ichi Fujita
    • Jun-ichi Fujita
    • G01N23/225
    • G01N23/2251G01N23/2206H01J2237/244
    • A method which visualizes the distribution of a local electric field formed near a sample 2 is disclosed. A primary electron beam 1 which passes through the local electric field formed near the sample 2 is deflected by the local electric field, secondary electrons which are generated and emitted from a detection element provided downstream of an orbit of the deflected primary electron beam 1 are detected by a secondary electron detector 6, and an image formed based on the detected signal and a scanning electron beam image obtained by scanning the sample 2 are synthesized thus visualizing the distribution of the local electric field in multiple tones. Due to such an operation, it is possible to provide a method for visualizing the distribution of a local electric field in which the distribution of a local electric field can be obtained in multiple tone and in real time by performing image scanning one time using a usual electron beam scanning optical system.
    • 公开了一种可视化样品2附近形成的局部电场分布的方法。 通过在样品2附近形成的局部电场的一次电子束1被局部电场偏转,检测从设置在偏转的一次电子束1的轨道下游的检测元件产生并发射的二次电子 通过二次电子检测器6,并且基于检测信号形成的图像和通过扫描样本2获得的扫描电子束图像被合成,从而可视化多个色调中的局部电场的分布。 由于这样的操作,可以提供一种用于使局部电场的分布可视化的方法,其中可以通过使用通常的方式执行图像扫描一次执行多次色调并且实时地获得局部电场的分布 电子束扫描光学系统。
    • 8. 发明申请
    • Process for production of nano-graphite structure
    • 纳米石墨结构生产工艺
    • US20050079120A1
    • 2005-04-14
    • US10503660
    • 2003-01-31
    • Jun-ichi FujitaMasahiko IshidaFumiyuki NiheyYukinori Ochiai
    • Jun-ichi FujitaMasahiko IshidaFumiyuki NiheyYukinori Ochiai
    • C01B31/02C01B31/04
    • B82Y30/00B82Y40/00C01B32/15C01P2004/16
    • The present invention provides a process for producing a nano-graphite structure having a desired two-dimensional or three-dimensional shape, which process possesses enough potential for ultra-fine processing to allow free selection of the size, shape, and position for the construction therefor; typically a process in which the nano-graphite structure 4 is produced by such a way where a nano-structure amorphous carbon structure 2 formed on a substrate 1 in advance in the shape of a desired ultra-fine steric configuration by a beam-excited reaction is equipped with catalyst metal atoms such as iron contained therein, and when subjecting the steric structure to a low-temperature heat treatment, the structure is converted into the graphite structure 3 through a catalytic thermal reaction by means of the catalyst metal atoms involved therein, while the shape of steric configuration thereof holds.
    • 本发明提供一种具有所需二维或三维形状的纳米石墨结构的制造方法,该方法具有足够的超细加工潜力,可以自由选择结构的尺寸,形状和位置 为此; 通常是通过以下方式制造纳米石墨结构体4的方法:其中通过束激发反应,预先形成在所需的超细立方体形状的基板1上的纳米结构无定形碳结构2 配有催化剂金属原子如铁中所含的铁,并且当对空间结构进行低温热处理时,通过催化热反应借助于其中涉及的催化剂金属原子将结构转化为石墨结构3, 而其立体形状的形状成立。