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    • 1. 发明授权
    • Latchable, magnetically actuated, ground plane-isolated radio frequency microswitch
    • 可锁定,磁力驱动,接地平面隔离射频微动开关
    • US07202765B2
    • 2007-04-10
    • US10845425
    • 2004-05-14
    • Jun ShenRimantas L. VaitkusGordon TamMeichun Ruan
    • Jun ShenRimantas L. VaitkusGordon TamMeichun Ruan
    • H01H51/22
    • H01P1/127H01H50/005H01H2050/007
    • Radio frequency (RF) switch comprising an electromagnet formed on a magnet, a transmission line formed on the electromagnet and having a ground line and a signal line, and a movable contact connected to either the ground line or the signal line and capable of electrically coupling the ground line with the signal line. The transmission line is capable of propagating a RF signal if the ground line is electrically decoupled from the signal line. Conversely, the transmission line is incapable of propagating a RF signal if the ground line is electrically coupled with the signal line. The electromagnet can comprise an electromagnetic coil, formed in a layer of dielectric material, electrically coupled to a current source. Preferably, the movable contact is capable of being magnetically actuated, and is latchable. The magnet, the electromagnet, the transmission line, and the movable contact can have dimensions at a micron order of magnitude. The transmission line can be a coplanar waveguide. The coplanar waveguide can include a ground plane positioned between a layer of dielectric material and the electromagnet. The coplanar waveguide can also include means to electrically couple the ground plane to the ground line.
    • 射频(RF)开关,其包括形成在磁体上的电磁体,形成在电磁体上并具有接地线和信号线的传输线,以及连接到地线或信号线的可移动触点,并且能够电耦合 地线与信号线。 如果接地线与信号线电耦合,则传输线能够传播RF信号。 相反,如果接地线与信号线电耦合,则传输线不能传播RF信号。 电磁体可以包括电磁线圈,其形成在电耦合到电流源的电介质材料层中。 优选地,可动触头能够被磁力驱动,并且可锁定。 磁体,电磁体,传输线和可动触点可以具有微米数量级的尺寸。 传输线可以是共面波导。 共面波导可以包括位于介电材料层和电磁体之间的接地平面。 共面波导还可以包括将接地平面电耦合到地线的装置。
    • 4. 发明授权
    • Latching micro-magnetic switch with improved thermal reliability
    • 具有提高热可靠性的锁存微型磁开关
    • US07420447B2
    • 2008-09-02
    • US11151663
    • 2005-06-14
    • Meichun RuanJun ShenGordon Tam
    • Meichun RuanJun ShenGordon Tam
    • H01H51/22
    • H01H50/005H01H2050/007
    • A micro-magnetic switch includes a permanent magnet and a supporting device having contacts coupled thereto and an embedded coil. The supporting device can be positioned proximate to the magnet. The switch also includes a cantilever coupled at a central point to the supporting device. The cantilever has a conducting material coupled proximate an end and on a side of the cantilever facing the supporting device and having a soft magnetic material coupled thereto. During thermal cycling the cantilever can freely expand based on being coupled at a central point to the supporting device, which substantially reduces coefficient of thermal expansion differences between the cantilever and the supporting device.
    • 微型磁性开关包括永磁体和具有与其连接的触点和嵌入式线圈的支撑装置。 支撑装置可以靠近磁体定位。 开关还包括在支撑装置的中心点处联接的悬臂。 悬臂具有接近靠近支撑装置的悬臂的端部和一侧上的导电材料,并且具有与其连接的软磁性材料。 在热循环期间,悬臂可以基于在支撑装置的中心点处联接而自由地膨胀,这大大降低了悬臂与支撑装置之间的热膨胀差异系数。
    • 5. 发明授权
    • Micro-magnetic latching switches with a three-dimensional solenoid coil
    • 具有三维电磁线圈的微型磁性开关
    • US07327211B2
    • 2008-02-05
    • US11084864
    • 2005-03-21
    • Meichun RuanCheng Ping WeiJun Shen
    • Meichun RuanCheng Ping WeiJun Shen
    • H01H51/22
    • H01F7/14H01F17/0006H01F2007/068H01H1/20H01H50/005H01H51/22H01H51/2236H01H2001/0042H01P1/127
    • A micro-machined magnetic latching switch is described. A moveable micro-machined cantilever has a magnetic material and a longitudinal axis. The cantilever has a conducting layer. A permanent magnet produces a first magnetic field, which induces a magnetization in the magnetic material. The magnetization is characterized by a magnetization vector pointing in a direction along the longitudinal axis of the cantilever. The first magnetic field is approximately perpendicular to longitudinal axis. A three-dimensional solenoid coil produces a second magnetic field to switch the cantilever between a first stable state and a second stable state. The temporary current is input to the three-dimensional solenoid coil, producing the second magnetic field such that a component of the second magnetic field parallel to the longitudinal axis changes direction of the magnetization vector. The cantilever is thereby caused to switch between the first stable state and the second stable state.
    • 描述了一种微加工的磁性闭锁开关。 可移动的微加工悬臂具有磁性材料和纵向轴线。 悬臂具有导电层。 永磁体产生第一磁场,其引起磁性材料中的磁化。 磁化的特征在于沿着悬臂的纵向轴线的方向指向的磁化矢量。 第一磁场大致垂直于纵轴。 三维电磁线圈产生第二磁场以在第一稳定状态和第二稳定状态之间切换悬臂。 临时电流被输入到三维螺线管线圈,产生第二磁场,使得与纵轴平行的第二磁场的分量改变磁化矢量的方向。 从而使悬臂在第一稳定状态和第二稳定状态之间切换。
    • 6. 发明授权
    • Micro magnetic non-latching switches and methods of making same
    • 微型非锁定开关及其制造方法
    • US07183884B2
    • 2007-02-27
    • US10684587
    • 2003-10-15
    • Jun ShenMeichun Ruan
    • Jun ShenMeichun Ruan
    • H01H51/22
    • H01H50/005
    • A micro magnetic switch includes a reference plane and a magnet located proximate to a supporting structure. The magnet produces a first magnetic field with uniformly spaced field lines approximately orthogonal to the reference plane, symmetrically spaced about a central axis, or non-uniformly spaced fields approximately orthogonal to the reference plane. The switch also includes a cantilever supported by the support structure. The cantilever has an axis of rotation lying in the reference plane and has magnetic material that makes the cantilever sensitive to the first magnetic field, such that the cantilever is configured to rotate about the axis of rotation between first and second states. The switch further includes a conductor located proximate to the supporting structure and the cantilever. The conductor is configured to conduct a current. The current produces a second magnetic field having a component approximately parallel to the reference plane and approximately perpendicular to the rotational axis of the cantilever, which causes the cantilever to switch between the first and second states. The switch still further includes a stopping device located proximate to the supporting structure. The stopping device is operable to stop the cantilever from rotating about the axis of symmetry beyond a point at which a longitudinal axis of the cantilever is approximately parallel to a longitudinal axis of the magnet.
    • 微型磁性开关包括参考平面和位于支撑结构附近的磁体。 磁体产生具有大致垂直于参考平面的均匀间隔的场线的第一磁场,围绕中心轴对称地间隔开,或者大致垂直于参考平面的非均匀间隔的场。 开关还包括由支撑结构支撑的悬臂。 悬臂具有位于参考平面中的旋转轴线并且具有使悬臂对第一磁场敏感的磁性材料,使得悬臂构造成围绕第一和第二状态之间的旋转轴线旋转。 开关还包括位于支撑结构和悬臂附近的导体。 导体被配置为导通电流。 电流产生具有大致平行于参考平面并且大致垂直于悬臂的旋转轴线的分量的第二磁场,这导致悬臂在第一和第二状态之间切换。 开关还包括位于支撑结构附近的止动装置。 止动装置可操作以阻止悬臂围绕对称轴旋转超过悬臂的纵向轴线近似平行于磁体的纵向轴线的点。
    • 8. 发明授权
    • Micro-magnetic latching switch with relaxed permanent magnet alignment requirements
    • 微磁锁定开关具有放松的永磁对准要求
    • US06794965B2
    • 2004-09-21
    • US10051447
    • 2002-01-18
    • Jun ShenMeichun RuanCharles Wheeler
    • Jun ShenMeichun RuanCharles Wheeler
    • H01H5122
    • H01H50/005G02B26/08H01H1/20H01H2050/007H01P1/127
    • A micro magnetic latching device. The device comprises a substrate having a moveable element supported thereon. The moveable element (cantilever) has a long axis and a magnetic material. The device also has first and second magnets that produce a first magnetic field, which induces a magnetization in the magnetic material. The magnetization is characterized by a magnetization vector pointing in a direction along the long axis of the moveable element, wherein the first magnetic field is approximately perpendicular to a major central portion of the long axis. The device also has a coil that produces a second magnetic field to switch the movable element between two stable states, wherein only temporary application of the second magnetic field is required to change direction of the magnetization vector thereby causing the movable element to switch between the two stable states.
    • 一种微型磁性闭锁装置。 该装置包括具有支撑在其上的可移动元件的基板。 可移动元件(悬臂)具有长轴和磁性材料。 该器件还具有产生第一磁场的第一和第二磁体,其在磁性材料中引起磁化。 磁化特征在于沿着可移动元件的长轴的方向指向的磁化矢量,其中第一磁场大致垂直于长轴的主要中心部分。 该装置还具有线圈,其产生第二磁场以在两个稳定状态之间切换可移动元件,其中仅需要临时施加第二磁场以改变磁化矢量的方向,从而使可移动元件在两者之间切换 稳定状态。
    • 10. 发明申请
    • Micro-magnetic latching switches with a three-dimensional solenoid coil
    • 具有三维电磁线圈的微型磁性开关
    • US20060049900A1
    • 2006-03-09
    • US11084864
    • 2005-03-21
    • Meichun RuanCheng WeiJun Shen
    • Meichun RuanCheng WeiJun Shen
    • H01H51/22
    • H01F7/14H01F17/0006H01F2007/068H01H1/20H01H50/005H01H51/22H01H51/2236H01H2001/0042H01P1/127
    • A micro-machined magnetic latching switch is described. A moveable micro-machined cantilever has a magnetic material and a longitudinal axis. The cantilever has a conducting layer. A permanent magnet produces a first magnetic field, which induces a magnetization in the magnetic material. The magnetization is characterized by a magnetization vector pointing in a direction along the longitudinal axis of the cantilever. The first magnetic field is approximately perpendicular to longitudinal axis. A three-dimensional solenoid coil produces a second magnetic field to switch the cantilever between a first stable state and a second stable state. The temporary current is input to the three-dimensional solenoid coil, producing the second magnetic field such that a component of the second magnetic field parallel to the longitudinal axis changes direction of the magnetization vector. The cantilever is thereby caused to switch between the first stable state and the second stable state.
    • 描述了一种微加工的磁性闭锁开关。 可移动的微加工悬臂具有磁性材料和纵向轴线。 悬臂具有导电层。 永磁体产生第一磁场,其引起磁性材料中的磁化。 磁化的特征在于沿着悬臂的纵向轴线的方向指向的磁化矢量。 第一磁场大致垂直于纵轴。 三维电磁线圈产生第二磁场以在第一稳定状态和第二稳定状态之间切换悬臂。 临时电流被输入到三维螺线管线圈,产生第二磁场,使得与纵轴平行的第二磁场的分量改变磁化矢量的方向。 从而使悬臂在第一稳定状态和第二稳定状态之间切换。