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1. 发明申请

US20100196804A1 Mask inspection apparatus and image creation method 失效
标题翻译：面膜检查装置及图像制作方法
公开(公告)号：US20100196804A1
公开(公告)日：2010-08-05
申请号：US12653792
申请日：2009-12-21
申请人： Tsutomu Murakawa , Toshimichi Iwai , Jun Matsumoto , Takayuki Nakamura , Yoshiaki Ogiso
发明人： Tsutomu Murakawa , Toshimichi Iwai , Jun Matsumoto , Takayuki Nakamura , Yoshiaki Ogiso
IPC分类号： G03F1/00 , G01N23/00
CPC分类号： G03F1/86
摘要： Provided is a mask inspection apparatus including: emitting unit for emitting electron beams onto a sample; electron detecting unit for detecting the quantity of electrons produced, by the emission of the electron beams, from the sample with patterns formed thereon; image processing unit for generating image data for the patterns on the basis of the electron quantity; and controlling unit for controlling the emitting unit, the electron detecting unit, and the image processing unit. The controlling unit calculates, from the size of a designated observation area of the sample, a division number of divisional images that are synthesized to form a joint image that covers the entire designated observation area. The controlling unit determines divisional areas so that adjacent divisional areas partially overlap each other. The controlling unit acquires SEM images for the respective divisional areas. The controlling unit synthesizes the SEM images of the divisional areas on the basis of coordinate data for the divisional areas and on the basis of edge information for patterns included in the overlapping regions, and thereby creates an SEM image of a wide field of view that covers the observation area.
摘要翻译：提供了一种掩模检查装置，包括：用于向样品发射电子束的发射单元; 电子检测单元，用于通过发射电子束从形成在其上的图案的样品检测产生的电子量; 图像处理单元，用于基于电子量产生用于图案的图像数据; 以及用于控制发光单元，电子检测单元和图像处理单元的控制单元。控制单元根据样本的指定观察区域的大小，计算合成为形成覆盖整个指定观察区域的关节图像的分割图像的分割数。控制单元确定分区，使得相邻的分区彼此部分重叠。控制单元获取各分区的SEM图像。控制单元基于分割区域的坐标数据并基于重叠区域中包含的图案的边缘信息来合成分割区域的SEM图像，从而创建覆盖了宽视场的SEM图像观察区。

2. 发明申请

US20110049362A1 Pattern measuring apparatus and pattern measuring method 有权
标题翻译：图案测量装置和图案测量方法
公开(公告)号：US20110049362A1
公开(公告)日：2011-03-03
申请号：US12807615
申请日：2010-09-09
申请人： Jun Matsumoto , Yoshiaki Ogiso
发明人： Jun Matsumoto , Yoshiaki Ogiso
IPC分类号： H01J37/22
CPC分类号： H01J37/222 , G03F1/84 , G03F1/86 , H01J37/244 , H01J37/28 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： A pattern measuring apparatus includes: an electron irradiating unit for radiating an electron beam onto a sample while scanning; an image data acquiring unit for acquiring an image of a pattern on the basis of an amount of electrons generated from the sample where the pattern is formed, by the radiation of the electron beam; a measurement region setting unit for setting paired measurement regions each including a pattern edge in the image of the pattern; and a controlling unit for calculating a distance between pattern edges in the paired measurement regions by detecting a shape of the pattern edge in each measurement region, respectively. The control unit calculates edge characteristic curves by finding moving averages of edge profiles by use of predetermined moving average widths, respectively, each edge profile representing the pattern edge in one of the measurement regions with position coordinates of each of measurement points arranged at predetermined intervals, and defines the positions of peak values of the edge characteristic curves as edge positions of the patterns in the measurement regions.
摘要翻译：图案测量装置包括：电子照射单元，用于在扫描时将电子束辐射到样品上; 图像数据获取单元，用于通过电子束的辐射获取基于从形成有图案的样品产生的电子的量的图案的图像; 测量区域设置单元，用于设置在图案的图像中包括图案边缘的成对测量区域; 以及控制单元，用于通过分别检测每个测量区域中的图案边缘的形状来计算成对的测量区域中的图案边缘之间的距离。控制单元分别通过使用预定的移动平均宽度来找出边缘轮廓的移动平均值来计算边缘特性曲线，每个边缘轮廓表示在测量区域之一中的图案边缘，其中每个测量点的位置坐标以预定间隔排列，并且将边缘特性曲线的峰值的位置定义为测量区域中的图案的边缘位置。

3. 发明授权

US08431895B2 Pattern measuring apparatus and pattern measuring method 有权
标题翻译：图案测量装置和图案测量方法
公开(公告)号：US08431895B2
公开(公告)日：2013-04-30
申请号：US12807615
申请日：2010-09-09
申请人： Jun Matsumoto , Yoshiaki Ogiso
发明人： Jun Matsumoto , Yoshiaki Ogiso
IPC分类号： G01N23/225 , H01J37/28
CPC分类号： H01J37/222 , G03F1/84 , G03F1/86 , H01J37/244 , H01J37/28 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： A pattern measuring apparatus includes: an electron irradiating unit for radiating an electron beam onto a sample while scanning; an image data acquiring unit for acquiring an image of a pattern on the basis of secondary electrons generated from the sample; a measurement region setting unit for setting paired measurement regions each including a pattern edge in the image; and a controlling unit for calculating a distance between pattern edges in the paired measurement regions by detecting a shape of the pattern edge. The control unit calculates edge characteristic curves by finding moving averages of edge profiles and defines the positions of peak values of the edge characteristic curves as edge positions of the patterns in the measurement regions.
摘要翻译：图案测量装置包括：电子照射单元，用于在扫描时将电子束辐射到样品上; 图像数据获取单元，用于基于从样本产生的二次电子获取图案的图像; 测量区域设置单元，用于设置每个包括图像中的图案边缘的成对测量区域; 以及控制单元，用于通过检测图案边缘的形状来计算成对的测量区域中的图案边缘之间的距离。控制单元通过找到边缘轮廓的移动平均值来计算边缘特征曲线，并且将边缘特征曲线的峰值的位置定义为测量区域中的图案的边缘位置。

4. 发明授权

US08071943B2 Mask inspection apparatus and image creation method 失效
标题翻译：面膜检查装置及图像制作方法
公开(公告)号：US08071943B2
公开(公告)日：2011-12-06
申请号：US12653792
申请日：2009-12-21
申请人： Tsutomu Murakawa , Toshimichi Iwai , Jun Matsumoto , Takayuki Nakamura , Yoshiaki Ogiso
发明人： Tsutomu Murakawa , Toshimichi Iwai , Jun Matsumoto , Takayuki Nakamura , Yoshiaki Ogiso
IPC分类号： G01N23/00 , H01J37/28
CPC分类号： G03F1/86
摘要： Provided is a mask inspection apparatus including: emitting unit for emitting electron beams onto a sample; electron detecting unit for detecting the quantity of electrons produced, by the emission of the electron beams, from the sample with patterns formed thereon; image processing unit for generating image data for the patterns on the basis of the electron quantity; and controlling unit for controlling the emitting unit, the electron detecting unit, and the image processing unit. The controlling unit calculates, from the size of a designated observation area of the sample, a division number of divisional images that are synthesized to form a joint image that covers the entire designated observation area. The controlling unit determines divisional areas so that adjacent divisional areas partially overlap each other. The controlling unit acquires SEM images for the respective divisional areas. The controlling unit synthesizes the SEM images of the divisional areas on the basis of coordinate data for the divisional areas and on the basis of edge information for patterns included in the overlapping regions, and thereby creates an SEM image of a wide field of view that covers the observation area.
摘要翻译：提供了一种掩模检查装置，包括：用于向样品发射电子束的发射单元; 电子检测单元，用于通过发射电子束从形成在其上的图案的样品检测产生的电子量; 图像处理单元，用于基于电子量产生用于图案的图像数据; 以及用于控制发光单元，电子检测单元和图像处理单元的控制单元。控制单元根据样本的指定观察区域的大小，计算合成为形成覆盖整个指定观察区域的关节图像的分割图像的分割数。控制单元确定分区，使得相邻的分区彼此部分重叠。控制单元获取各分区的SEM图像。控制单元基于分割区域的坐标数据并基于重叠区域中包含的图案的边缘信息来合成分割区域的SEM图像，从而创建覆盖了宽视场的SEM图像观察区。

5. 发明授权

US06546154B2 Image detection method and length measurement apparatus 失效
公开(公告)号：US06546154B2
公开(公告)日：2003-04-08
申请号：US10073704
申请日：2002-02-11
申请人： Yoshiaki Ogiso , Jun Matsumoto
发明人： Yoshiaki Ogiso , Jun Matsumoto
IPC分类号： G06K936
CPC分类号： G06T7/0004 , G06K9/6203 , G06T2207/30164
摘要： An image detection method for detecting a target image from an image of an object having a band-like pattern extending along a predetermined direction, the target image containing at least part of the band-like pattern, the method includes: storing at least part of the image of the object as image data; detecting a first partial image from the stored image data based on a first template containing a first band-like template pattern that extends along the predetermined direction, the first partial image being an image of a first partial region containing substantially the same pattern as the first band-like template pattern; and detecting a second partial image, as the target image, in a region extending from the first partial region along the predetermined direction based on the target image containing the at least part of the band-like pattern, the second partial image being an image of a second partial region containing substantially the same pattern as that of the target image.

6. 发明授权

US09199337B2 Method and apparatus for determining acceptance/rejection of fine diameter wire bonding 有权
标题翻译：用于确定细直径引线接合的接受/排除的方法和装置
公开(公告)号：US09199337B2
公开(公告)日：2015-12-01
申请号：US13635026
申请日：2011-03-08
申请人： Jun Matsumoto
发明人： Jun Matsumoto
IPC分类号： G06F19/00 , B23K31/12 , H01L21/66 , H01L23/00
CPC分类号： B23K31/125 , B23K2101/40 , H01L22/12 , H01L24/45 , H01L24/48 , H01L24/78 , H01L24/85 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48463 , H01L2224/48472 , H01L2224/78263 , H01L2224/85205 , H01L2224/859 , H01L2924/12042 , H01L2924/00014 , H01L2924/00012 , H01L2924/00
摘要： Disclosed are a method and apparatus for determining acceptance/rejection of fine diameter wire bonding of semiconductor devices, LED devices, and the like, which has been impossible with conventional methods, such as the method by image processing, with high accuracy and with no contact. The apparatus includes a heating laser device 1 for spot-heating the bonding portion of a fine diameter wire; a two-wavelength infrared radiation thermometer 2 for measuring temperature at high speed on the basis of a minute amount of infrared rays radiated from the heated portion of the fine diameter wire with correction of the emissivity; and a correction computing and determining means 4 for correcting the result of measurement with the two-wavelength infrared radiation thermometer 2 to a temperature change with the reference heating power, and then determining acceptance/rejection of the bonding by comparing the corrected temperature change or a numerical value correlated to a bonding area obtained from that temperature change, with a temperature change indicated by an acceptable product as a comparison criterion that has been corrected to the reference heating power or a numerical value correlated to a bonding area obtained from that temperature change.
摘要翻译：公开了一种用于确定半导体器件，LED器件等的细小直径引线接合的接受/拒绝的方法和装置，这已经不可能用常规方法，例如图像处理的方法，具有高精度和无接触。该装置包括用于对细径线的接合部进行点加热的加热用激光装置1，基于从细径线的加热部分辐射的微量的红外线来测量高速度的温度的双波长红外辐射温度计2，校正发射率; 以及校正计算和确定装置4，用于使用双波长红外辐射温度计2将测量结果校正为具有参考加热功率的温度变化，然后通过比较校正的温度变化或确定温度变化来确定接合/拒绝与由该温度变化获得的接合面积相关的数值，具有由可接受的产品表示的温度变化作为对已经被校正为参考加热功率的比较标准的数值或与由该温度变化获得的接合面积相关的数值。

7. 发明授权

US08972249B2 Decoding apparatus and method, encoding apparatus and method, and program 有权
标题翻译：解码装置和方法，编码装置和方法以及程序
公开(公告)号：US08972249B2
公开(公告)日：2015-03-03
申请号：US13634658
申请日：2011-03-15
申请人： Shiro Suzuki , Yuuki Matsumura , Jun Matsumoto , Yuuji Maeda , Yasuhiro Toguri
发明人： Shiro Suzuki , Yuuki Matsumura , Jun Matsumoto , Yuuji Maeda , Yasuhiro Toguri
IPC分类号： G10L19/02 , G10L21/038
CPC分类号： G10L21/038 , G10L19/0212
摘要： The present invention relates to a decoding apparatus, a decoding method, an encoding apparatus, an encoding method, and programs that can shorten the delay time caused by the band extension at the time of decoding, and restrain increases in resources on the decoding side.A higher frequency component generating unit (73) generates a pseudo higher frequency spectrum by using a lower frequency spectrum (SP-L) and a higher frequency envelope (ENV-H). A phase randomizing unit (74) randomizes the phase of the pseudo higher frequency spectrum, based on a random flag (RND). An inverse MDCT unit (75) denormalizes the lower frequency spectrum (SP-L) by using a lower frequency envelope (ENV-L), and combines the pseudo higher frequency spectrum supplied from the phase randomizing unit (74) with the denormalized lower frequency spectrum (SP-L). The combination result is used as the spectrum of the entire band. The present invention can be applied to a decoding apparatus that performs band extension decoding, for example.
摘要翻译：解码装置，解码方法，编码装置，编码方法和程序技术领域本发明涉及可以缩短在解码时由频带扩展引起的延迟时间的解码装置，解码方法，编码装置，编码方法和程序，并且抑制解码侧的资源增加。较高频率分量产生单元（73）通过使用较低频谱（SP-L）和较高频率包络（ENV-H）产生伪较高频谱。相位随机化单元（74）基于随机标记（RND）使伪较高频谱的相位随机化。逆MDCT单元（75）通过使用较低频率包络（ENV-L）对较低频谱（SP-L）进行非归一化，并且将从相位随机化单元（74）提供的伪高频频谱与非归一化较低频率光谱（SP-L）。组合结果用作整个频带的频谱。本发明可以应用于例如进行频带扩展解码的解码装置。

8. 发明授权

US08831453B2 Image forming apparatus 有权
标题翻译：图像形成装置
公开(公告)号：US08831453B2
公开(公告)日：2014-09-09
申请号：US13473897
申请日：2012-05-17
申请人： Jun Matsumoto
发明人： Jun Matsumoto
IPC分类号： G03G15/16 , G03G15/01
CPC分类号： G03G15/0189 , G03G15/161 , G03G2215/0177 , G03G2215/1657
摘要： The image forming apparatus includes an image bearing member that bears a toner image, an image forming unit, an intermediate transfer unit, a primary transfer member, a cleaning member movable between a contact position and a non-contact position, a voltage application unit, a control unit, a current detection unit, wherein the control unit moves the cleaning member at the non-contact position, determines a transfer voltage based on a current value detected by said current detection unit when a predetermined voltage is applied from said voltage application unit to said primary transfer member before an image formation and in a condition where said cleaning member is at the non-contact position, and applies the transfer voltage to the primary transfer member in the image formation.
摘要翻译：图像形成装置包括承载调色剂图像的图像承载部件，图像形成单元，中间转印单元，一次转印部件，可在接触位置和非接触位置之间移动的清洁部件，电压施加单元，控制单元，电流检测单元，其中控制单元在非接触位置移动清洁构件，当从所述电压施加单元施加预定电压时，基于由所述电流检测单元检测到的电流值来确定转印电压在图像形成之前并且在所述清洁部件处于非接触位置的状态下将所述一次转印部件施加到所述一次转印部件，并且在图像形成中将转印电压施加到一次转印部件。

9. 发明授权

US08820909B2 Black ink composition, ink set, and image forming method 有权
标题翻译：黑色墨水组合物，墨水组合和成像方法
公开(公告)号：US08820909B2
公开(公告)日：2014-09-02
申请号：US13426618
申请日：2012-03-22
申请人： Misato Sasada , Jun Matsumoto
发明人： Misato Sasada , Jun Matsumoto
IPC分类号： B41J2/01 , C09D11/00 , B41J2/21 , C09D11/10 , B41J11/00
CPC分类号： C09D11/324 , B41J2/2107 , B41J11/002 , C09D11/101 , C09D11/40 , C09D11/54
摘要： A black ink composition includes a resin-coated carbon black containing a water-soluble resin and carbon black, a water-soluble polymerizable compound, a polymerization initiator, and water, wherein an average primary particle diameter of the carbon black is 20 nm or more, and an absorbance ratio of absorbance at a wavelength of 350 nm with respect to absorbance at a wavelength of 600 nm (absorbance at a wavelength of 350 nm/absorbance at a wavelength of 600 nm), when the black ink composition is diluted 5,000-fold with water, is 1.9 or lower.
摘要翻译：黑色油墨组合物包括含有水溶性树脂和炭黑的树脂包覆炭黑，水溶性聚合性化合物，聚合引发剂和水，其中，所述炭黑的平均一次粒径为20nm以上，相对于600nm波长处的吸光度（波长350nm处的吸光度，波长600nm处的吸光度），波长350nm处的吸光度的吸光度比，当黑色墨水组合物稀释5,000〜用水折叠，为1.9或更低。

10. 发明授权

US08425005B2 Image forming method and ink composition 有权
标题翻译：图像形成方法和油墨组成
公开(公告)号：US08425005B2
公开(公告)日：2013-04-23
申请号：US12881205
申请日：2010-09-14
申请人： Tomoyuki Ohzeki , Jun Matsumoto , Masao Ikoshi
发明人： Tomoyuki Ohzeki , Jun Matsumoto , Masao Ikoshi
IPC分类号： B41J2/14
CPC分类号： C09D11/38 , B41J2/14201 , B41J2/1433
摘要： The present invention provides an image forming method and an ink composition used in the method by which deterioration of a head plate which is formed of silicon is suppressed and more precise images are stably formed, where ink containing an inorganic silicate compound is ejected to form an image from an inkjet head having a nozzle plate where SiO2 film is provided on a surface thereof at a side toward the ink ejection direction of the nozzle.
摘要翻译：本发明提供了一种图像形成方法和油墨组合物，其用于抑制由硅形成的头板的劣化并且稳定地形成更精确的图像的方法，其中喷射含有无机硅酸盐化合物的油墨以形成来自具有喷嘴板的喷墨头的图像，其中在其喷嘴方向的一侧的表面上设置有SiO 2膜。

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