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    • 1. 发明授权
    • Method for manufacturing device
    • 制造装置的方法
    • US07141515B2
    • 2006-11-28
    • US11017752
    • 2004-12-22
    • Jun MatsuiHidehiko Nakata
    • Jun MatsuiHidehiko Nakata
    • H01L21/31
    • G02B6/136G02B2006/121
    • A method for manufacturing a device where an improvement of etching accuracy and curtailing of manufacturing costs are realized when a device is manufactured attended with etching, such as RIE, in which a device; i.e., an object of etching, evolves heat.The method includes a coating step of applying over the surface of a device a photosensitive resin containing a phenol-based resin as a main ingredient; a transfer step of transferring a desired pattern on a device surface coated with the photosensitive resin by means of exposing the device surface coated with the photosensitive resin to light with the desired pattern; a development step of subjecting to development treatment the device having the pattern transferred thereon; and an etching step of etching the device surface while the pattern of the photosensitive resin developed through the development treatment is taken as a mask pattern.
    • 一种制造装置的方法,其中在制造装置时实现了蚀刻精度的提高和制造成本的削减,其中诸如RIE的蚀刻,其中装置; 即蚀刻的对象放出热量。 该方法包括在装置的表面上施加含有酚醛树脂作为主要成分的感光性树脂的涂布步骤; 转印步骤,通过将所述感光性树脂涂覆的装置表面以所需图案曝光,将涂布有感光性树脂的装置表面转印所需图案; 显影步骤,对其上转印图案的装置进行显影处理; 以及当通过显影处理显影的感光性树脂的图案被作为掩模图案时蚀刻该器件表面的蚀刻步骤。
    • 2. 发明申请
    • Method for manufacturing device
    • 制造装置的方法
    • US20050124173A1
    • 2005-06-09
    • US11017752
    • 2004-12-22
    • Jun MatsuiHidehiko Nakata
    • Jun MatsuiHidehiko Nakata
    • G02B6/12G02B6/136H01L21/311H01L21/31H01L21/469
    • G02B6/136G02B2006/121
    • A method for manufacturing a device where an improvement of etching accuracy and curtailing of manufacturing costs are realized when a device is manufactured attended with etching, such as RIE, in which a device; i.e., an object of etching, evolves heat. The method includes a coating step of applying over the surface of a device a photosensitive resin containing a phenol-based resin as a main ingredient; a transfer step of transferring a desired pattern on a device surface coated with the photosensitive resin by means of exposing the device surface coated with the photosensitive resin to light with the desired pattern; a development step of subjecting to development treatment the device having the pattern transferred thereon; and an etching step of etching the device surface while the pattern of the photosensitive resin developed through the development treatment is taken as a mask pattern.
    • 一种制造装置的方法,其中在制造装置时实现了蚀刻精度的提高和制造成本的削减,其中诸如RIE的蚀刻,其中装置; 即蚀刻的对象放出热量。 该方法包括在装置的表面上施加含有酚醛树脂作为主要成分的感光性树脂的涂布步骤; 转印步骤,通过将所述感光性树脂涂覆的装置表面以所需图案曝光,将涂布有感光性树脂的装置表面转印所需图案; 显影步骤,对其上转印图案的装置进行显影处理; 以及当通过显影处理显影的感光性树脂的图案被作为掩模图案时蚀刻该器件表面的蚀刻步骤。
    • 5. 发明授权
    • Foil bearing
    • 箔轴承
    • US07056025B2
    • 2006-06-06
    • US10815937
    • 2004-04-02
    • Hidehiko Nakata
    • Hidehiko Nakata
    • F16C32/06
    • F16C37/002F16C17/024F16C33/1005
    • In a foil bearing comprising: a stationary mount member (2) surrounding an outer circumferential surface of a journal (4) of a rotating member via an annular gap (G); and a plurality of centripetal force producing foils (or bump foils) 7 arranged in the annular gap so as to oppose a substantially entire part of the outer circumferential surface of the journal, the stationary mount member is provided with a plurality of circumferentially arranged through-holes (8) at an axially middle portion thereof, and the centripetal force producing foils comprise members which are axially spaced apart from each other at a position where the through-holes are located.
    • 一种箔片轴承,包括:经由环形间隙(G)围绕旋转构件的轴颈(4)的外圆周表面的固定安装构件(2); 以及配置在所述环状间隙中以与所述轴颈的外周面的大致整个部分相对的多个向心力产生箔(或凸块箔)7,所述固定安装构件设置有多个周向布置的贯通孔, 在其轴向中间部分处的孔(8),并且向心力产生箔包括在通孔所在的位置处彼此轴向间隔开的构件。
    • 7. 发明申请
    • Optical waveguide module
    • 光波导模块
    • US20050047716A1
    • 2005-03-03
    • US10928363
    • 2004-08-27
    • Takahiro ArakidaHidehiko NakataKenji Suzuki
    • Takahiro ArakidaHidehiko NakataKenji Suzuki
    • G02B6/12G02B6/13G02B6/42G02B6/26
    • G02B6/12002G02B6/13G02B6/4214
    • An optical waveguide module for easily detecting incident light intensity excelling in high integration, comprising a light emitting portion, a substrate, clad formed on the substrate, and a first core and a second core covered with the clad and formed by a material having a higher refractive index than that of the clad; wherein a first reflection surface is formed as an incident side end portion of the first core for reflecting a light emitted from the light emitting portion to the guiding direction of the first core for optically connecting; a second reflection surface is formed as an incident side end portion of the second core for reflecting a light emitted from the light emitting portion to the guiding direction of the second core for optically connecting; and the light irradiated from the light emitting portion to the incident side end portion of the first core is guided to the guiding direction of the first core and the light irradiated from the light emitting portion to the incident side end portion of the second core is guided to the guiding direction of the second core.
    • 一种用于容易地检测高集成度的入射光强度的光波导模块,包括形成在基板上的发光部分,基板,包层以及被覆层覆盖的第一芯和第二芯,并由具有较高的 折射率高于包层; 其中第一反射表面形成为第一芯的入射侧端部,用于将从发光部发射的光反射到用于光学连接的第一芯的引导方向; 第二反射面形成为第二芯的入射侧端部,用于将从发光部发射的光向第二芯的引导方向反射,以进行光学连接; 并且从发光部照射到第一芯的入射侧端部的光被引导到第一芯的引导方向,并且从发光部照射到第二芯的入射侧端部的光被引导 到第二核心的引导方向。
    • 10. 发明申请
    • Optical wavelength switch having planar lightwave circuit structure
    • 具有平面光波电路结构的光波长开关
    • US20060252170A1
    • 2006-11-09
    • US11485738
    • 2006-07-13
    • Hidehiko NakataSatoshi IdeKoji Terada
    • Hidehiko NakataSatoshi IdeKoji Terada
    • H01L21/00
    • G02B6/357G02B6/3514G02B6/352G02B6/356G02B6/3566G02B6/3596
    • An optical wavelength switch having a planar wave guide formed on a substrate is disclosed that comprises a wave-guide-type diffraction grating which includes an input/output wave guide having an under-clad layer on a sacrificial layer formed on the substrate, a core layer formed on the under-clad layer and an over-clad layer formed on the core layer, a first slab wave guide connected with the input/output wave guide, an array wave guide whose one side is connected with the first slab wave guide, and a second slab wave guide with which the other side of the array wave guide is connected; and a movable girder whose one end is firmly secured to the substrate, the movable girder having the same under-clad layer, core layer and over-clad layer as those of the wave-guide-type diffraction grating, wherein the optical wavelength switch has a reflecting mirror at the tip of the movable girder, the reflecting mirror facing an end face of the second slab wave guide, with the position of the reflecting mirror being set displaceable along a direction perpendicular to the optical axis.
    • 公开了一种具有形成在基板上的平面波导的光波长开关,其包括波导型衍射光栅,该波导型衍射光栅包括在形成于基板上的牺牲层上具有下包层的输入/输出波导, 形成在下覆盖层上的层和形成在芯层上的覆盖层,与输入输出波导连接的第一板状波导,一侧与第一板状波导连接的阵列波导, 以及与阵列波导的另一侧连接的第二平板波导; 以及其一端牢固地固定在基板上的可移动梁,该可移动梁具有与波导型衍射光栅相同的下包层,芯层和外覆层,其中光波长开关具有 所述反射镜位于所述可移动梁的顶端,所述反射镜面向所述第二平板波导的端面,所述反射镜的位置被设置为可沿垂直于所述光轴的方向移位。