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    • 2. 发明授权
    • Chamber material made of Al alloy and heater block
    • 室内材料由铝合金和加热块组成
    • US06521046B2
    • 2003-02-18
    • US09773638
    • 2001-02-02
    • Toshiyuki TanakaKoji WadaJun HisamotoHiroki SawadaHiroshi Matsuura
    • Toshiyuki TanakaKoji WadaJun HisamotoHiroki SawadaHiroshi Matsuura
    • C23C1600
    • H01J37/32467
    • A chamber material made of Al alloy excellent in thermal cracking resistance and chemical and/or physical corrosion resistance and capable of reducing contamination excellently and further having excellent and wide applicable brazing property in a high temperature corrosive circumstance, in which the substrate aluminum material for the chamber material made of Al alloy having an anodized film comprises 0.1 to 2.0% Si, 0.1 to 3.5% Mg, 0.02 to 4.0% Cu on the mass% basis and the balance of Al and impurity element with Cr in the impurity elements being less than 0.04%. Preferably, Fe is 0.1% or less and Mn is 0.04% or less in the impurity element and, further, the total sum of impurity elements other than Cr and Mn being restricted to 0.1% or less. This invention can be utilized suitably to various materials used in high temperature corrosive circumstance, particularly, in high temperature corrosive gas or plasma atmosphere.
    • 由耐热龟裂性,耐化学腐蚀性和/或物理耐腐蚀性优异并且能够在高温腐蚀环境中具有优异且广泛适用的钎焊性能的,能够优异地降低污染的Al合金制的腔室材料,其中用于 具有阳极氧化膜的Al合金制成的室内材料以质量%计含有0.1〜2.0%的Si,0.1〜3.5%的Mg,0.02〜4.0%的Cu,余量的Al和杂质元素的杂质元素的Cr少于 0.04%。 优选的是,在杂质元素中,Fe为0.1%以下,Mn为0.04%以下,Cr,Mn以外的杂质元素的总和为0.1%以下。 本发明可以适用于高温腐蚀性环境中使用的各种材料,特别是在高温腐蚀性气体或等离子体气氛中。
    • 5. 发明申请
    • MEMBER FOR PLASMA TREATMENT APPARATUS AND PRODUCTION METHOD THEREOF
    • 等离子体处理装置的成员及其生产方法
    • US20110220289A1
    • 2011-09-15
    • US13129302
    • 2008-12-02
    • Toshiyuki TanakaJun HisamotoHiroto Sugano
    • Toshiyuki TanakaJun HisamotoHiroto Sugano
    • C23C16/50H01L21/3065C25D11/02
    • H01J37/32477C23C16/4404C25D11/045H01J37/32467H01J37/3255
    • A member for a plasma treatment apparatus is provided, which has excellent anti-sticking properties, is suitable, for example, as a lower electrode in CVD apparatuses, has a stable shape as the lower electrode, and can suppress abnormal discharge during plasma treatment. The member for a plasma treatment apparatus comprises a base material formed of an aluminum alloy having a smoothly machined surface and a treated anodic oxide coating provided on the surface of the base material and formed by hydrating an anodic oxide coating formed on the surface of the base material to form microcracks therein. The anodic oxide coating has a leak current density of more than 0.9×10−5 A/cm2 at an applied voltage of 100 V, a thickness of not less than 3 μm, an arithmetic average surface roughness of less than 1 μm, and a dissolution rate of less than 100 mg/dm2/15 min in a phosphoric and chromic acid immersion test. The flatness of the surface on which the anodic oxide coating has been formed is not more than 50 μm.
    • 提供了一种等离子体处理装置的构件,其具有优异的防粘性,适合于CVD装置中的下电极,作为下电极具有稳定的形状,并且可以抑制等离子体处理期间的异常放电。 用于等离子体处理装置的构件包括由具有平滑加工表面的铝合金形成的基材和经设置在基材表​​面上的经处理的阳极氧化物涂层,并且通过水合形成在基材表面上的阳极氧化物涂层 材料在其中形成微裂纹。 阳极氧化膜的施加电压为100V,厚度不小于3μm,算术平均表面粗糙度小于1μm,漏电流密度大于0.9×10 -5 A / cm 2, 在磷酸和铬酸浸渍试验中溶解速率小于100mg / dm2 / 15min。 已经形成阳极氧化物涂层的表面的平坦度不大于50μm。
    • 8. 发明授权
    • Photographing apparatus and method to control auxiliary light emission
    • 摄影装置和控制辅助发光的方法
    • US08446518B2
    • 2013-05-21
    • US12624629
    • 2009-11-24
    • Toshiyuki Tanaka
    • Toshiyuki Tanaka
    • H04N5/232G03B13/00
    • H04N5/2256H04N5/23212
    • A photographing apparatus and method are provided that can reduce power consumption by detecting a high precision focusing position for a predetermined range and controlling light emission according to a driving mode when performing focus control. The photographing apparatus includes: a lens movable in an optical axis direction and that focuses a subject image on an imaging surface; a photoelectric converter that converting the subject image into an electric signal; a focusing position detector for detecting a focusing position of the focus lens when at least one main subject image of the subject images is focused on the imaging surface; a focus control unit for controlling a first drive of the focus lens and a second drive of the focus lens that is different from the first drive; a light emitting unit; and a light emitting control unit for controlling for different light emissions during the first and second drive.
    • 提供一种拍摄装置和方法,其可以通过在预定范围内检测高精度聚焦位置并且当执行聚焦控制时根据驱动模式来控制发光来降低功耗。 拍摄装置包括:可沿光轴方向移动并将被摄体图像聚焦在成像表面上的透镜; 光电转换器,将被摄体图像转换为电信号; 聚焦位置检测器,用于当被摄体图像的至少一个主要被摄体图像聚焦在成像表面上时,检测聚焦透镜的聚焦位置; 聚焦控制单元,用于控制聚焦透镜的第一驱动和与第一驱动不同的聚焦透镜的第二驱动; 发光单元; 以及发光控制单元,用于在第一和第二驱动期间控制不同的光发射。
    • 9. 发明授权
    • Contents retrieval system and contents retrieval method
    • 内容检索系统和内容检索方法
    • US08347363B2
    • 2013-01-01
    • US12598095
    • 2009-04-06
    • Toshiyuki Tanaka
    • Toshiyuki Tanaka
    • G06F21/00
    • G06F17/3089
    • In a contents retrieval system, when a publisher terminal uploads shared contents to a shared server, the shared server stores the shared contents in a contents area of a contents database, a partial data formation section forms partial data specifying the shared contents and stores the formed partial data in a partial data area, and a URL generation section forms a URL linked to the shared contents and stores the URL in a URL area. When the contents retrieval section receives partial data from the retriever terminal, it collates the received partial data with the partial data in partial data area of the contents database. When the partial data is found, the contents retrieval section replies a URL of the corresponding shared contents to the retriever terminal.
    • 在内容检索系统中,当发布者终端将共享内容上传到共享服务器时,共享服务器将共享内容存储在内容数据库的内容区域中,部分数据形成部分形成指定共享内容的部分数据,并存储形成 部分数据区域中的部分数据和URL生成部分形成链接到共享内容的URL,并将该URL存储在URL区域中。 当内容检索部分从收件人终端接收到部分数据时,将收到的部分数据与内容数据库的部分数据区域中的部分数据进行核对。 当发现部分数据时,内容检索部分将相应的共享内容的URL回复给检索者终端。