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1. 发明授权

US07837796B2 Process chamber, inline coating installation and method for treating a substrate 有权
标题翻译：处理室，在线涂布装置和处理基材的方法
公开(公告)号：US07837796B2
公开(公告)日：2010-11-23
申请号：US11680361
申请日：2007-02-28
申请人： Juergen Henrich , Michael Schaefer , Edgar Haberkorn
发明人： Juergen Henrich , Michael Schaefer , Edgar Haberkorn
IPC分类号： C23C16/00
CPC分类号： C23C16/54
摘要： A process chamber 1 for PECVD (Plasma Enhanced Chemical Vapor Deposition) coating of a substrate includes an electrode, which is integrated in a contact frame, which is firmly connected to the recipient. A movable carrier in the process chamber carries at least one substrate. The carrier is transported by means of a driven roller positioner into the process chamber or out of the process chamber along a transport route defined by the movement. As soon as the carrier inside the recipient has reached a certain position, the lower roller positioner is uncoupled from carrier by lowering by means of a lifting device. In this regard, the carrier detaches itself from the upper roller positioner. Then, the carrier is accepted by a transfer device (not shown) and brought from the transport position laterally into a treatment position in contact with the contact frame. In this way, reliable contact is produced between the electrode and a counter-electrode provided in carrier. At the same time, other carriers, in so far as the contact frame is removed laterally far enough from the transport route, during the coating of the carrier, can be moved past this.
摘要翻译：用于基板的PECVD（等离子体增强化学气相沉积）涂层的处理室1包括集成在接触框架中的电极，其牢固地连接到接收器。处理室中的可移动载体承载至少一个基板。载体通过从动辊定位器沿着由运动限定的运输路线输送到处理室中或从处理室中输送。一旦收件人内的承运人已经达到一定的位置，则下辊定位器通过借助于提升装置的下降而脱离载体。在这方面，载体将自身从上辊定位器分离。然后，托架被转移装置（未示出）接受，并从运输位置横向地进入与接触框架接触的处理位置。以这种方式，在电极和设置在载体中的对电极之间产生可靠的接触。同时，在载体的涂覆期间，其他载体，只要在接触框架从输送路线横向移开足够远的位置即可移动过去。

2. 发明申请

US20080184933A1 PROCESS CHAMBER, INLINE COATING INSTALLATION AND METHOD FOR TREATING A SUBSTRATE 有权
标题翻译：过程室，在线涂装安装和处理基板的方法
公开(公告)号：US20080184933A1
公开(公告)日：2008-08-07
申请号：US11680361
申请日：2007-02-28
申请人： Juergen Henrich , Michael Schaefer , Edgar Haberkorn
发明人： Juergen Henrich , Michael Schaefer , Edgar Haberkorn
IPC分类号： C23C16/455
CPC分类号： C23C16/54
摘要： A process chamber 1 for PECVD (Plasma Enhanced Chemical Vapor Deposition) coating of a substrate includes an electrode, which is integrated in a contact frame, which is firmly connected to the recipient. A movable carrier in the process chamber carries at least one substrate. The carrier is transported by means of a driven roller positioner into the process chamber or out of the process chamber along a transport route defined by the movement. As soon as the carrier inside the recipient has reached a certain position, the lower roller positioner is uncoupled from carrier by lowering by means of a lifting device. In this regard, the carrier detaches itself from the upper roller positioner. Then, the carrier is accepted by a transfer device (not shown) and brought from the transport position laterally into a treatment position in contact with the contact frame. In this way, reliable contact is produced between the electrode and a counter-electrode provided in carrier. At the same time, other carriers, in so far as the contact frame is removed laterally far enough from the transport route, during the coating of the carrier, can be moved past this.
摘要翻译：用于基板的PECVD（等离子体增强化学气相沉积）涂层的处理室1包括集成在接触框架中的电极，其牢固地连接到接收器。处理室中的可移动载体承载至少一个基板。载体通过从动辊定位器沿着由运动限定的运输路线输送到处理室中或从处理室中输送。一旦收件人内的承运人已经达到一定的位置，则下辊定位器通过借助于提升装置的下降而脱离载体。在这方面，载体将自身从上辊定位器分离。然后，托架被转移装置（未示出）接受，并从运输位置横向地进入与接触框架接触的处理位置。以这种方式，在电极和设置在载体中的对电极之间产生可靠的接触。同时，在载体的涂覆期间，其他载体，只要在接触框架从输送路线横向移开足够远的位置即可移动过去。

3. 发明申请

US20080223693A1 ARRANGEMENT FOR MOVING A CARRIER IN A CHAMBER, IN PARTICULAR A VACUUM CHAMBER 审中-公开
标题翻译：用于在室内移动载体的装置，特别是真空室
公开(公告)号：US20080223693A1
公开(公告)日：2008-09-18
申请号：US12039606
申请日：2008-02-28
申请人： Edgar Haberkorn , Susanne Schlaefer
发明人： Edgar Haberkorn , Susanne Schlaefer
IPC分类号： B65G35/00 , B65G13/02
CPC分类号： H01L21/68785 , C23C14/56 , C23C16/54
摘要： An arrangement for moving a carrier within a vacuum chamber is described. This carrier is formed in the shape of a plate and is supported with its narrow-side lower edge on rollers driven by a drive system. As a drive system uses a magnetic coupling which is disposed partially within the vacuum chamber and partially outside of the vacuum chamber. With the aid of a force acting in the vertical direction the two components of the magnetic coupling can be displaced relative to one another. In addition, horizontal displacement of the carrier is also possible.
摘要翻译：描述了用于在真空室内移动载体的装置。该载体形成为板状，并且由驱动系统驱动的辊的窄侧下缘支撑。当驱动系统使用部分设置在真空室内并且部分位于真空室外部的磁耦合时。借助于在垂直方向上作用的力，磁耦合的两个部件可相对于彼此移位。此外，载体的水平位移也是可能的。

4. 发明申请

US20080302656A1 VACUUM COATING INSTALLATION WITH TRANSPORT ROLLERS FOR THE TRANSPORT OF A PLANAR SUBSTRATE 审中-公开
标题翻译：用于运输平板基板的运输滚筒的真空涂装安装
公开(公告)号：US20080302656A1
公开(公告)日：2008-12-11
申请号：US11758955
申请日：2007-06-06
申请人： Jurgen Henrich , Andreas Sauer , Harald Wurster , Edgar Haberkorn
发明人： Jurgen Henrich , Andreas Sauer , Harald Wurster , Edgar Haberkorn
IPC分类号： C23C14/34
CPC分类号： C23C14/56 , C23C14/50
摘要： The invention relates to a vacuum coating installation with a transport system for planar substrates which are transported through a vacuum chamber. This transport system comprises several cylinders disposed in parallel. As the driving means for these cylinders one or several motors may be provided, which are located within or outside of the vacuum chamber. The coupling between the motor or the motors and the cylinders in any event takes place via magnet couplings. Since hereby no mechanical coupling established between the driving means and the cylinders, these can readily be separated from one another, which permits providing the cylinders, and with them the sputter cathodes, in a slide-in element which can be moved into and out of the vacuum chamber. If not every cylinder is provided with its own driving means, the cylinders, which are coupled with a driving means, can be connected via V-belts or the like with the other cylinders.
摘要翻译：本发明涉及一种具有通过真空室输送的平面基板输送系统的真空镀膜装置。该输送系统包括平行设置的多个圆筒。作为这些气缸的驱动装置，可以设置一个或几个电动机，其位于真空室内或室外。在任何情况下，电动机或电动机与气缸之间的联接通过磁性联轴器进行。因此，由于驱动装置和气缸之间没有建立机械耦合，所以它们可以容易地彼此分开，这允许将气缸及其溅射阴极提供在可以移入和移出的滑入元件中真空室。如果不是每个气缸都设置有自己的驱动装置，则与驱动装置联接的气缸可以通过V型皮带等与其它气缸连接。

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