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    • 1. 发明申请
    • Frequency tunable resonant scanner
    • 频率可调共振扫描仪
    • US20050099665A1
    • 2005-05-12
    • US10963833
    • 2004-10-14
    • Ju-hyun LeeJin-woo Cho
    • Ju-hyun LeeJin-woo Cho
    • G02B26/08G02B26/10H04N1/113H02P5/46
    • G02B26/0841
    • Provided is a one-axis driving optical scanner including a substrate, a stage separated a predetermined height from the substrate and having an optical scanning surface formed on an upper surface thereof, a plurality of first driving comb electrodes extending from opposite sides of the stage, a first anchor separated a predetermined distance from the opposite sides of the stage and fixed on the substrate and having a plurality of first fixed comb electrodes arranged at one side thereof to be alternate with the first driving comb electrodes, at least one first bending spring having one end connected to a center portion of each of another opposite sides of the stage, an inertia portion separated a predetermined distance above the substrate, in which the other end of the first bending spring is connected to a center portion of one side thereof, a second anchor fixed on the substrate at opposite sides of the first anchor, a second bending spring connecting the inertia portion and the second anchor, and an inertia portion pulling unit to pull the inertia portion in a direction opposite to the first bending spring.
    • 本发明提供一种单轴驱动光学扫描器,其包括基板,与基板隔开预定高度的台,其上表面上形成有光学扫描面;从台的相对侧延伸的多个第一驱动梳电极, 第一锚固体,其与所述载物台的相对侧隔开预定距离并且固定在所述基板上,并且具有布置在其一侧的多个第一固定梳电极,以与所述第一驱动梳电极交替;至少一个第一弯曲弹簧, 一端连接到台的另一相对侧的中心部分,在基板上方隔开预定距离的惯性部分,其中第一弯曲弹簧的另一端连接到其一侧的中心部分, 固定在第一锚固体的相对侧的基板上的第二锚固件,连接惯性部分和第二固定件的第二弯曲弹簧 以及惯性部分拉动单元,以沿与第一弯曲弹簧相反的方向拉动惯性部分。
    • 5. 发明申请
    • Micro electro mechanical system device
    • 微机电系统装置
    • US20080007376A1
    • 2008-01-10
    • US11711057
    • 2007-02-27
    • Hee-moon JeongSeok-jin KangJin-woo ChoYoung-chul KOHyun-ku Jeong
    • Hee-moon JeongSeok-jin KangJin-woo ChoYoung-chul KOHyun-ku Jeong
    • H01F7/08G01R27/26
    • G02B26/085H01F7/066H01F2007/068
    • A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.
    • 提供了微机电系统(MEMS)装置。 MEMS器件包括:以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括:从该台延伸的感测臂; 驱动梳子,其从感测臂延伸并与舞台一起旋转; 固定梳子,其被固定地支撑以与驱动梳状物接合,固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部,其检测驱动梳和固定梳的电容变化。 因此,MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。
    • 6. 发明申请
    • ROTATIONAL MICRO MIRROR
    • 旋转微镜
    • US20070171496A1
    • 2007-07-26
    • US11408049
    • 2006-04-21
    • Hee-Moon JeongJin-ho LeeJin-woo Cho
    • Hee-Moon JeongJin-ho LeeJin-woo Cho
    • G02B26/08
    • G02B26/0841H02N1/008H04N5/7416H04N5/7458H04N9/3129Y10S359/904
    • A rotational micro mirror is rapidly driven, has a large driving angle, and is structurally stable. The rotational micro mirror includes: a substrate; a reflection plate which is rotatable and reflects light; a pair of torsion springs which support opposite ends of the reflection plate so that the reflection plate is raised from the substrate, and acting as a rotation axis when the reflection plate is rotationally driven; a pair of frames which are connected to the reflection plate without connecting to the torsion springs and are symmetrically formed with respect to the torsion springs; frame supporting units which connect the reflection plate and the frames; and a driving unit including moving combs disposed on the frames and static combs disposed on the substrate and respectively corresponding to the moving combs in order to generate an electrostatic force.
    • 旋转微镜快速驱动,驱动角度大,结构稳定。 旋转微镜包括:基底; 可旋转并反射光的反射板; 一对扭转弹簧,其支撑反射板的相对端,使得反射板从基板升起,并且当反射板旋转驱动时用作旋转轴线; 一对框架,其连接到反射板而不连接到扭转弹簧并且相对于扭转弹簧对称地形成; 连接反射板和框架的框架支撑单元; 以及驱动单元,其包括设置在框架上的移动梳和设置在基板上并分别对应于移动梳的静态梳以产生静电力。