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    • 4. 发明授权
    • Modular sorter
    • 模块化分拣机
    • US06520727B1
    • 2003-02-18
    • US09547829
    • 2000-04-12
    • Daniel BabbsTimothy EwaldMatthew CoadyWilliam J. Fosnight
    • Daniel BabbsTimothy EwaldMatthew CoadyWilliam J. Fosnight
    • B65G4907
    • H01L21/67271H01L21/67775H01L21/67778Y10S414/139
    • A modular sorter is disclosed in which modular sections maybe easily added and removed to add and remove load port assemblies as required by a particular wafer fabrication run. In one embodiment, a modular sorter according to the present invention include a two-wide modular section defining a minienvironment for the sorter, a wafer handling robot a pair of aligners and a centralized controller. The modular section of this embodiment includes a pair of side-by-side load port assemblies for receiving a container or open cassette and presenting the cassette to the minienvironment of the sorter for processing of the wafers therein. The present invention further includes a removable end panel. When it is desired to add additional modular sections to the sorter, the end panel is removed and replaced by a connector frame. The connector frame allows additional modular sections, including either one load port assembly or two load port assemblies, to be attached to the original modular section. All of the power and control components for the modular sections are preferably located in the centralized controller. Upon attachment of the additional modular section, the power and signal connections for the additional section are plugged into the controller. The controller then recognizes the additional section and changes the overall operation scheme to now operate as a three-wide sorter or a four-wide sorter.
    • 公开了一种模块化分选机,其中可以容易地添加和移除模块化部分,以根据特定的晶片制造运行的要求添加和移除负载端口组件。 在一个实施例中,根据本发明的模块化分拣机包括限定分拣机的微型环境的双宽模块部分,晶片处理机器人,一对对准器和集中式控制器。 该实施例的模块化部分包括一对并排负载端口组件,用于接收容器或打开的盒,并将盒呈现到分类器的最小环境中,用于处理其中的晶片。 本发明还包括可移除端板。 当需要向分拣机添加额外的模块化部分时,端面板被移除并由连接器框架代替。 连接器框架允许附加模块化部分,包括一个装载端口组件或两个装载端口组件,以连接到原始模块化部分。 模块化部件的所有功率和控制部件优选地位于集中式控制器中。 在附加模块化部分的附件中,附加部分的电源和信号连接插入控制器。 然后,控制器识别附加部分,并将整体操作方案改变为现在作为三宽分选机或四宽分选机运行。
    • 5. 发明授权
    • System for parallel processing of workpieces
    • 工件并行加工系统
    • US06326755B1
    • 2001-12-04
    • US09547551
    • 2000-04-12
    • Daniel BabbsTimothy EwaldMatthew CoadyJae Kim
    • Daniel BabbsTimothy EwaldMatthew CoadyJae Kim
    • B25J922
    • B25J18/04B25J9/042H01L21/67766
    • A dual paddle end effector robot is disclosed which is capable of parallel processing of workpieces. The end effector includes a lower paddle rotatably coupled to an end of the distal link, and an upper paddle rotatably coupled to the lower paddle. The lower paddle supports a drive assembly capable of rotating the upper paddle with respect to the lower paddle. In one embodiment of the present invention, the dual paddle end effector robot may be used within a wafer sorter to perform parallel processing of workpieces on a pair of aligners within the sorter. In such an embodiment, the robot may first acquire a pair of workpieces from adjacent shelves within the workpiece cassette. After withdrawing from the cassette, the respective paddles on the end effector may fan out and transfer the wafers to the chucks of the respective aligners. After processing of the workpieces on the aligners is complete, the fanned end effector paddles may re acquire the workpieces, the upper paddle may return to its home position located directly over the lower paddle, and then return the processed workpieces to their original cassette or to a new cassette. Parallel processing of workpieces in this fashion provides significantly greater throughput than in conventional wafer sorter systems. Throughput may be improved still further by providing buffering locations for the workpieces at the respective aligners.
    • 公开了一种能够并行处理工件的双桨式末端执行器机器人。 末端执行器包括可旋转地联接到远侧连杆的端部的下桨,以及可旋转地联接到下桨的上桨。 下桨支撑能够使上桨相对于下桨旋转的驱动组件。 在本发明的一个实施例中,双桨式末端执行器机器人可以在晶片分拣机内使用,以在分拣机内的一对对准器上执行工件的并行处理。 在这样的实施例中,机器人可以首先从工件盒内的相邻货架获取一对工件。 在从盒子退出之后,端部执行器上的各个叶片可以扇出并将晶片传送到各个对准器的卡盘。 在对准器上的工件处理完成之后,扇形末端执行器桨叶可以重新获取工件,上部桨叶可以返回到位于下部桨叶正下方的原始位置,然后将经处理的工件返回到其原始盒子或 一个新的盒子。 以这种方式并行处理工件比传统的晶片分选机系统提供显着更大的生产量。 通过在相应的对准器处为工件提供缓冲位置,可以进一步改善生产量。