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1. 发明授权

US4939424A Apparatus for producing a plasma and for the treatment of substrates 失效
标题翻译：用于制造等离子体和用于处理基底的装置
公开(公告)号：US4939424A
公开(公告)日：1990-07-03
申请号：US355886
申请日：1989-05-23
申请人： Jorg Kieser , Michael Geisler , Rolf Wilhelm , Eberhard Rauchle
发明人： Jorg Kieser , Michael Geisler , Rolf Wilhelm , Eberhard Rauchle
IPC分类号： H05H1/46 , C23C16/40 , C23C16/44 , C23C16/50 , C23C16/511 , H01J37/32
CPC分类号： H01J37/32275 , C23C16/511 , H01J37/32192 , H01J37/32366 , H01J37/32678
摘要： The plasma produced by means of microwaves in the presence of a magnetic field and a gas serves to coat a substrate which is situated in a chamber having metal walls. The microwaves are repeatedly reflected at the metal walls, so that the chamber has numerous microwave modes. By means of permanent magnets, which are placed either inside the chamber or outside the chamber in the vicinity of the substrate that is to be coated, it is possible to produce within this chamber an electron-cyclotron resonance which permits a locally controlled ignition of the plasma.
摘要翻译：在存在磁场和气体的情况下通过微波产生的等离子体用于涂覆位于具有金属壁的室中的衬底。微波在金属壁处反复反射，使得腔室具有许多微波模式。通过将永磁体放置在腔室内或室内的待涂覆衬底附近的永磁体，可以在该室内产生电子回旋共振，其允许局部控制点火等离子体。

2. 发明授权

US5053244A Process for depositing silicon oxide on a substrate 失效
标题翻译：在基材上沉积氧化硅的方法
公开(公告)号：US5053244A
公开(公告)日：1991-10-01
申请号：US158217
申请日：1988-02-19
申请人： Jorg Kieser , Michael Geisler , Rolf Wilhelm , Eberhard Rauchle
发明人： Jorg Kieser , Michael Geisler , Rolf Wilhelm , Eberhard Rauchle
IPC分类号： C23C16/511 , H01J37/32 , H05H1/46
CPC分类号： H01J37/32275 , C23C16/511 , H01J37/32192 , H01J37/32366 , H01J37/32678 , H05H1/46
摘要： The invention relates to an apparatus for producing a plasma and treating substrates therein. The plasma produced by means of microwaves serves to coat a substrate which is situated in a chamber (5) having metal walls (6,7,12,13). The microwaves are repeatedly reflected at the metal walls (6,7,12,13), so that the chamber (5) has numerous microwave modes. By means of permanent magnets, which are placed either inside the chamber (5) or outside the chamber (5) in the vicinity of the substrate that is to be coated, it is possible to produce within this chamber (5) an electron-cyclotron resonance which permits a locally controlled ignition of the plasma.
摘要翻译：本发明涉及一种用于生产等离子体和处理基板的设备。通过微波产生的等离子体用于涂覆位于具有金属壁（6,7,12,13）的腔室（5）中的基底。微波在金属壁（6,7,12,13）处反复反射，使得腔室（5）具有许多微波模式。通过将永久磁铁放置在腔室（5）的内部或室（5）外部的待涂覆衬底附近，可以在该腔室（5）内产生电子回旋加速器允许局部控制等离子体点火的共振。

3. 发明授权

US4740763A Microwave calorimeter 失效
标题翻译：微波量热仪
公开(公告)号：US4740763A
公开(公告)日：1988-04-26
申请号：US932934
申请日：1986-11-20
申请人： Rolf Wilhelm , Paul G. Schuller
发明人： Rolf Wilhelm , Paul G. Schuller
IPC分类号： G01R21/04 , G01N22/04 , H01P1/26
CPC分类号： G01N22/04
摘要： A microwave calorimeter for very high power, with a housing, which surrou a feed chamber, into which a waveguide runs for feeding the microwaves, and an absorber-chamber which is separated from the feed chamber by a dielectric wall and contains a microwave-absorbing fluid, the fluid consisting at least in part of a compound whose capacity for the absorption of microwaves is less than that of water.
摘要翻译：一种用于非常高功率的微波量热计，其具有外壳，其围绕用于馈送微波的波导运行的馈送室，以及吸收室，其通过电介质壁与馈电室分离并且包含微波吸收流体，至少部分由吸收微波的能力小于水的化合物组成的流体。

4. 发明授权

US4782314A Fluid-tight coupling device for microwaves 失效
标题翻译：用于微波的流体密封耦合装置
公开(公告)号：US4782314A
公开(公告)日：1988-11-01
申请号：US54850
申请日：1987-05-27
申请人： Gunther Muller , Rolf Wilhelm
发明人： Gunther Muller , Rolf Wilhelm
IPC分类号： H01P1/08 , H01P1/30 , H01P3/20 , H01P5/02
CPC分类号： H01P1/08
摘要： A fluid-tight coupling device for microwave radiation of high energy incls a tubular dielectric window which is sealingly connected to one end of a waveguide supplying the microwave radiation and forms a continuation of the waveguide. The other end of the tube forming the window is tightly sealed by an essentially conical reflector. The tube forming the window is surrounded on the outside by a cup-shaped waveguide portion. The reflecting surface of the reflector and the reflecting inner surface of the cup-shaped waveguide portion are formed such that the microwave radiation emerging from the waveguide is reflected through the tubular window into the cup-shaped waveguide portion and from the latter to the open end of the waveguide portion in such a manner that an input mode of type TE.sub.mn is transformed into itself or a well-defined adjacent mode TE.sub.m'n', further secondary modes are minimized and at the same time return waves are also minimized. Due to the cylidrical form a window area of one or two orders of magnitude larger than in the known plane windows is obtained and thus a correspondingly smaller area stress so that even very high microwave powers can be transmitted.
摘要翻译：用于高能量微波辐射的流体密封耦合装置包括管状电介质窗口，其密封地连接到提供微波辐射的波导的一端并形成波导的延续。形成窗户的管的另一端由基本上圆锥形的反射器紧密地密封。形成窗的管在外侧由杯形波导部分包围。反射器的反射面和杯形波导部分的反射内表面形成为使得从波导管出射的微波辐射通过管状窗口反射到杯状波导部分中，并从后面到达开口端以使得TEmn类型的输入模式被变换成自身或者明确定义的相邻模式TEm'n'的方式，进一步的二次模式被最小化，并且同时返回波也被最小化。由于圆弧形式，获得比已知平面窗口大一个或两个数量级的窗口区域，因此获得相应较小的面积应力，使得甚至可以传输非常高的微波功率。

5. 发明授权

US4897285A Method and apparatus for PCVD internal coating a metallic pipe by means of a microwave plasma 失效
标题翻译：用于PCVD的方法和装置通过微波等离子体内部涂覆金属管
公开(公告)号：US4897285A
公开(公告)日：1990-01-30
申请号：US365424
申请日：1989-06-13
申请人： Rolf Wilhelm
发明人： Rolf Wilhelm
IPC分类号： C23C16/50 , C23C16/511 , H01J37/32
CPC分类号： H01J37/32192 , C23C16/045 , C23C16/511 , H01J37/32678
摘要： A microwave plasma method/of depositing a coating of a prescribed material on the internal surface of a pipe by means of a reaction of a vapor phase providing a prescribed material in which:(a) an atmosphere at a pressure less than atmospheric pressure containing the vapor phase is introduced into the pipe,(b) microwave energy is beamed into the pipe which is propagated along the length of the inside of the pipe,(c) a magnetic field is generated in a localized area of the pipe in which electron cyclotron resonance occurs for the the frequency of the microwaves, and in which, pressure, field strength of the magnetic field and the power of the high-frequency field are selected that a low-pressure gas discharge results in the area of the magnetic field to trigger the reaction furnishing the prescribed material, and(d) in which the magnetic field and thus the plasma are transposed along the length of the pipe.
摘要翻译：一种微波等离子体方法/通过提供规定材料的气相的反应将规定材料的涂层沉积在管内表面上，其中：（a）低于大气压的气氛，其中含有蒸气相被引入到管道中，（b）微波能量沿着管子内部的长度被传播到管道中，（c）在管子的局部区域中产生磁场，其中电子回旋加速器对于微波的频率发生共振，其中选择压力，磁场的场强和高频场的功率，使得低压气体放电导致磁场的面积触发提供规定材料的反应，以及（d）其中磁场和因此等离子体沿着管的长度转置。

6. 发明授权

US4754238A Microwave absorber using gaseous cooling fluid 失效
标题翻译：使用气体冷却液的微波吸收器
公开(公告)号：US4754238A
公开(公告)日：1988-06-28
申请号：US932935
申请日：1986-11-20
申请人： Paul G. Schuller , Rolf Wilhelm
发明人： Paul G. Schuller , Rolf Wilhelm
IPC分类号： H01P1/30 , H01P1/26
CPC分类号： H01P1/264
摘要： A microwave absorber with a microwave-absorbing material, a protective hong surrounding this, and a waveguide leading into the protective housing, through which waveguide the microwaves to be absorbed can be conducted to the absorbing material, the microwave-absorbing material forming a solid body with a hollow, on one side of which the waveguide opens, a termination element being arranged on the side of the hollow opposite to the waveguide, and the housing being provided with an inlet and an outlet for a cooling fluid.
摘要翻译：具有微波吸收材料的微波吸收体，围绕该微波吸收材料的保护壳体和通向保护壳体的波导通过该波导将吸收的微波传导到吸收材料，形成固体的微波吸收材料具有中空部分，波导在其一侧开口，终端元件布置在与波导相对的中空侧上，壳体设置有用于冷却流体的入口和出口。

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