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    • 9. 发明申请
    • Patterning Method of Metal Oxide Thin Film Using Nanoimprinting, and Manufacturing Method of Light Emitting Diode
    • 使用纳米印刷的金属氧化物薄膜的图案化方法和发光二极管的制造方法
    • US20110169027A1
    • 2011-07-14
    • US12698194
    • 2010-02-02
    • Hyeong-Ho ParkJun-Ho JeongKi-Don KimDae-Geun ChoiJun-Hyuk ChoiJi-Hye LeeSoon-Won Lee
    • Hyeong-Ho ParkJun-Ho JeongKi-Don KimDae-Geun ChoiJun-Hyuk ChoiJi-Hye LeeSoon-Won Lee
    • H01L33/58C23C14/28D06N7/04B29C59/16H05B6/00
    • H01L33/42H01L2924/0002H01L2933/0016Y10T428/24802H01L2924/00
    • Disclosed are a patterning method of a metal oxide thin film using nanoimprinting, and a manufacturing method of a light emitting diode (LED). The method for forming a metal oxide thin film pattern using nanoimprinting includes: coating a photosensitive metal-organic material precursor solution on a substrate; preparing a mold patterned to have a protrusion and depression structure; pressurizing the photosensitive metal-organic material precursor coating layer with the patterned mold; forming a cured metal oxide thin film pattern by heating the pressurized photosensitive metal-organic material precursor coating layer or by irradiating ultraviolet rays to the pressurized photosensitive metal-organic material precursor coating layer while being heated; and removing the patterned mold from the metal oxide thin film pattern, and selectively further includes annealing the metal oxide thin film pattern. Within this, there is provided a method for forming a metal dioxe thin film pattern using nano imprinting, which makes it possible to simplify the process for forming the pattern since the process of separately applying the ultraviolet resin to be used as the resist can be omitted, and forms a micro/nano composite pattern through a single imprint process.
    • 公开了使用纳米压印的金属氧化物薄膜的图案化方法和发光二极管(LED)的制造方法。 使用纳米压印形成金属氧化物薄膜图案的方法包括:将光敏金属 - 有机材料前体溶液涂覆在基底上; 制备图案化的具有突起和凹陷结构的模具; 用图案化的模具对感光金属 - 有机材料前体涂层进行加压; 通过加热加压的感光金属 - 有机材料前体涂层或通过在被加热时向加压的感光金属 - 有机材料前体涂层照射紫外线来形成固化的金属氧化物薄膜图案; 并且从金属氧化物薄膜图案移除图案化的模具,并且还包括退火金属氧化物薄膜图案。 其中,提供了使用纳米压印形成金属二氧化物薄膜图案的方法,由于可以省略分离施加用作抗蚀剂的紫外线树脂的工艺,所以可以简化形成图案的工艺 ,并通过单个压印工艺形成微/纳复合图案。
    • 10. 发明授权
    • Method of fabricating patterned polymer film with nanometer scale
    • 用纳米级制作图案化聚合物膜的方法
    • US07081269B2
    • 2006-07-25
    • US10761277
    • 2004-01-22
    • Seung-Man YangSe Gyu JangDae-Geun Choi
    • Seung-Man YangSe Gyu JangDae-Geun Choi
    • B05D5/12
    • B82Y10/00B05D1/42B82Y40/00G03F7/0002H01L51/0004
    • A method of fabricating a patterned polymer film with nanometer scale includes filling particles each having a predetermined size in a pattern provided to a soft polymer mold to prepare an embossed stamp; placing the embossed stamp on a desired polymer film; allowing the embossed stamp placed on the polymer film to stand at temperatures higher than a glass transfer temperature of the polymer film for a predetermined time; and releasing the embossed stamp from the polymer film. Alternatively, the patterned polymer film is obtained by filling particles each having a predetermined size in a pattern provided to a soft polymer mold to prepare an embossed stamp; placing the embossed stamp on a coating layer of a polymer precursor formed on a substrate; curing the coating layer; and releasing the embossed stamp from the cured coating layer.
    • 制造具有纳米尺度的图案化聚合物膜的方法包括以提供给软聚合物模具的图案填充每个具有预定尺寸的颗粒以制备压花印模; 将压花印模放置在所需的聚合物膜上; 允许放置在聚合物膜上的压花印模在高于聚合物膜的玻璃转移温度的温度下静置预定时间; 并从聚合物膜中释放压花印模。 或者,通过以提供给软质聚合物模具的图案填充每个具有预定尺寸的颗粒来制备图案化的聚合物膜,以制备压花印模; 将压花印模放置在形成在基板上的聚合物前体的涂层上; 固化涂层; 并从固化的涂层上释放压花印模。