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    • 1. 发明申请
    • Patterning Method of Metal Oxide Thin Film Using Nanoimprinting, and Manufacturing Method of Light Emitting Diode
    • 使用纳米印刷的金属氧化物薄膜的图案化方法和发光二极管的制造方法
    • US20110169027A1
    • 2011-07-14
    • US12698194
    • 2010-02-02
    • Hyeong-Ho ParkJun-Ho JeongKi-Don KimDae-Geun ChoiJun-Hyuk ChoiJi-Hye LeeSoon-Won Lee
    • Hyeong-Ho ParkJun-Ho JeongKi-Don KimDae-Geun ChoiJun-Hyuk ChoiJi-Hye LeeSoon-Won Lee
    • H01L33/58C23C14/28D06N7/04B29C59/16H05B6/00
    • H01L33/42H01L2924/0002H01L2933/0016Y10T428/24802H01L2924/00
    • Disclosed are a patterning method of a metal oxide thin film using nanoimprinting, and a manufacturing method of a light emitting diode (LED). The method for forming a metal oxide thin film pattern using nanoimprinting includes: coating a photosensitive metal-organic material precursor solution on a substrate; preparing a mold patterned to have a protrusion and depression structure; pressurizing the photosensitive metal-organic material precursor coating layer with the patterned mold; forming a cured metal oxide thin film pattern by heating the pressurized photosensitive metal-organic material precursor coating layer or by irradiating ultraviolet rays to the pressurized photosensitive metal-organic material precursor coating layer while being heated; and removing the patterned mold from the metal oxide thin film pattern, and selectively further includes annealing the metal oxide thin film pattern. Within this, there is provided a method for forming a metal dioxe thin film pattern using nano imprinting, which makes it possible to simplify the process for forming the pattern since the process of separately applying the ultraviolet resin to be used as the resist can be omitted, and forms a micro/nano composite pattern through a single imprint process.
    • 公开了使用纳米压印的金属氧化物薄膜的图案化方法和发光二极管(LED)的制造方法。 使用纳米压印形成金属氧化物薄膜图案的方法包括:将光敏金属 - 有机材料前体溶液涂覆在基底上; 制备图案化的具有突起和凹陷结构的模具; 用图案化的模具对感光金属 - 有机材料前体涂层进行加压; 通过加热加压的感光金属 - 有机材料前体涂层或通过在被加热时向加压的感光金属 - 有机材料前体涂层照射紫外线来形成固化的金属氧化物薄膜图案; 并且从金属氧化物薄膜图案移除图案化的模具,并且还包括退火金属氧化物薄膜图案。 其中,提供了使用纳米压印形成金属二氧化物薄膜图案的方法,由于可以省略分离施加用作抗蚀剂的紫外线树脂的工艺,所以可以简化形成图案的工艺 ,并通过单个压印工艺形成微/纳复合图案。