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1. 发明申请

US20130088028A1 METHOD AND APPARATUS FOR LIFTING A HORIZONTALLY-ORIENTED SUBSTRATE FROM A CASSETTE 失效
标题翻译：从CASSETTE提取水平面的基材的方法和装置
公开(公告)号：US20130088028A1
公开(公告)日：2013-04-11
申请号：US13268129
申请日：2011-10-07
申请人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel , Richard Muka
发明人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel , Richard Muka
IPC分类号： B25J15/00
CPC分类号： H01L21/67766 , H01L21/67778 , H01L21/67781
摘要： A system and method are disclosed for removing horizontally oriented substrates from a cassette. A substrate lifter has an engagement end for engaging a substrate and an adjustment end for engaging an adjustment assembly. The engagement end includes a recess having first and second arcuate sidewalls configured to engage an OD of the substrate, and a circular protrusion positioned between the first and second arcuate sidewalls. The circular protrusion allows lateral movement of the substrate up to a predetermined amount and prevents lateral movement of the substrate in excess of the predetermined amount. Other embodiments are described and claimed.
摘要翻译：公开了用于从盒中去除水平取向的基板的系统和方法。基板升降器具有用于接合基板的接合端和用于接合调节组件的调节端。接合端包括具有第一和第二弓形侧壁的凹部，所述第一和第二弧形侧壁被配置为接合基板的外径，以及定位在第一和第二弧形侧壁之间的圆形突起。圆形突起允许基板横向移动到预定量，并防止基板横向移动超过预定量。描述和要求保护其他实施例。

2. 发明授权

US08585115B2 Method and apparatus for lifting a horizontally-oriented substrate from a cassette 失效
标题翻译：用于从盒子提起水平取向的基底的方法和装置
公开(公告)号：US08585115B2
公开(公告)日：2013-11-19
申请号：US13268129
申请日：2011-10-07
申请人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel , Richard Muka
发明人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel , Richard Muka
IPC分类号： B66F19/00
CPC分类号： H01L21/67766 , H01L21/67778 , H01L21/67781
摘要： A system and method are disclosed for removing horizontally oriented substrates from a cassette. A substrate lifter has an engagement end for engaging a substrate and an adjustment end for engaging an adjustment assembly. The engagement end includes a recess having first and second arcuate sidewalls configured to engage an OD of the substrate, and a circular protrusion positioned between the first and second arcuate sidewalls. The circular protrusion allows lateral movement of the substrate up to a predetermined amount and prevents lateral movement of the substrate in excess of the predetermined amount. Other embodiments are described and claimed.
摘要翻译：公开了用于从盒中去除水平取向的基板的系统和方法。基板升降器具有用于接合基板的接合端和用于接合调节组件的调节端。接合端包括具有第一和第二弓形侧壁的凹部，所述第一和第二弧形侧壁被配置为接合基板的外径，以及定位在第一和第二弧形侧壁之间的圆形突起。圆形突起允许基板横向移动到预定量，并防止基板横向移动超过预定量。描述和要求保护其他实施例。

3. 发明授权

US09218990B2 Method and apparatus for holding a plurality of substrates for processing 有权
标题翻译：用于保持多个用于处理的基板的方法和装置
公开(公告)号：US09218990B2
公开(公告)日：2015-12-22
申请号：US13268123
申请日：2011-10-07
申请人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel , Edward MacIntosh
发明人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel , Edward MacIntosh
IPC分类号： H01L21/687 , H01L21/67
CPC分类号： H01L21/67 , H01L21/68728 , H01L21/68764 , H01L21/68771
摘要： A substrate carrier includes a carrier plate, a cover plate and a plurality of substrate support slots. The carrier plate has recesses for receiving substrates. A sidewall of each recess includes protrusions for engaging the OD of a substrate. The cover plate is rotatable and has a cam on an undersurface. The cam is enagageable with a lateral slot in each of a plurality of substrate supports of the carrier plate. Rotating the cover plate causes the cam to move the substrate supports, one by one, so a substrate engaging end of the substrate support moves away from an associated substrate recess. A substrate is loaded into the recess, whereupon the cover plate is rotated further so the cam disengages from the lateral slot. The substrate supports are biased to engage the OD of the substrate to lock the substrate within the recess. Other embodiments are described and claimed.
摘要翻译：衬底载体包括载体板，盖板和多个衬底支撑槽。承载板具有用于接收基板的凹部。每个凹部的侧壁包括用于接合基底的OD的突起。盖板可旋转并且在下表面上具有凸轮。该凸轮在承载板的多个基板支撑件的每一个中都具有侧向槽。旋转盖板导致凸轮逐个移动基板支撑件，使得基板支撑件的基板接合端远离相关联的基板凹部移动。将衬底装入凹部中，于是盖板进一步旋转，使得凸轮与侧向槽脱离。衬底支撑件被偏置以接合衬底的OD以将衬底锁定在凹部内。描述和要求保护其他实施例。

4. 发明申请

US20130089403A1 METHOD AND APPARATUS FOR HOLDING A PLURALITY OF SUBSTRATES FOR PROCESSING 有权
标题翻译：用于保持用于处理的多个基板的方法和装置
公开(公告)号：US20130089403A1
公开(公告)日：2013-04-11
申请号：US13268123
申请日：2011-10-07
申请人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel , Edward MacIntosh
发明人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel , Edward MacIntosh
IPC分类号： B65G65/00 , B65D51/04
CPC分类号： H01L21/67 , H01L21/68728 , H01L21/68764 , H01L21/68771
摘要： A substrate carrier includes a carrier plate, a cover plate and a plurality of substrate support slots. The carrier plate has recesses for receiving substrates. A sidewall of each recess includes protrusions for engaging the OD of a substrate. The cover plate is rotatable-and has a cam on an undersurface. The cam is enagageable with a lateral slot in each of a plurality of substrate supports of the carrier plate. Rotating the cover plate causes the cam to move the substrate supports, one by one, so a substrate engaging end of the substrate support moves away from an associated substrate recess. A substrate is loaded into the recess, whereupon the cover plate is rotated further so the cam disengages from the lateral slot. The substrate supports are biased to engage the OD of the substrate to lock the substrate within the recess. Other embodiments are described and claimed.
摘要翻译：衬底载体包括载体板，盖板和多个衬底支撑槽。承载板具有用于接收基板的凹部。每个凹部的侧壁包括用于接合基底的OD的突起。盖板是可旋转的，并且在下表面上具有凸轮。该凸轮在承载板的多个基板支撑件的每一个中都具有侧向槽。旋转盖板导致凸轮逐个移动基板支撑件，使得基板支撑件的基板接合端远离相关联的基板凹部移动。将衬底装入凹部中，于是盖板进一步旋转，使得凸轮与侧向槽脱离。衬底支撑件被偏置以接合衬底的OD以将衬底锁定在凹部内。描述和要求保护其他实施例。

5. 发明申请

US20130088030A1 METHOD AND APPARATUS FOR MANIPULATING A SUBSTRATE 失效
标题翻译：用于操作基板的方法和装置
公开(公告)号：US20130088030A1
公开(公告)日：2013-04-11
申请号：US13268139
申请日：2011-10-07
申请人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel
发明人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel
IPC分类号： H01L21/677 , B25J15/02
CPC分类号： H01L21/68707 , H01L21/68764 , H01L21/68771
摘要： A device is disclosed for manipulating a substrate having an inside diameter (ID). The device includes a handle, a trigger that slides within the handle, an alignment shaft and a plurality of substrate supports having distal ends. A plurality of substrate support actuators are connected to the trigger. The trigger can move the plurality of substrate supports between a substrate engaging position and a substrate releasing position through selective engagement of the plurality of substrate supports by the plurality of substrate support actuators. In the substrate engaging position the distal ends of the substrate supports move radially outward to engage the ID of the substrate, enabling the device to hold the substrate without touching the substrate faces. Other embodiments are described and claimed.
摘要翻译：公开了一种用于操纵具有内径（ID）的基板的装置。该装置包括手柄，在手柄内滑动的触发器，对准轴和具有远端的多个基板支撑件。多个基板支撑致动器连接到触发器。触发器可以通过由多个基板支撑致动器选择性地接合多个基板支撑件而在基板接合位置和基板释放位置之间移动多个基板支撑件。在衬底接合位置，衬底支撑件的远端径向向外移动以接合衬底的ID，使得器件能够保持衬底而不接触衬底面。描述和要求保护其他实施例。

6. 发明授权

US09070730B2 Method and apparatus for removing a vertically-oriented substrate from a cassette 有权
标题翻译：从盒中去除垂直取向的基板的方法和装置
公开(公告)号：US09070730B2
公开(公告)日：2015-06-30
申请号：US13268109
申请日：2011-10-07
申请人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel
发明人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel
IPC分类号： H01L21/677 , H01L21/687
CPC分类号： H01L21/68707 , H01L21/67751 , Y10S414/138 , Y10S414/141
摘要： A system and method are disclosed for removing vertically oriented substrates from a cassette. A lifter includes a lifter notch and a stabilizer notch for holding a substrate. The lifter notch engages and lifts the substrate along the substrate ID, while the stabilizer notch captures the substrate OD to prevent lateral movement of the substrate during lifting. In use, the cassette is tilted to bias all substrates to one side and ensure consistent spacing. The lifter moves up into the cassette until the notches are adjacent, but beneath, the ID and OD of a substrate. The lifter is moved laterally to position the notches directly below the ID and OD. Upward movement of the lifter causes the lifter notch to lift the substrate along the ID. The lifter continues upward with the substrate until the substrate clears the top of the cassette. Other embodiments are described and claimed.
摘要翻译：公开了用于从盒中去除垂直取向的基板的系统和方法。提升器包括用于保持基板的升降器切口和稳定器切口。升降器切口沿着基板ID接合和提升基板，而稳定器凹口捕获基板OD，以防止在提升期间基板的横向移动。在使用中，盒子倾斜以将所有基板偏压到一侧，并确保间隔一致。提升器向上移动到盒中，直到凹口相邻，但在底部下方的基底的ID和OD。升降机横向移动，将切口定位在ID和OD的正下方。升降机的向上运动导致升降器切口沿着ID抬起基板。升降器继续向上与基板直到基板清除磁带的顶部。描述和要求保护其他实施例。

7. 发明授权

US08550520B2 Method and apparatus for manipulating a substrate 失效
标题翻译：用于操纵衬底的方法和装置
公开(公告)号：US08550520B2
公开(公告)日：2013-10-08
申请号：US13268139
申请日：2011-10-07
申请人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel
发明人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel
IPC分类号： B66C1/00 , B66C1/54
CPC分类号： H01L21/68707 , H01L21/68764 , H01L21/68771
摘要： A device is disclosed for manipulating a substrate having an inside diameter (ID). The device includes a handle, a trigger that slides within the handle, an alignment shaft and a plurality of substrate supports having distal ends. A plurality of substrate support actuators are connected to the trigger. The trigger can move the plurality of substrate supports between a substrate engaging position and a substrate releasing position through selective engagement of the plurality of substrate supports by the plurality of substrate support actuators. In the substrate engaging position the distal ends of the substrate supports move radially outward to engage the ID of the substrate, enabling the device to hold the substrate without touching the substrate faces. Other embodiments are described and claimed.
摘要翻译：公开了一种用于操纵具有内径（ID）的基板的装置。该装置包括手柄，在手柄内滑动的触发器，对准轴和具有远端的多个基板支撑件。多个基板支撑致动器连接到触发器。触发器可以通过由多个基板支撑致动器选择性地接合多个基板支撑件而在基板接合位置和基板释放位置之间移动多个基板支撑件。在衬底接合位置，衬底支撑件的远端径向向外移动以接合衬底的ID，使得器件能够保持衬底而不接触衬底面。描述和要求保护其他实施例。

8. 发明申请

US20130240759A1 Method and Apparatus for Clamping and Cooling a Substrate for ION Implantation 有权
标题翻译：用于ION植入的衬底夹紧和冷却的方法和装置
公开(公告)号：US20130240759A1
公开(公告)日：2013-09-19
申请号：US13424286
申请日：2012-03-19
申请人： Jeffrey E. Krampert , Richard J. Hertel , John Robert Fairhurst
发明人： Jeffrey E. Krampert , Richard J. Hertel , John Robert Fairhurst
IPC分类号： A61N5/06 , F28F9/00 , H01L21/687 , F25D17/02
CPC分类号： H01J37/20 , C23C14/221 , C23C14/50 , C23C14/541 , H01J37/3171 , H01J2237/2001 , H01L21/67109 , H01L21/68728 , H01L21/68792 , Y10T29/49998
摘要： A system and method are disclosed for holding and cooling substrates during processing. A substrate clamp has an engagement portion for engaging a substrate about the inside diameter as well as a portion of the substrate surface immediately adjacent to the inside diameter. The clamp has a retracted position which enables the engagement portion to fit through the substrate ID, and an expanded position which enables the engagement portion to engage the substrate ID and the substrate surface immediately adjacent to the inside diameter. The clamp can include a conformal coating to enhance engagement between the substrate and the engagement portion. The clamp can also include an energy absorbing coating on one or more surfaces to maximize the absorption of radiative energy emitted from the substrate. Other embodiments are described and claimed.
摘要翻译：公开了用于在加工期间保持和冷却基板的系统和方法。衬底夹具具有用于接合围绕内径的衬底的接合部分以及紧邻内径的衬底表面的一部分。夹具具有缩回位置，其使得接合部分能够穿过基板ID，并且扩展位置使得接合部分能够接合基板ID和紧邻内径的基板表面。夹具可以包括保形涂层，以增强基底和接合部分之间的接合。夹具还可以包括在一个或多个表面上的能量吸收涂层，以最大化从衬底发射的辐射能的吸收。描述和要求保护其他实施例。

9. 发明授权

US09520264B2 Method and apparatus for clamping and cooling a substrate for ion implantation 有权
标题翻译：用于夹持和冷却用于离子注入的衬底的方法和装置
公开(公告)号：US09520264B2
公开(公告)日：2016-12-13
申请号：US13424286
申请日：2012-03-19
申请人： Jeffrey E. Krampert , Richard J. Hertel , John Robert Fairhurst
发明人： Jeffrey E. Krampert , Richard J. Hertel , John Robert Fairhurst
IPC分类号： H01J37/20 , H01J37/317 , H01L21/687 , H01L21/67 , C23C14/22 , C23C14/50 , C23C14/54
CPC分类号： H01J37/20 , C23C14/221 , C23C14/50 , C23C14/541 , H01J37/3171 , H01J2237/2001 , H01L21/67109 , H01L21/68728 , H01L21/68792 , Y10T29/49998
摘要： A system and method are disclosed for holding and cooling substrates during processing. A substrate clamp has an engagement portion for engaging a substrate about the inside diameter as well as a portion of the substrate surface immediately adjacent to the inside diameter. The clamp has a retracted position which enables the engagement portion to fit through the substrate ID, and an expanded position which enables the engagement portion to engage the substrate ID and the substrate surface immediately adjacent to the inside diameter. The clamp can include a conformal coating to enhance engagement between the substrate and the engagement portion. The clamp can also include an energy absorbing coating on one or more surfaces to maximize the absorption of radiative energy emitted from the substrate. Other embodiments are described and claimed.
摘要翻译：公开了用于在加工期间保持和冷却基板的系统和方法。衬底夹具具有用于接合围绕内径的衬底的接合部分以及紧邻内径的衬底表面的一部分。夹具具有缩回位置，其使得接合部分能够穿过基板ID，并且扩展位置使得接合部分能够接合基板ID和紧邻内径的基板表面。夹具可以包括保形涂层，以增强基底和接合部分之间的接合。夹具还可以包括在一个或多个表面上的能量吸收涂层，以最大化从衬底发射的辐射能的吸收。描述和要求保护其他实施例。

10. 发明申请

US20130089395A1 METHOD AND APPARATUS FOR REMOVING A VERTICALLY-ORIENTED SUBSTRATE FROM A CASSETTE 有权
标题翻译：从CASSETTE中去除垂直基板的方法和装置
公开(公告)号：US20130089395A1
公开(公告)日：2013-04-11
申请号：US13268109
申请日：2011-10-07
申请人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel
发明人： John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel
IPC分类号： B65G49/00
CPC分类号： H01L21/68707 , H01L21/67751 , Y10S414/138 , Y10S414/141
摘要： A system and method are disclosed for removing vertically oriented substrates from a cassette. A lifter includes a lifter notch and a stabilizer notch for holding a substrate. The lifter notch engages and lifts the substrate along the substrate ID, while the stabilizer notch captures the substrate OD to prevent lateral movement of the substrate during lifting. In use, the cassette is tilted to bias all substrates to one side and ensure consistent spacing. The lifter moves up into the cassette until the notches are adjacent, but beneath, the ID and OD of a substrate. The lifter is moved laterally to position the notches directly below the ID and OD. Upward movement of the lifter causes the lifter notch to lift the substrate along the ID. The lifter continues upward with the substrate until the substrate clears the top of the cassette. Other embodiments are described and claimed.
摘要翻译：公开了用于从盒中去除垂直取向的基板的系统和方法。提升器包括用于保持基板的升降器切口和稳定器切口。升降器切口沿着基板ID接合和提升基板，而稳定器凹口捕获基板OD，以防止在提升期间基板的横向移动。在使用中，盒子倾斜以将所有基板偏压到一侧，并确保间隔一致。提升器向上移动到盒中，直到凹口相邻，但在底部下方的基底的ID和OD。升降机横向移动，将切口定位在ID和OD的正下方。升降机的向上运动导致升降器切口沿着ID抬起基板。升降器继续向上与基板直到基板清除磁带的顶部。描述和要求保护其他实施例。

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