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    • 4. 发明授权
    • M-I-M' device and fabrication method
    • M-I-M'器件及其制造方法
    • US5152805A
    • 1992-10-06
    • US702254
    • 1991-05-17
    • Norman J. GeddesDaniel J. SandmanJohn R. SamblesWilliam G. Parker
    • Norman J. GeddesDaniel J. SandmanJohn R. SamblesWilliam G. Parker
    • H01L21/312H01L45/00
    • H01L21/312H01L45/00Y10S438/939Y10S438/957Y10S977/861Y10S977/873Y10S977/875Y10S977/881Y10T29/413
    • A method for fabricating a microelectronic device of the metal/insulator/metal' type wherein the insulator is an organic material, and a device fabricated thereby. A first electrically conductive lead is conductively adhered to a first portion of a conductive substrate. A monomolecular layer of highly pure p-dodecyloxyphenylcarbamate of 2-(2'-hydroxyethoxy)-5-bromo-7,7,8,8-tetracyanoquinodimethan is deposited on a surface of a second portion of the conductive substrate not including the first portion to form an organic film. Molecules of the monomolecular layer are generally disposed normal to the substrate surface with their dodecyl terminal moieties adjacent the surface. An essentially oxide-free contiguous layer of magnesium is deposited on the organic film. The deposition if performed at a temperature below about 15.degree. C. A layer of silver is deposited on the magnesium layer to substantially cover and conductively adhere to the magnesium layer. A second electrically conductive lead means is conductively adhered to the silver layer by means of a gallium-indium eutectic alloy. The device exhibits rectifying behavior on application of large voltages. Multilayer devices having an odd number of organic film layers, as well as methods for fabricating such multilayer devices, are also described.
    • 一种用于制造金属/绝缘体/金属类型的微电子器件的方法,其中绝缘体是有机材料,以及由此制造的器件。 第一导电引线导电地粘附到导电基板的第一部分。 将2-(2'-羟基乙氧基)-5-溴-7,7,8,8-四氰基喹诺酮衍生物的高纯度对十二烷氧基苯基氨基甲酸酯的单分子层沉积在不包括第一部分的导电基底的第二部分的表面上 以形成有机膜。 单分子层的分子通常与基底表面垂直地设置,其十二烷基末端部分邻近表面。 基本上无氧化物的连续的镁层沉积在有机膜上。 沉积如果在低于约15℃的温度下进行。在镁层上沉积一层银,以基本上覆盖并导电地附着在镁层上。 第二导电引线装置通过镓铟共晶合金导电地粘附到银层。 该器件在施加大电压时具有整流性能。 还描述了具有奇数个有机膜层的多层器件,以及用于制造这种多层器件的方法。