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1. 发明授权

US08751180B2 Methods and apparatus for pressure compensation in a mass flow controller 有权
标题翻译：质量流量控制器中压力补偿的方法和装置
公开(公告)号：US08751180B2
公开(公告)日：2014-06-10
申请号：US12233405
申请日：2008-09-18
申请人： John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
发明人： John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
IPC分类号： G01F1/50
CPC分类号： G01F1/696 , G01F1/86 , G01F15/024 , G05B13/042 , G05D7/0635 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
摘要翻译：质量流量控制器的性能可能容易受到控制器耦合到的流动路径中的压力瞬变以控制流体流动的目的。提供了一种用于减少或消除由压力环境变化引起的质量流量控制器的性能下降，不稳定性和/或不准确性的系统和方法。特别地，提供了一种用于补偿流动路径和质量流量控制器的压力环境中的压力瞬变的方法和系统。

2. 发明授权

US07073392B2 Methods and apparatus for pressure compensation in a mass flow controller 有权
标题翻译：质量流量控制器中压力补偿的方法和装置
公开(公告)号：US07073392B2
公开(公告)日：2006-07-11
申请号：US10622080
申请日：2003-07-17
申请人： John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
发明人： John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
IPC分类号： G01F1/00
CPC分类号： G01F1/696 , G01F1/86 , G01F15/024 , G05B13/042 , G05D7/0635 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
摘要翻译：质量流量控制器的性能可能容易受到控制器耦合到的流动路径中的压力瞬变以控制流体流动的目的。提供了一种用于减少或消除由压力环境变化引起的质量流量控制器的性能下降，不稳定性和/或不准确性的系统和方法。特别地，提供了一种用于补偿流动路径和质量流量控制器的压力环境中的压力瞬变的方法和系统。

3. 发明授权

US07434477B2 Methods and apparatus for pressure compensation in a mass flow controller 有权
标题翻译：质量流量控制器中压力补偿的方法和装置
公开(公告)号：US07434477B2
公开(公告)日：2008-10-14
申请号：US11843418
申请日：2007-08-22
申请人： John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
发明人： John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
IPC分类号： G01F1/00
CPC分类号： G01F1/696 , G01F1/86 , G01F15/024 , G05B13/042 , G05D7/0635 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
摘要翻译：质量流量控制器的性能可能容易受到控制器耦合到的流动路径中的压力瞬变以控制流体流动的目的。提供了一种用于减少或消除由压力环境变化引起的质量流量控制器的性能下降，不稳定性和/或不准确性的系统和方法。特别地，提供了一种用于补偿流动路径和质量流量控制器的压力环境中的压力瞬变的方法和系统。

4. 发明授权

US07273063B2 Methods and apparatus for pressure compensation in a mass flow controller 有权
标题翻译：质量流量控制器中压力补偿的方法和装置
公开(公告)号：US07273063B2
公开(公告)日：2007-09-25
申请号：US11148053
申请日：2005-06-08
申请人： John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
发明人： John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
IPC分类号： F17D3/01 , G01F1/00
CPC分类号： G01F1/696 , G01F1/86 , G01F15/024 , G05B13/042 , G05D7/0635 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
摘要翻译：质量流量控制器的性能可能容易受到控制器耦合到的流动路径中的压力瞬变以控制流体流动的目的。提供了一种用于减少或消除由压力环境变化引起的质量流量控制器的性能下降，不稳定性和/或不准确性的系统和方法。特别地，提供了一种用于补偿流动路径和质量流量控制器的压力环境中的压力瞬变的方法和系统。

5. 发明授权

US07748268B2 Thermal flow meter 有权
标题翻译：热流量计
公开(公告)号：US07748268B2
公开(公告)日：2010-07-06
申请号：US12193584
申请日：2008-08-18
申请人： John Michael Lull , Gawtam Jhoty
发明人： John Michael Lull , Gawtam Jhoty
IPC分类号： G01F1/68
CPC分类号： G01F1/684 , G01F15/005
摘要： A thermal mass flow controller or mass flow meter having a novel sensor housing that reduces heat conduction from the housing mounting plate or base to the sensor itself. The housing also greatly minimizes the thermal gradient that can result from the uneven application of heat to the housing base. This reduction is accomplished in part by the use of one or more thermal isolation slots to isolate the upper portion of the housing (which holds the sensor) from the lower portion of the housing. Heat transfer to the sensor housing is also minimized by raising the middle portion of the bottom of the housing so that thermal contact is made between the base and the housing only at the two ends of the housing.
摘要翻译：热质量流量控制器或质量流量计具有新的传感器外壳，其减少从壳体安装板或基座到传感器本身的热传导。外壳还极大地最大限度地减少了由于不均匀地将热量施加到壳体基座而导致的热梯度。这种减少部分地通过使用一个或多个隔热槽将壳体的上部（其保持传感器）与壳体的下部隔离来实现。通过提高壳体底部的中间部分也可以将传热传递到传感器外壳，以便仅在壳体的两端处在基座和壳体之间进行热接触。

6. 发明申请

US20100005876A1 THERMAL FLOW METER 有权
标题翻译：热流量计
公开(公告)号：US20100005876A1
公开(公告)日：2010-01-14
申请号：US12193584
申请日：2008-08-18
申请人： John Michael Lull , Gawtam Jhoty
发明人： John Michael Lull , Gawtam Jhoty
IPC分类号： G01F1/68
CPC分类号： G01F1/684 , G01F15/005
摘要： A thermal mass flow controller or mass flow meter having a novel sensor housing that reduces heat conduction from the housing mounting plate or base to the sensor itself. The housing also greatly minimizes the thermal gradient that can result from the uneven application of heat to the housing base. This reduction is accomplished in part by the use of one or more thermal isolation slots to isolate the upper portion of the housing (which holds the sensor) from the lower portion of the housing. Heat transfer to the sensor housing is also minimized by raising the middle portion of the bottom of the housing so that thermal contact is made between the base and the housing only at the two ends of the housing.
摘要翻译：热质量流量控制器或质量流量计具有新的传感器外壳，其减少从壳体安装板或基座到传感器本身的热传导。外壳还极大地最大限度地减少了由于不均匀地将热量施加到壳体基座而导致的热梯度。这种减少部分地通过使用一个或多个隔热槽将壳体的上部（其保持传感器）与壳体的下部隔离来实现。通过提高壳体底部的中间部分也可以将传热传递到传感器外壳，以便仅在壳体的两端处在基座和壳体之间进行热接触。

7. 发明申请

US20110191038A1 MASS FLOW CONTROLLER WITH IMPROVED DYNAMIC RESPONSE 审中-公开
标题翻译：大流量控制器具有改进的动态响应
公开(公告)号：US20110191038A1
公开(公告)日：2011-08-04
申请号：US13034207
申请日：2011-02-24
申请人： John Michael Lull
发明人： John Michael Lull
IPC分类号： G06F19/00 , G01F1/68
CPC分类号： G01F1/6847 , G01F1/6965 , G05D7/0635
摘要： A system and method of characterizing or controlling a flow of a fluid is provided that involves a sensor conduit and a bypass. A plurality of fluids may be utilized in the flow control device based on characteristic information of the device generated during calibration thereof. The characteristic information, in turn is based on a dimensionless parameters, such as adjusted dynamic pressure and adjusted Reynolds number.
摘要翻译：提供了表征或控制流体流动的系统和方法，其涉及传感器导管和旁路。基于在其校准期间产生的装置的特性信息，可以在流量控制装置中使用多个流体。特征信息又是基于无量纲参数，如调节动压和调整雷诺数。

8. 发明申请

US20110153084A1 Method and Apparatus for Blending Process Materials 审中-公开
标题翻译：混合工艺材料的方法和装置
公开(公告)号：US20110153084A1
公开(公告)日：2011-06-23
申请号：US13020714
申请日：2011-02-03
申请人： Jeffrey Alexander Wilmer , Daniel Kase Mackenzie , John Michael Lull , Eric A. Zadai
发明人： Jeffrey Alexander Wilmer , Daniel Kase Mackenzie , John Michael Lull , Eric A. Zadai
IPC分类号： G05D11/00 , G06F17/00
CPC分类号： B01F5/0451 , B01F3/08 , B01F3/0803 , B01F3/0861 , B01F3/088 , B01F5/061 , B01F5/0646 , B01F5/0652 , B01F15/0022 , B01F15/00233 , B01F15/0408 , B01F2005/0621 , B01F2005/0638 , B01F2215/0045 , B01F2215/0096
摘要： A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
摘要翻译：一种混合和提供工艺材料的方法和装置。该方法和装置特别适用于混合超高纯度化学品，研磨浆料与其他用于研磨半导体晶片的化学品的混合以及化学品的高精度混合。该装置可以包括分配子系统，其将处理材料提供给混合子系统，在混合子系统中它们与静态混合器混合。该方法可以包括向处理材料提供分配子系统，并将处理材料混合在静态混合器中。

9. 发明授权

US07905139B2 Mass flow controller with improved dynamic 有权
标题翻译：质量流量控制器具有改进的动态性能
公开(公告)号：US07905139B2
公开(公告)日：2011-03-15
申请号：US12197888
申请日：2008-08-25
申请人： John Michael Lull
发明人： John Michael Lull
IPC分类号： G01F1/68
CPC分类号： G01F1/6847 , G01F1/6965 , G05D7/0635
摘要： A system and method of compensating for pressure variations in a flow controller entails the use of the compressibility of the gas being controlled to provide a more accurate measurement of the flow.
摘要翻译：补偿流量控制器中的压力变化的系统和方法需要使用被控制的气体的压缩性来提供更准确的流量测量。

10. 发明授权

US07082824B2 Variable resistance sensor with common reference leg 有权
标题翻译：可变电阻传感器，带公共参考支脚
公开(公告)号：US07082824B2
公开(公告)日：2006-08-01
申请号：US10978156
申请日：2004-10-29
申请人： John Michael Lull
发明人： John Michael Lull
IPC分类号： G01F1/68
CPC分类号： G01F1/696 , G01F1/6847 , G01F1/698 , G01F1/86
摘要： A resistive bridge sensor circuit that includes a first resistive bridge circuit having a first variable resistance resistor and a second resistive bridge circuit having a second variable resistance resistor. The first and second resistive bridge circuits share at least a portion of a common reference leg that sets a resistance of a first and second variable resistors. The common reference leg or a portion of the common reference leg is alternately switchably connected to one of the first and second resistive bridge circuits.
摘要翻译：一种电阻桥式传感器电路，包括具有第一可变电阻电阻器的第一电阻电桥电路和具有第二可变电阻电阻器的第二电阻电桥电路。第一和第二电阻桥电路共享设置第一和第二可变电阻器的电阻的公共参考支路的至少一部分。公共参考腿或公共参考腿的一部分交替地切换地连接到第一和第二电阻桥电路中的一个。

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