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    • 1. 发明授权
    • Method for forming high resistance resistors for limiting cathode
current in field emission displays
    • 用于形成用于限制场致发射显示器中的阴极电流的高电阻电阻的方法
    • US5585301A
    • 1996-12-17
    • US502388
    • 1995-07-14
    • John K. LeeDavid A. Cathey, Jr.Kevin Tjaden
    • John K. LeeDavid A. Cathey, Jr.Kevin Tjaden
    • H01J1/304H01J9/02H01J29/04H01J31/12H01L21/02H01L21/822H01L27/04H01L21/70
    • H01L28/24H01J9/025H01L28/20H01J2201/319
    • A method for forming resistors for regulating current in a field emission display comprises integrating a high resistance resistor into circuitry for the field emission display. The resistor is in electrical communication with emitter sites for the field emission display and with other circuit components such as ground. The high resistance resistor can be formed as a layer of a high resistivity material, such as intrinsic polycrystalline silicon, polycrystalline silicon doped with a conductivity-degrading dopant, lightly doped polysilicon, titanium oxynitride, tantalum oxynitride or a glass type material deposited on a baseplate of the field emission display. Contacts are formed in the high resistivity material to establish electrical communication between the resistor and the emitter sites and between the resistor and the other circuit components. The contacts can be formed as low resistance contacts (e.g., ohmic contacts) or as high resistance contacts (e.g., Schottky contacts).
    • 用于形成用于调节场致发射显示器中的电流的电阻器的方法包括将高电阻电阻集成到用于场发射显示的电路中。 电阻器与发射器位置电气连通,用于场发射显示器和其他电路部件,例如接地。 高电阻电阻器可以形成为高电阻率材料的层,例如本征多晶硅,掺杂有导电性降解掺杂剂的多晶硅,轻掺杂多晶硅,氮氧化钛,氮氧化钽或沉积在基板上的玻璃类型材料 的场发射显示。 在高电阻率材料中形成触点,以在电阻器和发射极部位之间以及电阻器和其它电路部件之间建立电连通。 触点可以形成为低电阻触点(例如欧姆接触)或作为高电阻触点(例如肖特基触点)。
    • 4. 发明授权
    • High resistance resistors for limiting cathode current in field emmision
displays
    • 用于限制场致发射显示器中阴极电流的高电阻电阻
    • US5712534A
    • 1998-01-27
    • US688098
    • 1996-07-29
    • John Kichul LeeDavid A. Cathey, Jr.Kevin Tjaden
    • John Kichul LeeDavid A. Cathey, Jr.Kevin Tjaden
    • H01J1/304H01J9/02H01J29/04H01J31/12H01L21/02H01L21/822H01L27/04H01J1/30
    • H01L28/24H01J9/025H01L28/20H01J2201/319
    • A high resistance resistor for regulating current in a field emission display is integrated into circuitry of the field emission display. The resistor is in electrical communication with emitter sites for the field emission display and with other circuit components such as ground. The high resistance resistor can be formed as a layer of a high resistivity material, such as intrinsic polycrystalline silicon, polycrystalline silicon doped with a conductivity-degrading dopant, lightly doped polysilicon, titanium oxynitride, tantalum oxynitride or a glass type material deposited on a baseplate of the field emission display. Contacts are formed in the high resistivity material to establish electrical communication between the resistor and the emitter sites and between the resistor and the other circuit components. The contacts can be formed as low resistance contacts (e.g., ohmic contacts) or as high resistance contacts (e.g., Schottky contacts).
    • 用于调节场发射显示器中的电流的高电阻电阻器被集成到场致发射显示器的电路中。 电阻器与发射器位置电气连通,用于场发射显示器和其他电路部件,例如接地。 高电阻电阻器可以形成为高电阻率材料的层,例如本征多晶硅,掺杂有导电性降解掺杂剂的多晶硅,轻掺杂多晶硅,氮氧化钛,氮氧化钽或沉积在基板上的玻璃类型材料 的场发射显示。 在高电阻率材料中形成触点,以在电阻器和发射极部位之间以及电阻器和其它电路部件之间建立电连通。 触点可以形成为低电阻触点(例如欧姆接触)或作为高电阻触点(例如肖特基触点)。