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    • 2. 发明授权
    • Nanomanufacturing devices and methods
    • 纳米制造装置和方法
    • US08261368B2
    • 2012-09-04
    • US12465621
    • 2009-05-13
    • John Edward BussanMichael R. NelsonJoseph S. FragalaAlbert K. HenningJeffrey R. Rendlen
    • John Edward BussanMichael R. NelsonJoseph S. FragalaAlbert K. HenningJeffrey R. Rendlen
    • H01J37/00G01N13/16C23F1/18C23F17/00
    • G03F7/0002G01Q20/04G01Q40/00G01Q70/10G01Q70/16G01Q80/00
    • Devices for performing nanofabrication are provided which provide small volume reaction space and high reaction versatility. A device may include a reaction chamber adapted for nanoscale modification of a substrate and vacuum conditions; a scanning probe tip assembly enclosed within the reaction chamber; a first port coupled to the reaction chamber for delivering a gas; a second port coupled to the reaction chamber for applying a vacuum; and a substrate assembly insertedly mounted to the reaction chamber. The reaction chamber may include a body having one or more flexible walls and one or more supports to prevent the reaction chamber from collapsing under a vacuum. The device may further include an electrical conduit for coupling the tips of the scanning probe tip assembly to electrical components outside the reaction chamber. Also provided are apparatuses incorporating the devices and methods of using the devices and apparatuses.
    • 提供用于进行纳米制造的装置,其提供小体积的反应空间和高反应多功能性。 装置可以包括适于对基底进行纳米尺寸改性的反应室和真空条件; 包围在反应室内的扫描探针头组件; 耦合到所述反应室的用于输送气体的第一端口; 耦合到所述反应室的第二端口,用于施加真空; 以及插入安装到反应室的基板组件。 反应室可以包括具有一个或多个柔性壁和一个或多个支撑物的主体,以防止反应室在真空下塌缩。 该装置还可以包括用于将扫描探针头组件的尖端耦合到反应室外部的电气部件的电导管。 还提供了结合装置的装置和使用装置和装置的方法。