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1. 发明授权

US08261662B1 Active pen nanolithography 失效
标题翻译：活性笔纳米光刻
公开(公告)号：US08261662B1
公开(公告)日：2012-09-11
申请号：US11268740
申请日：2005-11-08
申请人： Raymond Roger Shile , Terrisa Duenas , John Edward Bussan , Gregory J. Athas , Joseph S. Fragala , Jason R. Haaheim , Sylvain Cruchon-Dupeyrat , Jeffrey R. Rendlen
发明人： Raymond Roger Shile , Terrisa Duenas , John Edward Bussan , Gregory J. Athas , Joseph S. Fragala , Jason R. Haaheim , Sylvain Cruchon-Dupeyrat , Jeffrey R. Rendlen
IPC分类号： H01L21/02
CPC分类号： G02B21/0008 , G02B21/002
摘要： Improved actuated probes suitable for scanning probe lithography or microscopy, and especially direct-write nanolithography and method of fabrication thereof. In one embodiment, thermomechanically actuated cantilevers with oxide-sharpened microcast tips are inexpensively fabricated by a process that comprises low-temperature wafer bonding, such as (gold) thermocompressive bonding, eutectic or adhesive bonding. Also provided is a flexcircuit that electrically interconnects the actuated probes to external circuitry and mechanically couples them to the instrument actuator. An improved scanning probe lithography instrument, hardware and software, can be built around the actuated cantilevers and the flexcircuit. Finally, provided is an improved microfluidic circuit to deliver chemical compounds to the tips of (actuated) probes and a fabrication method for tall, high-aspect-ratio tips.
摘要翻译：改进的适用于扫描探针光刻或显微镜的致动探针，特别是直写式纳米光刻及其制造方法。在一个实施例中，通过包括低温晶片接合（例如（金））热压接合，共晶或粘合粘合的方法廉价地制造具有氧化物锐化的微型天线的热机械致动悬臂。还提供了将致动的探针电连接到外部电路并将它们机械耦合到仪器致动器的挠性电路。可以围绕致动的悬臂和柔性电路构建改进的扫描探针光刻仪器，硬件和软件。最后，提供了一种改进的微流体电路，用于将化学化合物递送到（致动的）探针的尖端，以及用于高，高纵横比尖端的制造方法。

2. 发明申请

US20120031192A1 Semiconductor strain gauge array 有权
标题翻译：半导体应变计阵列
公开(公告)号：US20120031192A1
公开(公告)日：2012-02-09
申请号：US13136572
申请日：2011-08-04
申请人： Terrisa Duenas , Shiv Joshi , Cesar Del Solar
发明人： Terrisa Duenas , Shiv Joshi , Cesar Del Solar
IPC分类号： G01B7/16 , H01L21/02
CPC分类号： G01B7/18 , G01L1/2293 , H01L29/84
摘要： A strain monitoring system including an array of semiconductor strain gauges. Each strain gauge in the array of strain gauges includes a lithographically fabricated 4-resistor bridge for providing a voltage potential corresponding to the strain in the bridge and thin film transistors to provide addressability to each 4-resistor bridge in the array. After completion of the array of strain gauges, in preferred embodiments the array of strain gauges are transferred to polyimide film which is in turn bonded to a surface region of the component to be tested for strains. Each bridge provides voltage signals corresponding to the strain to which the material under the bridge is being subjected. In preferred embodiments control and data acquisition function are separated from the semiconductor strain gage array. Preferred embodiments the system are utilized to monitor strains on components of aircraft, especially light weight robotic aircraft.
摘要翻译：一种应变监测系统，包括半导体应变计阵列。应变片阵列中的每个应变计包括光刻制造的4电阻桥，用于提供对应于桥和薄膜晶体管中的应变的电压电位，以向阵列中的每个4-电阻器桥提供寻址能力。在应变计阵列完成之后，在优选实施例中，将应变计的阵列转移到聚酰亚胺膜，该聚酰亚胺膜又结合到要测试的部件的表面区域上。每个桥梁提供对应于桥梁下的材料所经受的应变的电压信号。在优选实施例中，控制和数据获取功能与半导体应变计阵列分离。优选的实施例是该系统用于监测飞行器部件上的应变，特别是轻型机器人飞机。

3. 发明授权

US08707796B2 Semiconductor strain gauge array 有权
标题翻译：半导体应变计阵列
公开(公告)号：US08707796B2
公开(公告)日：2014-04-29
申请号：US13136572
申请日：2011-08-04
申请人： Terrisa Duenas , Shiv Joshi , Cesar Del Solar
发明人： Terrisa Duenas , Shiv Joshi , Cesar Del Solar
IPC分类号： G01L1/00 , G01B7/16 , G01L1/22 , H01L21/00
CPC分类号： G01B7/18 , G01L1/2293 , H01L29/84
摘要： A strain monitoring system including an array of semiconductor strain gauges. Each strain gauge in the array of strain gauges includes a lithographically fabricated 4-resistor bridge for providing a voltage potential corresponding to the strain in the bridge and thin film transistors to provide addressability to each 4-resistor bridge in the array. After completion of the array of strain gauges, in preferred embodiments the array of strain gauges are transferred to polyimide film which is in turn bonded to a surface region of the component to be tested for strains. Each bridge provides voltage signals corresponding to the strain to which the material under the bridge is being subjected. In preferred embodiments control and data acquisition function are separated from the semiconductor strain gage array. Preferred embodiments the system are utilized to monitor strains on components of aircraft, especially light weight robotic aircraft.
摘要翻译：一种应变监测系统，包括半导体应变计阵列。应变片阵列中的每个应变计包括光刻制造的4电阻桥，用于提供对应于桥和薄膜晶体管中的应变的电压电位，以向阵列中的每个4-电阻器桥提供寻址能力。在应变计阵列完成之后，在优选实施例中，将应变计的阵列转移到聚酰亚胺膜，该聚酰亚胺膜又结合到要测试的部件的表面区域上。每个桥梁提供对应于桥梁下的材料所经受的应变的电压信号。在优选实施例中，控制和数据获取功能与半导体应变计阵列分离。优选的实施例是该系统用于监测飞行器部件上的应变，特别是轻型机器人飞机。

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