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    • 1. 发明申请
    • DEEP TRENCH CAPACITOR FOR SOI CMOS DEVICES FOR SOFT ERROR IMMUNITY
    • 用于软错误免疫的SOI CMOS器件的深度TRENCH电容器
    • US20110177660A1
    • 2011-07-21
    • US13075271
    • 2011-03-30
    • John E. Barth, JR.Kerry BernsteinEthan H. CannonFrancis R. White
    • John E. Barth, JR.Kerry BernsteinEthan H. CannonFrancis R. White
    • H01L21/8242
    • H01L27/1203H01L21/84H01L27/0629H01L27/10861H01L29/66181
    • A semiconductor structure is disclosed. The semiconductor structure includes an active semiconductor layer, a semiconductor device having a gate disposed on top of the active semiconductor layer, and source and drain regions and a body/channel region disposed within the active semiconductor layer, an insulator layer having a first and second side, the first side being adjacent to the active semiconductor layer, a substrate disposed adjacent to the second side of the insulator layer, a deep trench capacitor disposed under the body/channel region of the semiconductor device. The deep trench capacitor electrically connects with and contacts the body/channel region of the semiconductor device, and is located adjacent to the gate of the semiconductor device. The semiconductor structure increases a critical charge Qcrit, thereby reducing a soft error rate (SER) of the semiconductor device.
    • 公开了半导体结构。 半导体结构包括有源半导体层,具有设置在有源半导体层顶部的栅极的半导体器件以及设置在有源半导体层内的源极和漏极区域以及主体/沟道区域,具有第一和第二 所述第一侧与所述有源半导体层相邻,与所述绝缘体层的所述第二侧相邻配置的衬底,设置在所述半导体器件的所述主体/沟道区域下方的深沟槽电容器。 深沟槽电容器与半导体器件的主体/沟道区电连接并接触半导体器件的主体/沟道区,并且位于半导体器件的栅极附近。 半导体结构增加了临界电荷Qcrit,从而降低了半导体器件的软错误率(SER)。
    • 2. 发明申请
    • SOFT ERROR PROTECTION STRUCTURE EMPLOYING A DEEP TRENCH
    • 使用深度感应器的软错误保护结构
    • US20090224304A1
    • 2009-09-10
    • US12045190
    • 2008-03-10
    • Ethan H. CannonJohn E. Barth, JR.Kerry Bernstein
    • Ethan H. CannonJohn E. Barth, JR.Kerry Bernstein
    • H01L27/105H01L21/8232
    • H01L29/66181G11C5/005H01L21/765H01L27/0629H01L27/11H01L29/945
    • A deep trench containing a doped semiconductor fill portion having a first conductivity type doping and surrounded by a buried plate layer having a second conductivity type doping at a lower portion is formed in a semiconductor layer having a doping of the first conductivity type. A doped well of the second conductivity type abutting the buried plate layer is formed. The doped semiconductor fill portion functions as a temporary reservoir for electrical charges of the first conductivity type that are generated by a radiation particle, and the buried plate layer functions as a temporary reservoir for electrical charges of the second conductivity type. The buried plate layer and the doped semiconductor fill portion forms a capacitor, and provides protection from soft errors to devices formed in the semiconductor layer or the doped well.
    • 在具有第一导电类型的掺杂的半导体层中形成包含掺杂半导体填充部分的深沟槽,该掺杂半导体填充部分具有第一导电类型掺杂并被由下部具有第二导电类型掺杂的掩埋板包围。 形成与掩埋板层相邻的第二导电类型的掺杂阱。 掺杂半导体填充部分用作由辐射颗粒产生的第一导电类型的电荷的临时储存器,并且掩埋板层用作第二导电类型的电荷的临时储存器。 掩埋板层和掺杂半导体填充部分形成电容器,并且提供对软错误的保护以防止在半导体层或掺杂阱中形成的器件。
    • 3. 发明申请
    • SOI BODY CONTACT USING E-DRAM TECHNOLOGY
    • SOI身体接触使用电子DRAM技术
    • US20110177659A1
    • 2011-07-21
    • US13075552
    • 2011-03-30
    • John E. Barth, JR.Kerry BernsteinFrancis R. White
    • John E. Barth, JR.Kerry BernsteinFrancis R. White
    • H01L21/336
    • H01L29/78615
    • A semiconductor structure is disclosed. The semiconductor structure includes an active semiconductor layer, a semiconductor device having a gate disposed on top of the active semiconductor layer, and source and drain regions and a body/channel region disposed within the active semiconductor layer, an insulator layer having a first and second side, the first side being adjacent to the active semiconductor layer, a substrate disposed adjacent to the second side of the insulator layer, a body contact disposed under the body/channel region and in the insulator layer. The body contact electrically connects with and contacts with the body/channel region of the semiconductor device and the substrate, to thereby form an ohmic contact and to eliminate floating body effects.
    • 公开了半导体结构。 半导体结构包括有源半导体层,具有设置在有源半导体层顶部的栅极的半导体器件以及设置在有源半导体层内的源极和漏极区域以及主体/沟道区域,具有第一和第二 所述第一侧与所述有源半导体层相邻,与所述绝缘体层的第二侧相邻配置的基板,设置在所述主体/沟道区域的下方以及所述绝缘体层的主体接触部。 体接触与半导体器件和衬底的主体/沟道区域电连接并与其接触,从而形成欧姆接触并消除浮体效应。
    • 4. 发明申请
    • SOI BODY CONTACT USING E-DRAM TECHNOLOGY
    • SOI身体接触使用电子DRAM技术
    • US20100052053A1
    • 2010-03-04
    • US12200482
    • 2008-08-28
    • John E. Barth, JR.Kerry BernsteinFrancis R. White
    • John E. Barth, JR.Kerry BernsteinFrancis R. White
    • H01L29/786H01L21/336
    • H01L29/78615
    • A semiconductor structure is disclosed. The semiconductor structure includes an active semiconductor layer, a semiconductor device having a gate disposed on top of the active semiconductor layer, and source and drain regions and a body/channel region disposed within the active semiconductor layer, an insulator layer having a first and second side, the first side being adjacent to the active semiconductor layer, a substrate disposed adjacent to the second side of the insulator layer, a body contact disposed under the body/channel region and in the insulator layer. The body contact electrically connects with and contacts with the body/channel region of the semiconductor device and the substrate, to thereby form an ohmic contact and to eliminate floating body effects.
    • 公开了半导体结构。 半导体结构包括有源半导体层,具有设置在有源半导体层顶部的栅极的半导体器件以及设置在有源半导体层内的源极和漏极区域以及主体/沟道区域,具有第一和第二 所述第一侧与所述有源半导体层相邻,与所述绝缘体层的第二侧相邻配置的基板,设置在所述主体/沟道区域的下方以及所述绝缘体层的主体接触部。 体接触与半导体器件和衬底的主体/沟道区域电连接并与其接触,从而形成欧姆接触并消除浮体效应。
    • 9. 发明申请
    • VDD PRE-SET OF DIRECT SENSE DRAM
    • 直流感测DRAM的VDD预置
    • US20110267916A1
    • 2011-11-03
    • US12770976
    • 2010-04-30
    • John E. Barth, JR.
    • John E. Barth, JR.
    • G11C5/14
    • G11C11/4091
    • A direct sense memory array architecture and method of operation includes a plurality of memory cells where a bit-line restore voltage level is optimized to reduce memory cell leakage during a first inactive period, and a bit-line preset voltage level is optimized for signal sensing during a second active period. The architecture includes a sense head having of a pair of cross coupled gated inverters. Each of the gated inverters is responsive to a first and second gate control signal which can independently gate a power supply to the inverter circuit within each gated inverter. During the second active period, a first gated inverter senses the data state on the first bit-line, and a second gated inverter performs a preset and write-back function on the first bit-line.
    • 直接读出存储器阵列结构和操作方法包括多个存储器单元,其中位线恢复电压电平被优化以在第一非活动时段期间减少存储器单元泄漏,并且位线预设电压电平被优化用于信号感测 在第二个活跃期间。 该架构包括具有一对交叉耦合门控反相器的感测头。 每个门控逆变器响应于第一和第二门控制信号,该第一和第二门控制信号可以独立地对每个门控逆变器内的逆变器电路的电源供电。 在第二活动期间,第一选通逆变器检测第一位线上的数据状态,第二门控反相器在第一位线上执行预置和回写功能。