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    • 2. 发明申请
    • METHOD OF MANUFACTURING INKJET PRINT HEAD
    • 制造喷墨打印头的方法
    • US20080148567A1
    • 2008-06-26
    • US11875106
    • 2007-10-19
    • Byung Ha ParkSung Joon ParkYoung Ung HaKyong II Kim
    • Byung Ha ParkSung Joon ParkYoung Ung HaKyong II Kim
    • B21D53/76
    • B41J2/1603B41J2/1629B41J2/1631B41J2/1632B41J2/1639B41J2/1642Y10T29/49124Y10T29/49126Y10T29/49128Y10T29/4913Y10T29/49146Y10T29/49401
    • A method of manufacturing an inkjet print head that includes an improved process of forming an ink feed hole, thereby enabling an increase in productivity and a favorable ink supply via the ink feed hole. The method includes preparing a substrate on which a heater to heat an ink is formed on the front side thereof, forming a flow passage formation layer on the front side of the substrate such that the flow passage formation layer defines an ink flow passage, forming a nozzle layer provided with a nozzle on the flow passage formation layer, forming a first protective layer such that the first protective layer covers the flow passage formation layer and the nozzle layer, applying a mask material used to etch the substrate to the rear side of the substrate, applying a second protective layer to the lateral side of the substrate to protect the lateral side of the substrate, and forming an ink feed hole on the substrate by wet etching. Tantalum (Ta) is used as the mask material. Parylene is used as the second protective layer.
    • 一种制造喷墨打印头的方法,其包括形成供墨孔的改进方法,从而能够提高生产率并且通过供墨孔提供良好的供墨。 该方法包括:准备在其前侧形成有加热油墨的加热器的基板,在基板的前侧形成流路形成层,使得流路形成层限定油墨流路,形成 喷嘴层,其在流路形成层上设置有喷嘴,形成第一保护层,使得第一保护层覆盖流路形成层和喷嘴层,将用于蚀刻基板的掩模材料施加到 衬底,将第二保护层施加到衬底的侧面以保护衬底的侧面,以及通过湿蚀刻在衬底上形成供墨孔。 使用钽(Ta)作为掩模材料。 聚对二甲苯用作第二保护层。
    • 7. 发明申请
    • INKJET PRINT HEAD AND MANUFACTURING METHOD THEREOF
    • INKJET打印头及其制造方法
    • US20090021561A1
    • 2009-01-22
    • US12120352
    • 2008-05-14
    • Myong Jong KwonTae Jin KimEun Bong HanSung Joon Park
    • Myong Jong KwonTae Jin KimEun Bong HanSung Joon Park
    • B41J2/05G11B5/127
    • B41J2/14129B41J2/1603B41J2/1626B41J2/1631B41J2/1632B41J2/1635B41J2/1639B41J2/1642B41J2/1643B41J2/1645B41J2/1646
    • An inkjet print head and manufacturing method includes a substrate, an insulating layer formed on a surface of the substrate to have an electrode formation space, an electrode formed in the electrode formation space to be positioned on the same plane with the insulating layer, a heater formed on upper surfaces of the insulating layer and the electrode, and a passivation layer formed on the insulating layer and the heater. The heater is formed to be flat on the insulating layer and the electrodes, thereby reducing the thickness of the passivation layer. Further, copper having relatively high electric conductivity is used as a material of the electrodes, which apply current to the heater to generate heat, instead of aluminum, thereby increasing a degree of freedom in the thickness of the electrodes. Further, uniform current can be applied to the respective heaters at different positions in single firing and full firing of ink, thereby reducing entire input energy and also improving ink ejection stability and reliability of the inkjet print head.
    • 喷墨打印头和制造方法包括:基板,形成在基板的表面上以具有电极形成空间的绝缘层,形成在电极形成空间中以与绝缘层位于同一平面上的电极;加热器 形成在绝缘层和电极的上表面上,以及形成在绝缘层和加热器上的钝化层。 加热器在绝缘层和电极上形成为平坦的,从而减小钝化层的厚度。 此外,使用具有较高导电性的铜作为电极的材料,其将电流施加到加热器以产生热量而不是铝,从而增加电极的厚度的自由度。 此外,可以在单次点火和完全点燃油墨的不同位置对各个加热器施加均匀的电流,从而降低整个输入能量,并且还改善喷墨打印头的喷墨稳定性和可靠性。
    • 10. 发明授权
    • Method of manufacturing inkjet print head
    • 制造喷墨打印头的方法
    • US07895750B2
    • 2011-03-01
    • US11875106
    • 2007-10-19
    • Byung Ha ParkSung Joon ParkYoung Ung HaKyong Il Kim
    • Byung Ha ParkSung Joon ParkYoung Ung HaKyong Il Kim
    • B23P17/00G01D15/00B41J2/045
    • B41J2/1603B41J2/1629B41J2/1631B41J2/1632B41J2/1639B41J2/1642Y10T29/49124Y10T29/49126Y10T29/49128Y10T29/4913Y10T29/49146Y10T29/49401
    • A method of manufacturing an inkjet print head that includes an improved process of forming an ink feed hole, thereby enabling an increase in productivity and a favorable ink supply via the ink feed hole. The method includes preparing a substrate on which a heater to heat an ink is formed on the front side thereof, forming a flow passage formation layer on the front side of the substrate such that the flow passage formation layer defines an ink flow passage, forming a nozzle layer provided with a nozzle on the flow passage formation layer, forming a first protective layer such that the first protective layer covers the flow passage formation layer and the nozzle layer, applying a mask material used to etch the substrate to the rear side of the substrate, applying a second protective layer to the lateral side of the substrate to protect the lateral side of the substrate, and forming an ink feed hole on the substrate by wet etching. Tantalum (Ta) is used as the mask material. Parylene is used as the second protective layer.
    • 一种制造喷墨打印头的方法,其包括形成供墨孔的改进方法,从而能够提高生产率并且通过供墨孔提供良好的供墨。 该方法包括:准备在其前侧形成有加热油墨的加热器的基板,在基板的前侧形成流路形成层,使得流路形成层限定油墨流路,形成 喷嘴层,其在流路形成层上设置有喷嘴,形成第一保护层,使得第一保护层覆盖流路形成层和喷嘴层,将用于蚀刻基板的掩模材料施加到第二保护层的背面 衬底,将第二保护层施加到衬底的侧面以保护衬底的侧面,以及通过湿蚀刻在衬底上形成供墨孔。 使用钽(Ta)作为掩模材料。 聚对二甲苯用作第二保护层。