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    • 4. 发明申请
    • ATOMIC FORCE MICROSCOPE CANTILEVER AND METHOD FOR MANUFACTURING THE SAME
    • 原子力显微镜及其制造方法
    • US20080011066A1
    • 2008-01-17
    • US11614492
    • 2006-12-21
    • Moon Suhk SuhJin-Koog ShinChurl Seung LeeKyoung Il Lee
    • Moon Suhk SuhJin-Koog ShinChurl Seung LeeKyoung Il Lee
    • G01B5/28
    • G01Q60/38G01Q70/12
    • The present invention relates to various types of atomic force microscope (AFM) cantilevers formed by using a photolithography process and an etching process and a method for manufacturing the same, the AFM cantilever includes a handling unit made of a semiconductor substrate, a cantilever unit extendedly formed on a bottom surface of the handling unit in a shape of a rod, a probe unit formed in a shape of a vertically protruded peak by being extendedly formed on one side surface of the cantilever unit and a probe being in contact with a surface of an object to be analyzed by being formed on the peak of the probe unit. Therefore, the present invention has an advantage that the probe of several hundred nanometers can easily formed through a general photolithography process as well as it can easily obtain a natural resonance frequency of the designed cantilever by easily setting a thickness of the cantilever member.
    • 本发明涉及通过使用光刻工艺和蚀刻工艺形成的各种原子力显微镜(AFM)悬臂及其制造方法,该AFM悬臂包括由半导体衬底制成的处理单元,延伸的悬臂单元 在所述处理单元的底面上形成为杆的形状,通过在所述悬臂单元的一个侧面上延伸地形成为垂直突出的形状的探针单元和与所述悬臂单元的表面接触的探针 通过形成在探针单元的峰上来分析的物体。 因此,本发明的优点在于,通过通常的光刻工艺容易地形成数百纳米的探针,并且通过容易地设定悬臂构件的厚度,可以容易地获得设计的悬臂的固有共振频率。