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    • 3. 发明申请
    • METAL CAPACITOR DESIGN FOR IMPROVED RELIABILITY AND GOOD ELECTRICAL CONNECTION
    • 金属电容器设计,改善可靠性和良好的电气连接
    • US20130105944A1
    • 2013-05-02
    • US13716693
    • 2012-12-17
    • Jianhong ZHUJames F. Buller
    • Jianhong ZHUJames F. Buller
    • H01L49/02
    • H01L28/40H01L23/5223H01L2924/0002H01L2924/00
    • A metal capacitor is formed with good conductivity for both nodes of the capacitor and improved reliability. An embodiment includes a first layer of alternating first and second metal lines, a second layer of alternating third and fourth metal lines, a dielectric layer between the first and second layers, and vias in the dielectric layer connecting the first and second metal lines with the third and fourth metal lines, respectively, wherein each metal line comprises alternating first segments having a first width and second segments having a second width, the first width being greater than the second width, each first segment lying adjacent to a second segment of an adjacent metal line, and only first segments of the metal lines overlapping the vias. The design enables the spacing between metal lines to be maintained, the spacing between via to metal to be increased, and via connection to be maintained for both nets, thereby improving the conductivity and reliability of the capacitor and maintaining capacitance density.
    • 形成对电容器的两个节点具有良好导电性的金属电容器,并提高可靠性。 一个实施例包括交替的第一和第二金属线的第一层,交替的第三和第四金属线的第二层,第一和第二层之间的介电层,以及介电层中的通孔,将第一和第二金属线与 第三和第四金属线,其中每个金属线包括具有第一宽度的交替的第一段和具有第二宽度的第二段,第一宽度大于第二宽度,每个第一段邻近相邻的第二段的第二段 金属线,并且仅金属线的第一段与通孔重叠。 该设计使得能够保持金属线之间的间距,通孔与金属之间的间隔增加,并且通过两个网络的连接来保持,从而提高电容器的导电性和可靠性并保持电容密度。