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    • 1. 发明申请
    • System for the optical detection of a distant object
    • 远程物体的光学检测系统
    • US20050224702A1
    • 2005-10-13
    • US10979167
    • 2004-11-03
    • Jess KoehlerWolfgang Holota
    • Jess KoehlerWolfgang Holota
    • G01S7/481G01S17/42G01S17/93G02B26/12H01J40/14
    • G02B26/12G01S7/481G01S7/4817G01S17/42G01S17/933
    • A system is described for the optical detection of a distant object, having a light beam generating device for generating a parallel light beam, a scanning unit for generating a scan pattern by deflecting the parallel light beam over a defined angular range, and a detector unit for detecting light reflected by the distant object. The scanning unit includes a rotating polygonal mirror with several reflecting partial mirror surfaces. The light beam generating device is provided for generating a parallel light beam in two different beam positions which, in response to a rotating position indicating signal indicating the rotating position of the polygonal mirror, can be switched over from a partial mirror surface to an adjacent partial mirror surface. Accordingly, a system is provided for the optical direction of a distant object, which system has a high capacity. In particular, the system permits the optical detection of distant objects, such as poorly recognizable obstacles, in the air space in the flight direction in front of an aircraft.
    • 描述了一种具有用于产生平行光束的光束产生装置的远距离物体的光学检测系统,用于通过使平行光束偏转限定的角度范围来产生扫描图案的扫描单元和检测器单元 用于检测由远处物体反射的光。 扫描单元包括具有多个反射部分镜面的旋转多面镜。 光束产生装置被设置用于在两个不同的光束位置中产生平行光束,其响应于指示多角镜的旋转位置的旋转位置指示信号,可以从部分镜面切换到相邻部分 镜面。 因此,为远方物体的光学方向提供一种系统,该系统具有高容量。 特别地,该系统允许在飞机前面的飞行方向上的空气空间中对遥远物体(例如识别不良的障碍物)进行光学检测。
    • 2. 发明授权
    • System for the optical detection of a distant object using a rotating mirror
    • 使用旋转镜对远方物体进行光学检测的系统
    • US07202467B2
    • 2007-04-10
    • US10979167
    • 2004-11-03
    • Jess KoehlerWolfgang Holota
    • Jess KoehlerWolfgang Holota
    • G01B11/00
    • G02B26/12G01S7/481G01S7/4817G01S17/42G01S17/933
    • A system is described for the optical detection of a distant object, having a light beam generating device for generating a parallel light beam, a scanning unit for generating a scan pattern by deflecting the parallel light beam over a defined angular range, and a detector unit for detecting light reflected by the distant object. The scanning unit includes a rotating polygonal mirror with several reflecting partial mirror surfaces. The light beam generating device is provided for generating a parallel light beam in two different beam positions which, in response to a rotating position indicating signal indicating the rotating position of the polygonal mirror, can be switched over from a partial mirror surface to an adjacent partial mirror surface. Accordingly, a system is provided for the optical direction of a distant object, which system has a high capacity. In particular, the system permits the optical detection of distant objects, such as poorly recognizable obstacles, in the air space in the flight direction in front of an aircraft.
    • 描述了一种具有用于产生平行光束的光束产生装置的远距离物体的光学检测系统,用于通过使平行光束偏转限定的角度范围来产生扫描图案的扫描单元和检测器单元 用于检测由远处物体反射的光。 扫描单元包括具有多个反射部分镜面的旋转多面镜。 光束产生装置被设置用于在两个不同的光束位置中产生平行光束,其响应于指示多角镜的旋转位置的旋转位置指示信号,可以从部分镜面切换到相邻部分 镜面。 因此,为远方物体的光学方向提供一种系统,该系统具有高容量。 特别地,该系统允许在飞机前面的飞行方向上的空气空间中对遥远物体(例如识别不良的障碍物)进行光学检测。
    • 4. 发明授权
    • Zoom system, in particular, a zoom system for an illumination device of a microlithographic projection system
    • 变焦系统,特别是用于微光刻投影系统的照明装置的变焦系统
    • US06900946B2
    • 2005-05-31
    • US10793247
    • 2004-03-05
    • Jess Koehler
    • Jess Koehler
    • G02B13/14G02B27/00G03F7/20H01L21/027G02B15/14
    • G03F7/70183G02B13/143G02B13/22G02B15/173G03F7/70075
    • A zoom system that is particularly suited to use on an illumination device of a microlithographic projection exposure system and is configured in the form of a focal-length-zooming lens. The lenses of the zoom system define an object plane (6) and an image plane (8) that is a Fourier transform of the object plane. Both an intermediate pupillary plane (25) that is conjugate to the image plane and an intermediate field plane (27) that is a Fourier transform of the image plane lie between the object plane (6) and image plane (8). At least one movable lens (31, 32) is arranged in the vicinity of these intermediate image planes (25, 27). The system is characterized by a large expansion of the illuminated area on the image plane for short lengths of travel and light weights of these movable lenses (31, 32).
    • 一种变焦系统,其特别适用于微光刻投影曝光系统的照明装置,并且被配置为焦距变焦透镜的形式。 变焦系统的透镜定义物体平面(6)和作为物平面的傅里叶变换的图像平面(8)。 与图像平面共轭的中间瞳孔平面(25)和作为图像平面的傅立叶变换的中间场平面(27)位于物平面(6)和图像平面(8)之间。 在这些中间图像平面(25,27)附近布置有至少一个可移动透镜(31,32)。 该系统的特征在于,对于这些可移动透镜(31,32)的短行程和轻重量,图像平面上的照明区域的扩大很大。
    • 5. 发明申请
    • DEVICE FOR IMPROVING THE RESOLUTION CAPABILITY OF AN X-RAY OPTICAL APPARATUS
    • 用于改善X射线光学装置的分辨能力的装置
    • US20080159472A1
    • 2008-07-03
    • US11928676
    • 2007-10-30
    • Albrecht FreyNorbert PailerJess Koehler
    • Albrecht FreyNorbert PailerJess Koehler
    • G21K1/06
    • G21K1/06G21K2201/064G21K2201/067
    • The present invention describes a device for improving the resolution capability of an x-ray optical apparatus for an x-ray (24) incident from a direction of incidence, which device comprises a mirror element (52, 54) with a mirror edge (52), the mirror edge (52) being formed around an edge axis (58) by a cylindrical shell section, the mirror element (52, 54) being arranged spaced apart in a radial direction (42) with respect to a focal axis (25) parallel to the direction of incidence by a focal point of the x-ray optical apparatus, and the mirror element (52, 54) being furthermore arranged rotated about an axis extending in the radial direction (42) with respect to the direction of incidence such that the edge axis (58) is tilted with respect to the direction of incidence.
    • 本发明描述了一种用于提高从入射方向入射的x射线(24)的X射线光学装置的分辨能力的装置,该装置包括具有镜面(52)的镜子元件(52,54) ),镜边缘(52)通过圆柱形壳体部分围绕边缘轴线(58)形成,所述镜子元件(52,54)相对于焦点轴线(25)沿径向方向(42)间隔开设置 ),并且所述镜元件(52,54)进一步相对于所述径向方向(42)沿着所述径向方向(42)延伸的轴线旋转地布置,所述反射镜元件(52,54)平行于所述X射线光学设备的焦点的入射方向 使得边缘轴线(58)相对于入射方向倾斜。
    • 9. 发明申请
    • Fly's eye condenser and illumination system therewith
    • 飞的眼睛冷凝器和照明系统
    • US20060221453A1
    • 2006-10-05
    • US11375552
    • 2006-03-15
    • Jess KoehlerDamian Fiolka
    • Jess KoehlerDamian Fiolka
    • G02B27/10
    • G03F7/70075G02B5/3083G02B27/285G03F7/70566
    • A fly's eye condenser (15) for converting an input light distribution into an output light distribution has at least one raster arrangement of optical groups (21, 22), of which at least some comprise polarization-changing means (30) suitable for changing polarization. The polarization-changing means include at least one layer of birefringent material associated with an optical group. The layer of birefringent material of at least two optical groups has a different thickness in a passage direction of the light. The fly's eye condenser thus permits specific, location-dependent control of the polarization state of the output light distribution. If the fly's eye condenser is used in an illumination system (10), then it can be used not only to homogenize the light distribution on the illumination plane of the illumination system but, at the same time, a location-dependent or angle-dependent polarization distribution can also be set in the illumination plane.
    • 用于将输入光分布转换成输出光分布的蝇眼聚光器(15)具有光学组(21,22)的至少一个光栅装置,其中至少一些包括适于改变偏振的偏振改变装置(30) 。 偏振改变装置包括与光学组相关联的至少一层双折射材料。 至少两个光学组的双折射材料层在光的通过方向上具有不同的厚度。 因此,蝇眼聚光器允许对输出光分布的偏振态的特定的,位置相关的控制。 如果在照明系统(10)中使用蝇眼聚光器,则不仅可以将照明系统的照明平面上的光分布均匀化,而且可以同时使用位置相关或角度依赖 也可以在照明平面中设置极化分布。
    • 10. 发明授权
    • Optical system for providing a useful light beam influenced by polarization
    • 用于提供受极化影响的有用光束的光学系统
    • US07027235B2
    • 2006-04-11
    • US10728814
    • 2003-12-08
    • Jess Koehler
    • Jess Koehler
    • G02B5/30G02B17/00
    • G03F7/70566G02B13/143G02B27/286G03F7/70191
    • An optical system for providing a useful light beam, having one or more optical components (3, 4, 5) which attenuate a useful light fraction with a first linear polarization state less strongly than a useful light fraction with a second linear polarization state different from the first state. A compensation unit is provided which includes a transmission plate (9) that is introduced into the useful light beam path (7) inclined (β) to the optical axis, and attenuates the useful light fraction with the first linear polarization state more strongly than that with the second linear polarization state. As a result, the imbalance, caused by the system without a compensation unit, of the two useful light fractions can be compensated completely or in any case partially. The optical system is used, for example, in illuminating systems and projection objectives of microlithographic projection exposure apparatuses.
    • 一种用于提供有用光束的光学系统,其具有一个或多个光学部件(3,4,5),该光学部件衰减具有不同于第二线偏振态的有用光分数的第一线性偏振状态的有用光分数 第一个状态。 提供了一种补偿单元,其包括被引入到与光轴倾斜(β)的有用光束路径(7)中的透射板(9),并且比第一线性极化状态更强烈地衰减有用光分数 具有第二线性极化状态。 结果,由两个有用的轻馏分的无补偿单元的系统引起的不平衡可以被完全补偿,或者在任何情况下均可部分补偿。 光学系统例如用于微光刻投影曝光装置的照明系统和投影物镜。