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    • 1. 发明授权
    • Method for preparing a photo-crosslinkable composition
    • 光可交联组合物的制备方法
    • US08574818B2
    • 2013-11-05
    • US12936458
    • 2009-04-09
    • Jerome BalletClaudine BiverJean-Paul CanoFlorent DelianePascal EtienneMarjorie Llosa
    • Jerome BalletClaudine BiverJean-Paul CanoFlorent DelianePascal EtienneMarjorie Llosa
    • G03F7/004G03F7/30G03F7/38
    • C08G77/14C08L83/06C09D183/06G03F7/0757
    • The invention relates to a photo-crosslinkable composition obtainable by a method comprising: (a) the hydrolysis and condensation reaction of a [(epoxycycloalkyl)alkyl]trialkoxysilane in solution in an organo-aqueous medium as described in specification to obtain a solution of an organo-mineral hybrid prepolymer, in which the totality or quasi-totality of the alkoxysilane groups has been hydrolysed, and which comprises in average at least 4 (epoxycycloalkyl)alkyl groups; (b) cooling the obtained polyepoxide prepolymer composition as described in specification: (c) adding to said composition at least one cationic-polymerisation photo-photoinitiator and at least one specific photosensitiser as describes in specification and adding a surfactant; (d) agitating the obtained composition as described in specification thus obtained; (e) filtering the obtained composition as described in specification thus obtained; and (f) storing the obtained liquid filtrate as described in specification thus obtained. The invention also relates to the a photocrosslinkable composition as a negative photosensitive resin in a photolithography process.
    • 本发明涉及一种可光交联组合物,其可通过以下方法获得,该方法包括:(a)[(环氧环烷基)烷基]三烷氧基硅烷在有机水介质中的溶液中的水解和缩合反应,如说明书所述,以获得 有机 - 矿物杂化预聚物,其中烷氧基硅烷基团的总体或准总数已被水解,并且平均包含至少4个(环氧环烷基)烷基; (b)按照说明书所述冷却得到的聚环氧化物预聚物组合物:(c)向所述组合物中加入至少一种阳离子聚合光引发剂和至少一种如说明书中所述的特定光敏剂并加入表面活性剂; (d)如所得的说明书所述搅拌得到的组合物; (e)按照如此得到的说明书所述过滤所得组合物; 和(f)如所得的说明书所述储存所得的液体滤液。 本发明还涉及在光刻工艺中作为负型感光性树脂的光致交联组合物。