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    • 4. 发明申请
    • PARTICULATE MATERIAL METERING AND VAPORIZATION
    • 颗粒材料计量和蒸发
    • US20100122656A1
    • 2010-05-20
    • US12271211
    • 2008-11-14
    • Michael LongThomas W. Palone
    • Michael LongThomas W. Palone
    • B05C11/10
    • C23C14/12C23C14/246
    • Apparatus for metering and vaporizing a particulate material, includes a metering device for metering particulate material including: a reservoir for receiving particulate material; a housing having an internal volume and having first and second openings; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove; a structure disposed in the reservoir for delivery and cooperating with the rotating shaft for fluidizing particulate material and transporting it from the reservoir into the groove; the shaft and internal volume cooperating such that particulate material is transported by the groove; a scraper cooperates with the groove to dislodge particulate material retained therein and fluidize the scraped particulate material, and deliver metered amounts of particulate material through the second opening; and a flash evaporator that receives and flash vaporizes the metered particulate material.
    • 用于计量和蒸发颗粒材料的装置包括用于计量颗粒材料的计量装置,包括:用于接收颗粒材料的储存器; 具有内部容积并具有第一和第二开口的壳体; 设置在所述内部容积中的旋转轴,所述轴具有光滑的表面和周向凹槽; 设置在储存器中以用于输送并与旋转轴配合以用于使颗粒材料流化并将其从储存器输送到凹槽中的结构; 轴和内部体积协调使得颗粒材料由凹槽传送; 刮板与凹槽配合以移除保留在其中的颗粒材料并使刮擦的颗粒材料流化,并通过第二开口输送计量的颗粒材料; 以及闪蒸蒸发器,其接收并闪蒸计量的颗粒材料。
    • 6. 发明授权
    • Pressure gauge for organic materials
    • 有机材料压力表
    • US07322248B1
    • 2008-01-29
    • US11467936
    • 2006-08-29
    • Michael Long
    • Michael Long
    • G01L21/12
    • G01L21/12
    • A vacuum gauge of the Pirani type for measuring the pressure of vaporized organic or inorganic material used in forming a layer of a device, comprising: an extended filament having a thickness of 5 microns or less and having a temperature coefficient of resistance greater than 0.0035/° C., the filament being subject to the vaporized organic or inorganic material; means for applying a current to the filament so that the temperature of the filament is less than 650° C. so as not to degrade the molecular structure of the organic material; and a structure responsive to a change in resistance or a change in current to determine heat loss from the filament, which is a function of the pressure of the vaporized organic or inorganic material.
    • Pirani型真空计,用于测量用于形成器件层的蒸发有机或无机材料的压力,包括:延伸长丝,其厚度为5微米或更小,并且具有大于0.0035 / 该细丝经受蒸发的有机或无机材料; 用于向灯丝施加电流以使灯丝的温度低于650℃的装置,以便不会降解有机材料的分子结构; 以及响应于电阻变化或电流变化的结构,以确定来自灯丝的热损失,其是蒸发的有机或无机材料的压力的函数。
    • 7. 发明授权
    • Delivering organic powder to a vaporization zone
    • 将有机粉末送至汽化区
    • US07288286B2
    • 2007-10-30
    • US10945941
    • 2004-09-21
    • Michael LongJeremy M. GraceBruce E. Koppe
    • Michael LongJeremy M. GraceBruce E. Koppe
    • C23C16/00
    • C23C14/12B05D1/60C23C14/246H01L51/0008H01L51/56
    • A method for vaporizing organic material and condensing it onto a surface to form a layer, comprising: providing a quantity of first organic material in a powdered form in a first container and a quantity of second organic material in a second container spaced from the first container; fluidizing the first organic material in the first container, transferring the fluidized first organic material from the first container into a manifold, and vaporizing the first organic material in the manifold; fluidizing the second organic material in the second container, transferring the fluidized second organic material from the second container into the manifold, and vaporizing the second organic material in the manifold where the first and second vaporized organic materials are mixed; and delivering from the manifold the mixed vaporized materials to the substrate surface to form the layer.
    • 一种用于蒸发有机材料并将其冷凝到表面上以形成层的方法,包括:在第一容器中提供一定数量的粉末形式的第一有机材料和在与第一容器间隔开的第二容器中的一定数量的第二有机材料 ; 使第一有机材料在第一容器中流化,将流化的第一有机材料从第一容器转移到歧管中,并蒸发歧管中的第一有机材料; 使第二有机材料在第二容器中流化,将流化的第二有机材料从第二容器转移到歧管中,并蒸发歧管中的第一和第二汽化有机材料混合的第二有机材料; 并从歧管将混合的汽化材料输送到基底表面以形成该层。