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    • 8. 发明申请
    • Method for fabrication of mold for nano imprinting and method for production of photonic crystal using the same
    • 纳米压印用模具的制造方法及其制造方法
    • US20100096770A1
    • 2010-04-22
    • US12585874
    • 2009-09-28
    • Young Tae ChoJeong Gil Kim
    • Young Tae ChoJeong Gil Kim
    • B29C33/42
    • B29C33/3878
    • A manufacturing process using a replica mold for nano imprinting having a grid type pattern by combining a nano imprint with a dry etching process is disclosed. In order to attain such a manufacturing process, a method of fabricating a mold for nano imprinting may include arranging a master mold having first patterns over a substrate having metal patterns so that both the first pattern and the metal pattern cross over each other, applying resin between the master mold and the substrate, applying an imprinting treatment of the substrate as well as the master mold, hardening the resin, and etching the hardened resin after the master mold is released, so as to form a replica mold for nano imprint. The nano imprinting process and the etching process may easily form a pattern in a more complicated structure, and therefore, may improve production yield and reduce processing time thereof.
    • 公开了一种使用复制模具进行纳米压印的制造工艺,其具有通过将纳米压印与干蚀刻工艺组合而具有格栅型图案。 为了实现这种制造工艺,制造用于纳米压印的模具的方法可以包括在具有金属图案的基板上布置具有第一图案的母模,使得第一图案和金属图案彼此交叉,施加树脂 在母模和基板之间,在母模脱模之后,对基板以及母模进行压印处理,硬化树脂,并蚀刻硬化树脂,以形成用于纳米压印的复制模。 纳米压印工艺和蚀刻工艺可以容易地形成更复杂结构的图案,因此可以提高生产成品率并缩短其处理时间。
    • 9. 发明授权
    • Method of forming a pattern using nano imprinting and method of manufacturing a mold to form such a pattern
    • 使用纳米压印形成图案的方法和制造模具以形成这种图案的方法
    • US08168107B2
    • 2012-05-01
    • US12453978
    • 2009-05-28
    • Young Tae ChoYoung Suk SimJeong Gil Kim
    • Young Tae ChoYoung Suk SimJeong Gil Kim
    • B28B11/08
    • G03F7/0002B82Y10/00B82Y40/00
    • Example embodiments relate to a method of forming a three-dimensional micro pattern or a multi-step pattern using a nano imprinting process and a method of manufacturing a mold to form such a pattern. A molding polymer may be patterned in a one-step shape on a substrate having UV barrier patterns, thereby easing the manufacture of a mold for multi-step imprinting and simplifying the formation of a multi-step pattern using the one-step shaped mold by avoiding the repetition of more complicated processes. Consequently, it may be possible to form a relatively large-area micro pattern, a relatively large-area pattern usable in flat panel displays, and a nano pattern having a size of several tens of nanometers in a semiconductor process, thereby contributing to the reduction of process costs, the reduction of process time, and the improvement of production yield.
    • 示例实施例涉及使用纳米压印工艺形成三维微图案或多步图案的方法以及制造模具以形成这种图案的方法。 成型聚合物可以在具有UV阻挡图案的基板上以一步形状图案化,从而减轻用于多步压印的模具的制造,并且通过使用一步成型模具简化多步图案的形成 避免重复更复杂的过程。 因此,可以在半导体工艺中形成相对大面积的微图案,可用于平板显示器的相对大面积图案和具有几十纳米尺寸的纳米图案,从而有助于减少 的工艺成本,减少加工时间,提高产量。