专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06640023B2 Single chip optical cross connect 有权
公开(公告)号：US06640023B2
公开(公告)日：2003-10-28
申请号：US09966966
申请日：2001-09-27
申请人： Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski
发明人： Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski
IPC分类号： G02B635
CPC分类号： G02B6/3582 , B33Y80/00 , G02B6/32 , G02B6/3512 , G02B6/3556 , G02B6/357 , G02B6/358 , G02B6/3644 , G02B6/3672 , H04Q11/0005 , H04Q2011/003
摘要： The present invention provides a free space optical cross connect for switching optical signals between a plurality of optical signal ports to/from the switch interface. In one embodiment, a single chip 2N OXC (10) for switching optical signals (12) between any one of N input optical fibers (14) and any one of N output optical fibers (16) within a compact free space switch interface (18) includes N reflective microstructures (20) built/assembled on a substrate (30) and N positioning systems (40) associated with the reflective microstructures (20) that are also built/assembled on the substrate (30). The positioning systems (40) are operable to both elevate their associated reflective microstructures (20) from the surface of the substrate (30) and to tilt their associated reflective microstructures (20) with at least two degrees of freedom with respect to the surface of the substrate (30) in order to reflect optical signal (12) through the switch interface (18) from any one of the input optical fibers (14) to any one of the output optical fibers (16). The single chip 2N OXC (10) may also include a lid (62) overlying and spaced away from the substrate (30) to provide a hermetically sealed package (60).

2. 发明授权

US07055975B2 Microelectromechanical system with non-collinear force compensation 失效
公开(公告)号：US07055975B2
公开(公告)日：2006-06-06
申请号：US10097177
申请日：2002-03-12
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： G02B7/182 , H02K5/00
CPC分类号： G02B7/182 , G02B26/0833 , G02B26/0841 , Y10S359/904
摘要： A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.

3. 发明授权

US06665104B2 Mirror positioning assembly with vertical force component compensation 有权
标题翻译：具有垂直力分量补偿的镜面定位组件
公开(公告)号：US06665104B2
公开(公告)日：2003-12-16
申请号：US10097127
申请日：2002-03-12
申请人： Murray Steven Rodgers , Samuel Lee Miller , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Murray Steven Rodgers , Samuel Lee Miller , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： G02B2608
CPC分类号： G02B26/08 , G02B26/0833 , G02B26/0841
摘要： A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.
摘要翻译：公开了一种微机电系统，其限制作用在第一负载上的力的方向，其中力源于第一负载和第二负载的相互作用。特别地，使作用在第一负载上的力的方向基本上与第一负载的运动平行。该力方向约束通过不包含摩擦或接触表面的力隔离器微结构实现。公开了使用力隔离器微结构来实现该力方向约束的结构/方法的各种实施例。

4. 发明授权

US07060081B2 Microkeratome blade with arbitrary blade angle 失效
标题翻译：任意刀片角度的小角刀刀片
公开(公告)号：US07060081B2
公开(公告)日：2006-06-13
申请号：US10431003
申请日：2003-05-07
申请人： Paul Jackson McWhorter , Samuel Lee Miller , Jeffry Joseph Sniegowski , Murray Steven Rodgers
发明人： Paul Jackson McWhorter , Samuel Lee Miller , Jeffry Joseph Sniegowski , Murray Steven Rodgers
IPC分类号： A61F9/00
CPC分类号： A61F9/013 , A61B17/3211 , A61F9/0133 , B26B9/00 , B26B29/06 , Y10T29/49885
摘要： A cutting blade (56) having a cutting edge (80) defined by an intersection of a first cutting edge surface (72) and a second cutting edge surface (66) is disclosed. The angle between the first cutting edge surface (72) and the second cutting edge surface (66) defines a blade angle (θ). The blade (56) may be fabricated from a wafer (130) by an anisotropic etch. An upper surface (134) of the wafer (130) is defined by a first set of 3 Miller indices, where at least one individual Miller index of this first set has an absolute value greater than 3. A top surface (60) of the blade (56) is defined by part of the upper surface (134) of the wafer (130). The anisotropic etch proceeds until reaching a particular crystallographic plane to define the first cutting edge surface (72). Having the top surface (60) of the blade (56) defined by the noted set of 3 Miller indices increases the potential that a blade angle (θ) of a desired magnitude may be realized.
摘要翻译：公开了一种具有由第一切削刃表面（72）和第二切削刃表面（66）的交点限定的切削刃（80）的切削刃（56）。第一切削刃表面（72）和第二切削刃表面（66）之间的角度限定刀片角度（θ）。刀片（56）可以通过各向异性蚀刻由晶片（130）制成。晶片（130）的上表面（134）由第一组3米勒指数定义，其中该第一组的至少一个单独的米勒指数具有大于3的绝对值。顶表面（60）刀片（56）由晶片（130）的上表面（134）的一部分限定。各向异性蚀刻进行到达到特定的结晶平面以限定第一切削刃表面（72）。具有由所述的3米勒指数所定义的叶片（56）的顶表面（60）增加可以实现期望幅度的叶片角度（θ）的电位。

5. 发明授权

US06847152B2 Microelectromechnical system for tilting a platform 有权
标题翻译：用于倾斜平台的微机电系统
公开(公告)号：US06847152B2
公开(公告)日：2005-01-25
申请号：US10697385
申请日：2003-10-30
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： B81B3/00 , H02N1/00 , G02B26/08 , G02B26/10
CPC分类号： B81B3/0062 , B33Y80/00 , H02N1/006 , H02N1/008
摘要： The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).
摘要翻译：本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高，。在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于通过相等或不相等的角度量到基板（12）。在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。由于平台（14）从基板（12）的表面上升，所以可以相对于基板（12）以大的角度倾斜。

6. 发明授权

US06774535B2 Micromechanical platform pivotal on a compliant member 有权
标题翻译：微机械平台在合规成员上枢转
公开(公告)号：US06774535B2
公开(公告)日：2004-08-10
申请号：US10697348
申请日：2003-10-30
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： G02B2608
CPC分类号： B81B3/0062 , B33Y80/00 , H02N1/006 , H02N1/008
摘要： The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).
摘要翻译：本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高，。在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于通过相等或不相等的角度量到基板（12）。在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。由于平台（14）从基板（12）的表面上升，所以可以相对于基板（12）以大的角度倾斜。

7. 发明授权

US06989582B2 Method for making a multi-die chip 有权
公开(公告)号：US06989582B2
公开(公告)日：2006-01-24
申请号：US10456319
申请日：2003-06-06
申请人： Jeffry Joseph Sniegowski , Murray Steven Rodgers
发明人： Jeffry Joseph Sniegowski , Murray Steven Rodgers
IPC分类号： H01L23/544
CPC分类号： H01L23/544 , B81B2201/045 , B81C1/00873
摘要： The present invention generally relates to a die perimeter region of a die having a microelectromechanical assembly fabricated thereon. This die perimeter region may be configured to facilitate electrically interconnecting adjacent die on a wafer. Moreover, this die perimeter region may be configured to facilitate separating the die from a wafer.

8. 发明授权

US06831391B2 Microelectromechanical system for tilting a platform 有权
标题翻译：用于倾斜平台的微机电系统
公开(公告)号：US06831391B2
公开(公告)日：2004-12-14
申请号：US10697386
申请日：2003-10-30
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： H02N100
CPC分类号： B81B3/0062 , B33Y80/00 , H02N1/006 , H02N1/008
摘要： The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).
摘要翻译：本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高，。在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于通过相等或不相等的角度量到基板（12）。在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。由于平台（14）从衬底（12）的表面上升，所以可以相对于衬底（12）以大的角度倾斜。

9. 发明授权

US06794793B2 Microelectromechnical system for tilting a platform 有权
标题翻译：用于倾斜平台的微机电系统
公开(公告)号：US06794793B2
公开(公告)日：2004-09-21
申请号：US09966963
申请日：2001-09-27
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： H02N100
CPC分类号： B81B3/0062 , B33Y80/00 , H02N1/006 , H02N1/008
摘要： The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).
摘要翻译：本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高，。在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于通过相等或不相等的角度量到基板（12）。在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。由于平台（14）从基板（12）的表面上升，所以可以相对于基板（12）以大的角度倾斜。

10. 发明授权

US06831390B2 Microelectromechanical system with stiff coupling 有权
公开(公告)号：US06831390B2
公开(公告)日：2004-12-14
申请号：US10099464
申请日：2002-03-14
申请人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
发明人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
IPC分类号： G02B2608
CPC分类号： G02B26/0841 , B81B3/0062 , H02N1/008
摘要： A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式