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    • 4. 发明申请
    • Probe for an optical near field microscope and method for producing the same
    • 光学近场显微镜的探针及其制造方法
    • US20060050373A1
    • 2006-03-09
    • US11193962
    • 2005-07-29
    • Albrecht BrandenburgChrista KunzelDietmar Eberhard
    • Albrecht BrandenburgChrista KunzelDietmar Eberhard
    • G02B21/00
    • G01Q60/22
    • This invention relates to a probe for an optical near field microscope, said probe comprising a probe tip which is formed on a self-supporting carrier and to a method for producing the same. One object of this invention is to provide a probe for an optical near field microscope and a method of producing the same, whereby the probe has a probe tip with a very small aperture diameter and thus can be reproducibly manufactured in a simple, advantageously controllable method. This object is solved with regard to the probe by a generic probe which is characterised in that the probe tip is embodied as a complete structure which is applied to a planar surface of the carrier. The object is solved with regard to a method for the manufacture of a probe for an optical near field microscope according to the invention by a method with the steps: a transparent layer is applied to a substrate, the thickness of the transparent layer corresponding to at least the height of the probe tip; the transparent layer is masked in at least one region of the probe tip; the transparent layer is etched, forming the probe tip.
    • 本发明涉及一种用于光学近场显微镜的探针,所述探针包括形成在自支撑载体上的探针尖端及其制造方法。 本发明的一个目的是提供一种用于光学近场显微镜的探针及其制造方法,由此探针具有孔径非常小的探针尖端,并且因此可以以简单的,有利的可控方法再现制造 。 通过通用探针来解决该目的的目的,其特征在于探针尖端被实施为施加到载体平面的完整结构。 关于根据本发明的用于制造用于光学近场显微镜的探针的方法的目的是通过以下步骤的方法来解决的:步骤:将透明层施加到基底上,将透明层的厚度对应于 至少探针尖的高度; 透明层被掩蔽在探针尖端的至少一个区域中; 透明层被蚀刻,形成探针尖端。