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    • 1. 发明申请
    • Probe for an optical near field microscope and method for producing the same
    • 光学近场显微镜的探针及其制造方法
    • US20060050373A1
    • 2006-03-09
    • US11193962
    • 2005-07-29
    • Albrecht BrandenburgChrista KunzelDietmar Eberhard
    • Albrecht BrandenburgChrista KunzelDietmar Eberhard
    • G02B21/00
    • G01Q60/22
    • This invention relates to a probe for an optical near field microscope, said probe comprising a probe tip which is formed on a self-supporting carrier and to a method for producing the same. One object of this invention is to provide a probe for an optical near field microscope and a method of producing the same, whereby the probe has a probe tip with a very small aperture diameter and thus can be reproducibly manufactured in a simple, advantageously controllable method. This object is solved with regard to the probe by a generic probe which is characterised in that the probe tip is embodied as a complete structure which is applied to a planar surface of the carrier. The object is solved with regard to a method for the manufacture of a probe for an optical near field microscope according to the invention by a method with the steps: a transparent layer is applied to a substrate, the thickness of the transparent layer corresponding to at least the height of the probe tip; the transparent layer is masked in at least one region of the probe tip; the transparent layer is etched, forming the probe tip.
    • 本发明涉及一种用于光学近场显微镜的探针,所述探针包括形成在自支撑载体上的探针尖端及其制造方法。 本发明的一个目的是提供一种用于光学近场显微镜的探针及其制造方法,由此探针具有孔径非常小的探针尖端,并且因此可以以简单的,有利的可控方法再现制造 。 通过通用探针来解决该目的的目的,其特征在于探针尖端被实施为施加到载体平面的完整结构。 关于根据本发明的用于制造用于光学近场显微镜的探针的方法的目的是通过以下步骤的方法来解决的:步骤:将透明层施加到基底上,将透明层的厚度对应于 至少探针尖的高度; 透明层被掩蔽在探针尖端的至少一个区域中; 透明层被蚀刻,形成探针尖端。
    • 5. 发明授权
    • Probe for an optical near field microscope with improved scattered light suppression and method for producing the same
    • 探测具有改进的散射光抑制的光学近场显微镜及其制造方法
    • US07477817B2
    • 2009-01-13
    • US11193963
    • 2005-07-29
    • Albrecht Brandenburg
    • Albrecht Brandenburg
    • G02B6/34G02B21/00
    • G01Q60/22
    • The invention relates to a probe for an optical near field microscope, said probe comprising a planar carrier carrying a probe tip at least partially consisting of a transparent material. The invention also relates to a method of producing one such probe. The object of the invention is to provide a probe for an optical near field microscope and a method for the production thereof, whereby the probe can be produced with high reproducibility according to a simple technology and can have a simple but efficient light supply. According to the invention, the object is solved with a probe of the type mentioned in the introduction such that the carrier comprises an optical waveguide. With respect to the method for probe production the object mentioned above is solved according to the invention by a method comprising the following steps: a coating comprising an optical waveguide is applied to a substrate in a first step; a transparent layer is applied in a second step, such that the optical waveguide is arranged between the substrate and the transparent layer; the transparent layer is masked in at least one region above the probe tip in a third step; and the transparent layer is etched, forming the probe tip, in a fourth step.
    • 本发明涉及一种用于光学近场显微镜的探针,所述探针包括承载至少部分由透明材料组成的探针尖端的平面载体。 本发明还涉及生产一种这样的探针的方法。 本发明的目的是提供一种用于光学近场显微镜的探针及其制造方法,由此可以根据简单的技术以高再现性制造探针,并且可以具有简单而有效的光源。 根据本发明,通过引言中提到的类型的探针来解决该问题,使得载体包括光波导。 关于探针制备方法,根据本发明,通过包括以下步骤的方法来解决上述目的:在第一步骤中将包含光波导的涂层施加到基底; 在第二步骤中施加透明层,使得光波导布置在基板和透明层之间; 在第三步骤中,在探针尖端上方的至少一个区域中掩蔽透明层; 并且在第四步中蚀刻形成探针尖端的透明层。