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1. 发明授权

US06663340B1 Wafer carrier transport system for tool bays 失效
标题翻译：工具托架的晶圆托架运输系统
公开(公告)号：US06663340B1
公开(公告)日：2003-12-16
申请号：US10232158
申请日：2002-08-30
申请人： Jason S. Zeakes , Clinton Haris , Karl E. Mautz , William Mark Hiatt
发明人： Jason S. Zeakes , Clinton Haris , Karl E. Mautz , William Mark Hiatt
IPC分类号： B65G4907
CPC分类号： H01L21/67727 , H01L21/67733 , H01L21/67769 , Y10S414/135
摘要： A processing tool bay within a semiconductor fabrication site, including a plurality of semiconductor processing tools for processing wafers being arranged in two opposite rows. An intrabay transport system for transporting wafer carriers around the process tool bay at least in a vertical plane in front of one of said two rows of semiconductor process tools comprises at least one vehicle for receiving and delivering a wafer carrier to and from any one semiconductor process tool of said plurality of semiconductor process tools, and a vehicle guiding mechanism. The vehicle comprises a circular compartment structure including a plurality of compartments for buffering said wafer carrier between receiving it at a first location and delivering it at a second location. Each compartment is arranged for accommodating one wafer carrier. The compartment structure is rotatable around a symmetry axis of itself for an alignment. The distance between the two opposite rows of processing tools is determined so as to enable a displacement of at least one vehicle.
摘要翻译：半导体制造场所内的处理工具架，包括用于处理晶片的多个半导体处理工具，其布置成两排。用于至少在所述两行半导体工艺工具之一的前面的至少一个垂直平面内运送晶片载体的用于在工艺工具架周围传送晶片载体的内部传输系统包括至少一个用于接收晶片载体并从任何一个半导体工艺传送晶片载体的载体所述多个半导体处理工具的工具，以及车辆引导机构。车辆包括圆形隔室结构，其包括多个隔室，用于在第一位置处接收它并在第二位置处将其提供之间缓冲所述晶片载体。每个隔间布置成容纳一个晶片载体。隔室结构可绕其自身的对称轴线旋转以进行对准。确定两个相对行的处理工具之间的距离，以便能够移动至少一个车辆。

2. 发明授权

US06732855B1 Conveying element and conveyor means for conveying wafer receptacles, and method 有权
标题翻译：用于输送晶片容器的输送元件和输送装置及方法
公开(公告)号：US06732855B1
公开(公告)日：2004-05-11
申请号：US09658152
申请日：2000-09-08
申请人： Michael Lering , Volker Tegeder , Clinton Haris
发明人： Michael Lering , Volker Tegeder , Clinton Haris
IPC分类号： B65G1312
CPC分类号： H01L21/67706 , B65G13/065
摘要： A conveyor element (10) for conveying wafer receptacles between a conveyor (12) and a loading station (11) of a manufacturing system in the semiconductor industry has a lifting mechanism (13) to move the wafer receptacle from a first position of the conveyor (12) or the loading station (11) into a second position of the conveyor (12) or of the loading station (11) substantially in a vertical direction. Rollers (14) are provided to move the wafer receptacle from the second position of the conveyor (12) along a substantially horizontal direction to the second position of the loading station (11) or from the second position of the loading station (11) to the second position of the conveyor (12).
摘要翻译：用于在半导体工业中的输送机（12）和制造系统的装载站（11）之间输送晶片容器的传送器元件（10）具有提升机构（13），以使晶片接收器从输送机的第一位置移动（12）或装载站（11）基本上沿垂直方向进入输送机（12）或装载站（11）的第二位置。提供辊（14）以将晶片接收器从输送机（12）的第二位置沿着基本上水平的方向移动到装载站（11）的第二位置或从装载站（11）的第二位置移动到输送机（12）的第二位置。

3. 发明授权

US06426698B1 Lot signalling device 有权
标题翻译：批信号装置
公开(公告)号：US06426698B1
公开(公告)日：2002-07-30
申请号：US09573949
申请日：2000-05-19
申请人： Larry Edward Frisa , Clinton Haris , Mark Hiatt
发明人： Larry Edward Frisa , Clinton Haris , Mark Hiatt
IPC分类号： G08B108
CPC分类号： G08B21/0216 , G08B13/1427 , G08B21/0227
摘要： An apparatus related to a lot signalling device used to find misplaced lots. A remote control signalling device comprises a receiver section (5) for receiving an RF-command including a unique address of at least one of said plurality of remote control signalling devices (3) from a central control unit (1), an address memory (6) for storing the address of said remote control signalling device, an output section (7) for signalling an alarm upon receiving the RF-command, if said address included in the RF-command matches the stored address in said address memory (6). A method for processing items at different process stages comprises the steps of: transmitting RF-commands including a unique address of at least one of said plurality of remote control signalling devices by a central control unit (1), signalling an alarm by said remote control signalling device (3) upon reception of an RF-command from said central control unit (1).
摘要翻译：与用于发现错位的批次信号装置相关的装置。遥控信令装置包括接收机部分（5），用于从中央控制单元（1）接收包括所述多个远程控制信令装置（3）中的至少一个的唯一地址的RF命令，地址存储器 6），用于存储所述遥控信令装置的地址;如果包括在所述RF指令中的所述地址与所述地址存储器（6）中存储的地址匹配，则用于在接收到所述RF命令时用于发出警报的输出部分（7）。一种用于在不同处理阶段处理物品的方法包括以下步骤：通过中央控制单元（1）发送包括至少一个所述多个远程控制信令装置的唯一地址的RF指令，通过所述遥控器信令装置（3）在从所述中央控制单元（1）接收到RF命令时。

4. 发明授权

US06389707B1 Wafer container having electrically conductive kinematic coupling groove to detect the presence of the wafer container on a support surface, the support surface, and method 有权
标题翻译：具有导电运动耦合槽的晶片容器用于检测在支撑表面上的晶片容器的存在，支撑表面和方法
公开(公告)号：US06389707B1
公开(公告)日：2002-05-21
申请号：US09641153
申请日：2000-08-17
申请人： Martin Peiter , Clinton Haris
发明人： Martin Peiter , Clinton Haris
IPC分类号： G01B730
CPC分类号： H01L21/67379 , H01L21/67259
摘要： In a transportation system (100, 200) for wafers, a wafer container (100) has kinematic coupling grooves, and a support surface (200) has kinematic coupling pins. Grooves and pins are at least partially electrically conductive to allow monitoring the correct position of the container by measuring electrical resistance, as well as to allow signal exchange to and from the container (100). The kinematic coupling pins have first and second surface areas that are electrically isolated.
摘要翻译：在用于晶片的运输系统（100,200）中，晶片容器（100）具有运动耦合槽，并且支撑表面（200）具有运动耦合销。槽和销至少部分导电，以允许通过测量电阻来监测容器的正确位置，并且允许与容器（100）的信号交换。运动耦合销具有电隔离的第一和第二表面区域。

5. 发明申请

US20060245847A1 Transfer chamber between workstations 有权
公开(公告)号：US20060245847A1
公开(公告)日：2006-11-02
申请号：US11093480
申请日：2005-03-30
申请人： Clinton Haris
发明人： Clinton Haris
IPC分类号： H01L21/677
CPC分类号： H01L21/67196 , H01L21/67184 , H01L21/67715 , Y10S414/135 , Y10S414/139
摘要： A bridging chamber is constructed between adjacent substrate processing workstation systems and connected by ports constructed in the adjacent substrate processing workstation systems. Transport mechanisms are used to move the substrates into and out of the bridging chamber to bypass primary transport systems.

6. 发明申请

US20060056952A1 Nonproductive wafer buffer module for substrate processing apparatus 有权
标题翻译：用于基板处理装置的非生产性晶片缓冲模块
公开(公告)号：US20060056952A1
公开(公告)日：2006-03-16
申请号：US11168908
申请日：2005-06-28
申请人： Clinton Haris
发明人： Clinton Haris
IPC分类号： B66C23/00
CPC分类号： H01L21/67271 , H01L21/67276
摘要： A sorter for handling and sorting semiconductor wafers is provided. The sorter has a housing, a handling and transport device and at least one nonproduction wafer buffer module. The housing has at least one holding area for interfacing one or more semiconductor wafer carriers to the housing. The housing defines an access path along which semiconductor wafers are transported between the housing and the one or more semiconductor wafer carriers. The handling and transport device is connected to the housing for transporting semiconductor wafers along the access path. The at least one nonproduction wafer buffer module is connected to the housing. The at least one nonproduction wafer buffer module buffers nonproduction wafers sorted by the sorter to one or more semiconductor wafer carriers. The at least one nonproduction wafer buffer module is located so that nonproduction wafers are transported by the handling and transport device, when being sorted to one or more of the semiconductor wafer carriers, along a different path than the access path.
摘要翻译：提供了用于处理和分选半导体晶片的分拣机。分拣机具有壳体，处理和运输装置以及至少一个非生产性晶片缓冲模块。壳体具有用于将一个或多个半导体晶片载体与壳体接合的至少一个保持区域。壳体限定了在壳体和一个或多个半导体晶片载体之间传送半导体晶片的进入路径。处理和运输装置连接到壳体，以沿着进入路径传送半导体晶片。至少一个非生产性晶片缓冲器模块连接到壳体。至少一个非生产性晶片缓冲器模块将由分拣机排序的非生产性晶片缓冲到一个或多个半导体晶片载体上。所述至少一个非生产性晶片缓冲器模块被定位成使得当沿着与所述接入路径不同的路径被分类到一个或多个所述半导体晶片载体时，所述处理和传输装置将非生产晶片传送。

7. 发明授权

US06468017B1 Vehicle, system and method for loading and unloading 有权
标题翻译：车辆，系统和装卸方法
公开(公告)号：US06468017B1
公开(公告)日：2002-10-22
申请号：US09717623
申请日：2000-11-21
申请人： Clinton Haris
发明人： Clinton Haris
IPC分类号： B65G4907
CPC分类号： H01L21/67724 , H01L21/67736 , Y10S414/14
摘要： A vehicle (10) for transporting a container (12) and for loading and unloading a load port (14) is disclosed. The vehicle (10) comprises a frame (16), a container holder (26) mounted to the frame (16), and front wheels (18) and rear wheels (20) mounted to the frame (16). The front wheels (18) are movable with respect to the rear wheels (20), so that the critical footprint of the vehicle is reduced during loading and unloading. The vehicle is particularly useful in personal guided systems and methods for loading and unloading wafer containers.
摘要翻译：公开了一种用于运输容器（12）并用于装载和卸载装载端口（14）的车辆（10）。车辆（10）包括框架（16），安装到框架（16）的容器保持器（26）以及安装到框架（16）上的前轮（18）和后轮（20）。前轮（18）能够相对于后轮（20）移动，使得在装载和卸载期间车辆的临界占地面积减小。车辆在个人导向系统和装载和卸载晶片容器的方法中特别有用。

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