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1. 发明授权

US06732855B1 Conveying element and conveyor means for conveying wafer receptacles, and method 有权
标题翻译：用于输送晶片容器的输送元件和输送装置及方法
公开(公告)号：US06732855B1
公开(公告)日：2004-05-11
申请号：US09658152
申请日：2000-09-08
申请人： Michael Lering , Volker Tegeder , Clinton Haris
发明人： Michael Lering , Volker Tegeder , Clinton Haris
IPC分类号： B65G1312
CPC分类号： H01L21/67706 , B65G13/065
摘要： A conveyor element (10) for conveying wafer receptacles between a conveyor (12) and a loading station (11) of a manufacturing system in the semiconductor industry has a lifting mechanism (13) to move the wafer receptacle from a first position of the conveyor (12) or the loading station (11) into a second position of the conveyor (12) or of the loading station (11) substantially in a vertical direction. Rollers (14) are provided to move the wafer receptacle from the second position of the conveyor (12) along a substantially horizontal direction to the second position of the loading station (11) or from the second position of the loading station (11) to the second position of the conveyor (12).
摘要翻译：用于在半导体工业中的输送机（12）和制造系统的装载站（11）之间输送晶片容器的传送器元件（10）具有提升机构（13），以使晶片接收器从输送机的第一位置移动（12）或装载站（11）基本上沿垂直方向进入输送机（12）或装载站（11）的第二位置。提供辊（14）以将晶片接收器从输送机（12）的第二位置沿着基本上水平的方向移动到装载站（11）的第二位置或从装载站（11）的第二位置移动到输送机（12）的第二位置。

2. 发明授权

US06881914B2 Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs 失效
标题翻译：用于处理，存储和重新装载诸如半导体晶片或CD的盘形物品的载体的装置和方法
公开(公告)号：US06881914B2
公开(公告)日：2005-04-19
申请号：US10298831
申请日：2002-11-18
申请人： Michael Lering , Reiner Missale , Martin Peiter
发明人： Michael Lering , Reiner Missale , Martin Peiter
IPC分类号： B08B7/00 , H01L21/00 , H01L21/304 , H01L21/677 , B65G49/07 , B07C5/344
CPC分类号： H01L21/67236 , H01L21/67207 , H01L21/67271 , Y10S414/137
摘要： An apparatus for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs, has at least one cleaning unit and at least one storage unit for the carriers containing the disk-shaped items. The apparatus further has at least one sorting unit for the disk-shaped items. The cleaning unit, the storage unit and the sorting apparatus are integral component parts of the apparatus and are operated by a common automatic control.
摘要翻译：用于处理，存储和重新装载诸如半导体晶片或CD的盘形物品的载体的装置具有至少一个清洁单元和至少一个用于包含盘形物品的载体的存储单元。该装置还具有用于盘形物品的至少一个分选单元。清洁单元，存储单元和分类设备是设备的组成部分，并且通过公共自动控制来操作。

3. 发明授权

US06857841B2 Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool 失效
标题翻译：用于将半导体器件载体输送到半导体处理工具的载体
公开(公告)号：US06857841B2
公开(公告)日：2005-02-22
申请号：US10401193
申请日：2003-03-27
申请人： Michael Lering
发明人： Michael Lering
IPC分类号： B62B3/00 , B62B3/10 , B65G49/07 , H01L21/00 , H01L21/677
CPC分类号： H01L21/67775 , B62B3/10 , B62B2203/10 , B62B2203/20 , H01L21/67724 , H01L21/67736 , Y10S414/14
摘要： A vehicle for transporting semiconductor devices is used for servicing loadports of semiconductor processing tools with device carriers by use of a portal hoist. Thereby, the vehicle contains an empty inner space and an open front side, such that the loadport is enclosed by the vehicle, when it approaches and docks to the loadport. Time for loading is shortened, complexity of structure and procedure is reduced and cleanroom space is saved.
摘要翻译：用于运输半导体器件的车辆用于通过使用门式起重机来维修具有装置载体的半导体加工工具的加载端口。因此，车辆包含空的内部空间和敞开的前侧，使得当车辆接近并且停靠在承载口时，车辆被车辆包围。缩短加载时间，减少结构和程序的复杂性，节省洁净室空间。

4. 发明申请

US20080298935A1 Wafer Cassette, Wafer Cassette Pod and Minienvironment Chamber Loadport Arrangement with a Minienvironment Chamber and a Wafer Cassette Pod with a Wafer Cassette 审中-公开
标题翻译：晶圆盒，晶圆盒荚和Minienvironment室承载装置与微型环境室和带晶片盒的晶片盒式荚
公开(公告)号：US20080298935A1
公开(公告)日：2008-12-04
申请号：US11757838
申请日：2007-06-04
申请人： Michael Lering
发明人： Michael Lering
IPC分类号： H01L21/67
CPC分类号： H01L21/67383
摘要： Exemplary embodiments of the invention relate to a wafer cassette, to a wafer cassette pod and to a minienvironment chamber loadport arrangement with a minienvironment chamber and a wafer cassette pod. In one exemplary embodiment of the invention, a wafer cassette is provided which has a plurality of wafer supports for supporting wafers, with the wafer supports being designed such that the pitch between wafers supported by means of the wafer supports is variable.
摘要翻译：本发明的示例性实施例涉及晶片盒，晶片盒盒和具有微型环境室和晶片盒盒的微型环境室负载端口布置。在本发明的一个示例性实施例中，提供了晶片盒，其具有用于支撑晶片的多个晶片支撑，晶片支撑被设计成使得通过晶片支撑件支撑的晶片之间的间距是可变的。

5. 发明申请

US20070187272A1 Device for the storage and use of at least one photomask for lithographic projection and method for using the device in an exposure installation 审中-公开
标题翻译：用于存储和使用至少一个用于光刻投影的光掩模的装置以及在曝光装置中使用该装置的方法
公开(公告)号：US20070187272A1
公开(公告)日：2007-08-16
申请号：US11644986
申请日：2006-12-22
申请人： Anja Bonness , Marcel Choudhury , Karin Eggers , Andreas Frangen , Norbert Kallis , Wolfgang Keller , Christoph Hocke , Michael Lering , Michael Roesner , Ruediger Hunger , Christoph Noelscher , Gregor Kubart
发明人： Anja Bonness , Marcel Choudhury , Karin Eggers , Andreas Frangen , Norbert Kallis , Wolfgang Keller , Christoph Hocke , Michael Lering , Michael Roesner , Ruediger Hunger , Christoph Noelscher , Gregor Kubart
IPC分类号： B65D85/48 , B65D90/22
CPC分类号： G03F7/70933 , G03F1/66 , G03F7/70741
摘要： The invention relates to a device for the storage of at least one photomask for lithographic projection and a method for using the device in an exposure installation. A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container housing and serving for the entry and issuing of the photomask, and one gas inlet opening arranged to purge the photomask. The invention also relates to a method for using the device in an exposure installation.
摘要翻译：本发明涉及用于存储用于光刻投影的至少一个光掩模的装置以及在曝光装置中使用该装置的方法。容器适合接收光掩模。容器具有壳体，位于容器壳体处并用于进入和发出光掩模的可闭合开口装置，以及布置成吹扫光掩模的一个气体入口。本发明还涉及一种在曝光装置中使用该装置的方法。

6. 发明授权

US07054714B2 Installation for processing a semiconductor wafer and method for operating the installation 有权
公开(公告)号：US07054714B2
公开(公告)日：2006-05-30
申请号：US10401185
申请日：2003-03-27
申请人： Christoph Hocke , Michael Lering , Gregor Kübart
发明人： Christoph Hocke , Michael Lering , Gregor Kübart
IPC分类号： G06F7/00
CPC分类号： H01L21/67294 , H01L21/67775
摘要： An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.

7. 发明授权

US06791074B2 Light curtain system for establishing a protective light curtain, tool and system for processing objects and method for loading/unloading a tool 有权
标题翻译：用于建立保护光幕的光幕系统，用于加工物体的工具和系统以及用于装载/卸载工具的方法
公开(公告)号：US06791074B2
公开(公告)日：2004-09-14
申请号：US10185630
申请日：2002-06-28
申请人： Sven Hahn , Michael Lering , Mathias Schulz
发明人： Sven Hahn , Michael Lering , Mathias Schulz
IPC分类号： H01J4014
CPC分类号： H01L21/67259 , F16P3/144 , Y10T29/41
摘要： A light curtain system is provided for establishing a protective light curtain for a tool in a system for processing objects such as wafers, and is particularly provided as a safety device for an operator of the tool. The light curtain system includes a first light curtain component of invisible light beams. A receiver and an emitter form edges of the protective light curtain from the invisible light beams. In addition, a second light curtain component of visible light beams is provided. The visible light beams are directed and transmitted adjacent and in parallel to the light beams of invisible light for forming a part of the protective light curtain and for making the protective light curtain visible for an operator. The second light curtain component of visible light beams is activated at least temporarily.
摘要翻译：提供了一种光幕系统，用于在用于处理诸如晶片的物体的系统中为工具建立保护光幕，并且特别地提供作为用于该工具的操作者的安全装置。光幕系统包括不可见光束的第一光幕部件。接收器和发射器从不可见的光束形成保护光幕的边缘。另外，提供可见光束的第二光幕部件。可见光束相对于不可见光的光束相邻并平行地传导和传播，用于形成保护光幕的一部分并使操作者可见的保护光幕。可见光束的第二光幕分量至少暂时被激活。

8. 发明授权

US06389706B1 Wafer container having electrically conductive kinematic coupling groove, support surface with electrically conductive kinematic coupling pin, transportation system, and method 有权
标题翻译：具有导电运动耦合槽的晶片容器，具有导电运动耦合销的支撑表面，输送系统和方法
公开(公告)号：US06389706B1
公开(公告)日：2002-05-21
申请号：US09641143
申请日：2000-08-17
申请人： Gregor Kuebart , Michael Lering , Sven Hahn
发明人： Gregor Kuebart , Michael Lering , Sven Hahn
IPC分类号： G01B730
CPC分类号： H01L21/67379 , H01L21/67259
摘要： A transportation system (100/200) has a wafer container (100), such as a FOUP, to rest on a support surface (200). The container has kinematic coupling grooves, and the support surface has kinematic coupling pins. Grooves and pins are at least partially electrically conductive and allow coupling an electric device (150) associated with the container to an electrical circuit (250) associated with the support surface. Device and circuit in combination allow to perform a variety of functions, such as monitoring the correct position of the container, and exchanging signals.
摘要翻译：运输系统（100/200）具有诸如FOUP的晶片容器（100），以搁置在支撑表面（200）上。容器具有运动耦合槽，并且支撑表面具有运动耦合销。沟槽和销至少部分导电并且允许将与容器相关联的电气设备（150）与与支撑表面相关联的电路（250）耦合。装置和电路组合允许执行各种功能，例如监视容器的正确位置和交换信号。

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