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    • 4. 发明授权
    • Pixel sensor cell including light shield
    • 像素传感器单元包括遮光罩
    • US09543356B2
    • 2017-01-10
    • US12538194
    • 2009-08-10
    • Jeffrey P. GambinoMark D. JaffeJohn Ellis-MonaghanRichard Rassel
    • Jeffrey P. GambinoMark D. JaffeJohn Ellis-MonaghanRichard Rassel
    • H01L27/148H01L27/146
    • H01L27/14689H01L27/14609H01L27/14623H01L27/1464
    • CMOS image sensor pixel sensor cells, methods for fabricating the pixel sensor cells and design structures for fabricating the pixel sensor cells are designed to allow for back side illumination in global shutter mode by providing light shielding from back side illumination of at least one transistor within the pixel sensor cells. In a first particular generalized embodiment, a light shielding layer is located and formed interposed between a first semiconductor layer that includes a photoactive region and a second semiconductor layer that includes the at least a second transistor, or a floating diffusion, that is shielded by the light blocking layer. In a second generalized embodiment, a thin film transistor and a metal-insulator-metal capacitor are used in place of a floating diffusion, and located shielded in a dielectric isolated metallization stack over a carrier substrate.
    • CMOS图像传感器像素传感器单元,用于制造像素传感器单元的方法和用于制造像素传感器单元的设计结构被设计成允许在全局快门模式中进行背面照明,通过提供来自至少一个晶体管的背侧照明的光屏蔽 像素传感器单元。 在第一特定广义实施例中,遮光层位于包括光活性区的第一半导体层和包括至少第二晶体管的第二半导体层之间并形成,或者浮置扩散部被屏蔽 遮光层。 在第二广义实施例中,使用薄膜晶体管和金属 - 绝缘体 - 金属电容器来代替浮动扩散,并且被定位在载体衬底上的介电隔离金属化堆叠中。
    • 7. 发明授权
    • Damascene copper wiring optical image sensor
    • 大马士革铜线接线光学图像传感器
    • US07655495B2
    • 2010-02-02
    • US11623977
    • 2007-01-17
    • James W. AdkissonJeffrey P. GambinoMark D. JaffeRobert K. LeidyAnthony K. Stamper
    • James W. AdkissonJeffrey P. GambinoMark D. JaffeRobert K. LeidyAnthony K. Stamper
    • H01L21/00
    • H01L27/14685H01L21/76819H01L21/76834H01L21/76838H01L27/14621H01L27/14627H01L27/14636H01L27/14687
    • A CMOS image sensor array and method of fabrication wherein the sensor includes Copper (Cu) metallization levels allowing for incorporation of a thinner interlevel dielectric stack with improved thickness uniformity to result in a pixel array exhibiting increased light sensitivity. In the sensor array, each Cu metallization level includes a Cu metal wire structure formed at locations between each array pixel and, a barrier material layer is formed on top each Cu metal wire structure that traverses the pixel optical path. By implementing a single mask or self-aligned mask methodology, a single etch is conducted to completely remove the interlevel dielectric and barrier layers that traverse the optical path. The etched opening is then refilled with dielectric material. Prior to depositing the refill dielectric, a layer of either reflective or absorptive material is formed along the sidewalls of the etched opening to improve sensitivity of the pixels by either reflecting light to the underlying photodiode or by eliminating light reflections.
    • CMOS图像传感器阵列和制造方法,其中传感器包括铜(Cu)金属化水平,允许结合更薄的层间电介质叠层,具有改进的厚度均匀性,以产生呈现增加的光敏度的像素阵列。 在传感器阵列中,每个Cu金属化层包括在每个阵列像素之间的位置处形成的Cu金属线结构,并且阻挡材料层形成在穿过像素光路的每个Cu金属线结构上。 通过实现单掩模或自对准掩模方法,进行单次蚀刻以完全去除穿过光路的层间电介质层和阻挡层。 然后将蚀刻的开口用电介质材料重新填充。 在沉积再充填电介质之前,沿蚀刻开口的侧壁形成反射或吸收材料层,以通过将光反射到下面的光电二极管或通过消除光反射来提高像素的灵敏度。