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    • 4. 发明授权
    • Microbolometer IR focal plane array (FPA) with in-situ mirco vacuum sensor and method of fabrication
    • 微量热计红外焦平面阵列(FPA),具有原位微型真空传感器及其制造方法
    • US07385199B2
    • 2008-06-10
    • US11162849
    • 2005-09-26
    • Roger E. DeWamesJames R. Waldrop
    • Roger E. DeWamesJames R. Waldrop
    • G01J5/02
    • G01J5/20G01L21/12
    • A microbolometer IR FPA is provided with in-situ vacuum sensing capability by realizing that the IR sensor microbolometer pixel element itself may be used as a vacuum sensor. The application of an electrical signal to the resistive element heats the bolometer material thereby producing a variable resistance related to vacuum level. The degree of variability for a given material depends on the efficiency of heat transfer from the material to the surrounding environment. In a good vacuum, heat transfer is poor, and thus heat will be retained in the material to produce a relatively large temperature increase and the resistance variability will be large. In a poor vacuum, heat is readily transferred to the environment and the temperature rise will be relatively small and thus resistance variability will be small. Consequently, the variable resistance magnitude can be readout to determine the vacuum level.
    • 通过实现红外传感器微测辐射计像素元件本身可以用作真空传感器,微量热计IR FPA具有原位真空感测能力。 将电信号施加到电阻元件加热测辐射热量计材料,从而产生与真空水平相关的可变电阻。 给定材料的变异程度取决于从材料到周围环境的热传递效率。 在良好的真空中,传热差,因此热量将保留在材料中以产生相对较大的温度升高,并且电阻变化性将变大。 在真空度较差的情况下,热量容易转移到环境中,并且温度上升将相对较小,因此电阻变化性将变小。 因此,可读出可变电阻幅值以确定真空度。