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1. 发明授权

US08707754B2 Methods and apparatus for calibrating flow controllers in substrate processing systems 有权
标题翻译：校准基板处理系统中流量控制器的方法和装置
公开(公告)号：US08707754B2
公开(公告)日：2014-04-29
申请号：US12915345
申请日：2010-10-29
申请人： James P. Cruse , John W. Lane , Mariusch Gregor , Duc Buckius , Berrin Daran , Corie Lynn Cobb , Ming Xu , Andrew Nguyen
发明人： James P. Cruse , John W. Lane , Mariusch Gregor , Duc Buckius , Berrin Daran , Corie Lynn Cobb , Ming Xu , Andrew Nguyen
IPC分类号： G01F25/00 , H01L21/66 , F16K37/00 , H01L21/67 , H01L21/306 , H01L21/36
CPC分类号： H01L21/67253 , F16K37/00 , F16K37/0091 , G01F25/00 , Y10T29/53022 , Y10T137/8158 , Y10T137/87153 , Y10T137/87684 , Y10T137/877
摘要： Methods and apparatus for calibrating a plurality of gas flows in a substrate processing system are provided herein. In some embodiments, a substrate processing system may include a cluster tool comprising a first process chamber and a second process chamber coupled to a central vacuum transfer chamber; a first flow controller to provide a process gas to the first process chamber; a second flow controller to provide the process gas to the second process chamber; a mass flow verifier to verify a flow rate from each of the first and second flow controllers; a first conduit to selectively couple the first flow controller to the mass flow verifier; and a second conduit to selectively couple the second flow controller to the mass flow verifier.
摘要翻译：本文提供了用于校准衬底处理系统中的多个气流的方法和装置。在一些实施例中，衬底处理系统可以包括簇工具，其包括耦合到中心真空传送室的第一处理室和第二处理室; 第一流量控制器，用于向第一处理室提供处理气体; 第二流量控制器，用于向第二处理室提供处理气体; 质量流量验证器，用于验证来自所述第一和第二流量控制器中的每一个的流量; 用于选择性地将第一流量控制器耦合到质量流量验证器的第一导管; 以及用于选择性地将第二流量控制器耦合到质量流量验证器的第二导管。

2. 发明授权

US08905074B2 Apparatus for controlling gas distribution using orifice ratio conductance control 有权
标题翻译：使用孔径比电导控制来控制气体分布的装置
公开(公告)号：US08905074B2
公开(公告)日：2014-12-09
申请号：US13091827
申请日：2011-04-21
申请人： Corie Lynn Cobb , Ming Xu
发明人： Corie Lynn Cobb , Ming Xu
IPC分类号： F17D3/00 , F16K51/02
CPC分类号： F16K51/02 , Y10T137/6851 , Y10T137/87306 , Y10T137/87885
摘要： Apparatus for controlling gas distribution are provided. In some embodiments, apparatus for controlling gas distribution may include a first flow path from an inlet to a first outlet; a plurality of first orifices disposed within the first flow path; a plurality of first valves that control gas flow through the plurality of first orifices to control a total gas flow at the first outlet; a second flow path from the inlet to a second outlet; a plurality of second orifices disposed along the second flow path; a plurality of second valves that control gas flow through respective ones of the plurality of second orifices to control a total gas flow at the second outlet; and a mounting block having the plurality of first valves and second valves coupled thereto, wherein at least a portion of the first flow path and the second flow path is disposed within the mounting block.
摘要翻译：提供了用于控制气体分布的装置。在一些实施例中，用于控制气体分配的装置可以包括从入口到第一出口的第一流动路径; 设置在第一流路内的多个第一孔; 多个第一阀，其控制通过所述多个第一孔的气体流，以控制在所述第一出口处的总气流; 从入口到第二出口的第二流动路径; 沿所述第二流路布置的多个第二孔; 多个第二阀，其控制通过所述多个第二孔中的相应孔的气体流动，以控制在所述第二出口处的总气流; 以及安装块，其具有联接到其上的多个第一阀和第二阀，其中第一流动路径和第二流动路径的至少一部分设置在安装块内。

3. 发明申请

US20130206062A1 Micro-Extrusion Printhead With Offset Orifices For Generating Gridlines On Non-Square Substrates 有权
标题翻译：具有偏移孔的微型挤出打印头用于在非方形基板上生成网格线
公开(公告)号：US20130206062A1
公开(公告)日：2013-08-15
申请号：US13371348
申请日：2012-02-10
申请人： Corie Lynn Cobb , Scott E. Solberg
发明人： Corie Lynn Cobb , Scott E. Solberg
IPC分类号： H01L31/18 , B05C11/00
CPC分类号： B41J2/005 , B29C47/025 , B29C47/0816 , B29C47/30 , B29C47/70 , B29C47/92 , B29C2947/926 , H01L31/022433 , H01L31/188 , Y02E10/50
摘要： A solar cell extrusion printing system that uses a micro-extrusion printhead to print longer central gridlines and one or more pairs of shorter “side” gridlines such that end points of the gridline sets form step patterns on an octagonal (pseudo-square) substrate. The printhead includes a set of central nozzles that receive ink from a first valve by way of a first flow channel to print the longer central gridlines, and additional sets of side nozzles that receive ink from additional valves by way of additional flow channels to print the shorter “side” gridlines. The central nozzles have outlet orifices that offset in the process direction from side outlet orifices of the side nozzles. A start signal is simultaneously sent to the valves such that ink is substantially simultaneously extruded through both the central and side orifices, whereby the extruded ink produces gridline endpoints having the desired step pattern.
摘要翻译：一种太阳能电池挤出印刷系统，其使用微型挤出打印头来打印更长的中心网格线和一对或多对较短的“侧面”网格线，使得网格线集合的端点在八边形（伪正方形）基板上形成台阶图案。打印头包括一组中央喷嘴，其通过第一流动通道从第一阀门接收油墨以打印较长的中心网格线，以及附加的一组侧喷嘴，其通过额外的流动通道从附加的阀接收墨水以打印较短的“侧”网格线。中心喷嘴具有从侧喷嘴的侧出口孔沿过程方向偏移的出口孔。启动信号同时发送到阀，使得油墨基本上同时挤出通过中心孔和侧孔，由此挤出的油墨产生具有所需步骤图案的网格线端点。

4. 发明申请

US20130206220A1 Method For Generating Gridlines On Non-Square Substrates 审中-公开
标题翻译：在非正方形基板上生成网格线的方法
公开(公告)号：US20130206220A1
公开(公告)日：2013-08-15
申请号：US13371358
申请日：2012-02-10
申请人： Corie Lynn Cobb , Scott E. Solberg
发明人： Corie Lynn Cobb , Scott E. Solberg
IPC分类号： H01L31/0224 , H01L31/18
CPC分类号： H01L31/1888 , H01L31/022433 , Y02E10/50
摘要： A solar cell production method involves printing longer central gridlines and one or more pairs of shorter “side” gridlines such that end points of the two gridline sets form step patterns on octagonal (pseudo-square) substrates. A special printhead is used that includes a set of central nozzles which receive ink from a first valve by way of a first flow channel to print the longer central gridlines, and additional sets of side nozzles that receive ink from additional valves by way of additional flow channels to print the shorter “side” gridlines. The central nozzles have outlet orifices that offset in the process direction from side outlet orifices of the side nozzles. A start signal is simultaneously sent to the valves such that ink is substantially simultaneously extruded through both the central and side orifices, whereby the extruded ink produces gridline endpoints having the desired step pattern.
摘要翻译：太阳能电池的制造方法包括打印较长的中心网格线和一对或多对较短的“侧面”网格线，使得两个网格线组的端点在八边形（伪正方形）基板上形成阶梯图案。使用特殊的打印头，其包括一组中央喷嘴，其通过第一流动通道从第一阀接收墨水以打印较长的中心网格线，以及附加组的侧喷嘴，其通过额外的流动从附加阀接收墨水通道打印较短的“侧”网格线。中心喷嘴具有从侧喷嘴的侧出口孔沿过程方向偏移的出口孔。启动信号同时发送到阀，使得油墨基本上同时挤出通过中心孔和侧孔，由此挤出的油墨产生具有所需步骤图案的网格线端点。

5. 发明授权

US08875653B2 Micro-extrusion printhead with offset orifices for generating gridlines on non-square substrates 有权
标题翻译：具有偏移孔的微挤压打印头，用于在非方形基板上产生网格线
公开(公告)号：US08875653B2
公开(公告)日：2014-11-04
申请号：US13371348
申请日：2012-02-10
申请人： Corie Lynn Cobb , Scott E. Solberg
发明人： Corie Lynn Cobb , Scott E. Solberg
IPC分类号： B05C11/00 , B05B7/06 , B05C3/02 , B05D5/12 , B05D5/00 , A21C3/00 , B29C45/00
CPC分类号： B41J2/005 , B29C47/025 , B29C47/0816 , B29C47/30 , B29C47/70 , B29C47/92 , B29C2947/926 , H01L31/022433 , H01L31/188 , Y02E10/50
摘要： A solar cell extrusion printing system that uses a micro-extrusion printhead to print longer central gridlines and one or more pairs of shorter “side” gridlines such that end points of the gridline sets form step patterns on an octagonal (pseudo-square) substrate. The printhead includes a set of central nozzles that receive ink from a first valve by way of a first flow channel to print the longer central gridlines, and additional sets of side nozzles that receive ink from additional valves by way of additional flow channels to print the shorter “side” gridlines. The central nozzles have outlet orifices that offset in the process direction from side outlet orifices of the side nozzles. A start signal is simultaneously sent to the valves such that ink is substantially simultaneously extruded through both the central and side orifices, whereby the extruded ink produces gridline endpoints having the desired step pattern.
摘要翻译：一种太阳能电池挤出印刷系统，其使用微型挤出打印头来打印更长的中心网格线和一对或多对较短的“侧面”网格线，使得网格线集合的端点在八边形（伪正方形）基板上形成台阶图案。打印头包括一组中央喷嘴，其通过第一流动通道从第一阀门接收油墨以打印较长的中心网格线，以及附加的一组侧喷嘴，其通过额外的流动通道从附加的阀接收墨水以打印较短的“侧”网格线。中心喷嘴具有从侧喷嘴的侧出口孔沿过程方向偏移的出口孔。启动信号同时发送到阀，使得油墨基本上同时挤出通过中心孔和侧孔，由此挤出的油墨产生具有所需步骤图案的网格线端点。

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