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1. 发明授权

US06868209B2 Method for fabricating chirped fiber Bragg gratings 有权
标题翻译：用于制造啁啾光纤布喇格光栅的方法
公开(公告)号：US06868209B2
公开(公告)日：2005-03-15
申请号：US10369262
申请日：2003-02-19
申请人： James Owen Unruh
发明人： James Owen Unruh
IPC分类号： G02B6/02 , G03F1/34 , G03F7/00 , G02B6/34
CPC分类号： G02B6/02085 , G02B6/02138 , G03F1/34 , G03F7/0005
摘要： A chirped Bragg grating is fabricated in an optical fiber by exposing the fiber to a coherent beam of light through a parallel phase mask having a series of progressively chirped segments produced on a lithography tool. The chirped phase mask is fabricated by exposing a photoresist-coated substrate to an image writing element such as an electron beam or a laser according to a set of parameters provided to the lithography tool. The parameters include a basic grating pattern for each segment, a value that defines the expansion or contraction of the grating pattern and an axis location to which the grating pattern is to be written to the substrate. By selecting machine commands that implement these parameters with a minimum throughput overhead, the mask can be produced in a reduced time, and therefore with increased accuracy.
摘要翻译：通过在光刻工具上产生的具有一系列逐渐啁啾线段的平行相位掩模将光纤暴露于相干光束，在光纤中制造啁啾布拉格光栅。通过根据提供给光刻工具的一组参数将光致抗蚀剂涂覆的基板暴露于诸如电子束或激光器的图像写入元件来制造啁啾相位掩模。参数包括每个段的基本光栅图案，限定光栅图案的扩展或收缩的值以及将光栅图案写入基板的轴位置。通过选择以最小吞吐量开销来实现这些参数的机器命令，可以在减少的时间内产生掩模，因此可以提高精度。

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