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1. 发明授权

US4803644A Alignment mark detector for electron beam lithography 失效
标题翻译：用于电子束光刻的对准标记检测器
公开(公告)号：US4803644A
公开(公告)日：1989-02-07
申请号：US778572
申请日：1985-09-20
申请人： James F. Frazier , Oberdan W. Otto , John Pasiecznik, Jr.
发明人： James F. Frazier , Oberdan W. Otto , John Pasiecznik, Jr.
IPC分类号： H01J37/304 , G01B15/00 , G01N23/00
CPC分类号： H01J37/3045
摘要： A hardware system is disclosed for detecting alignment marks on a substrate in connection with electron beam lithography. The system is considerably faster than prior software approaches. A scanning signal derived from backscattered electrons as the beam scans the substrate is stored and updated in a set of shift registers as scanning proceeds. The signals in the scanning shift registers are compared with a predetermined reference signal, corresponding to the expected scanning signal when the beam traverses an edge of an alignment mark, stored in another set of shift registers. A correlation is obtained between the scanning and reference signals by multiplying the values of the corresponding cells in the scanning and reference registers, and accumulating and weighting the result. The locations of the maximum positive and negative correlations, and hence the locations of the opposed edges of the alignment mark, are obtained by means of a timing mechanism coordinated with the scanning.
摘要翻译：公开了用于检测与电子束光刻有关的衬底上的对准标记的硬件系统。该系统比以前的软件方法快得多。随着扫描进行，随着扫描基板的反向散射电子的扫描信号被存储并更新在一组移位寄存器中。当存储在另一组移位寄存器中时，将扫描移位寄存器中的信号与预定的参考信号进行比较，该参考信号对应于期望的扫描信号，当波束穿过对准标记的边缘时。通过将扫描和参考寄存器中的相应单元格的值相乘，并对结果进行累积和加权，在扫描和参考信号之间获得相关性。通过与扫描协调的定时机制来获得最大正和负相关的位置以及因此对准标记的相对边缘的位置。

2. 发明授权

US4058745A Controlled gap surface acoustic wave device 失效
标题翻译：可控隙隙声表面波装置
公开(公告)号：US4058745A
公开(公告)日：1977-11-15
申请号：US702570
申请日：1976-07-06
申请人： Oberdan W. Otto
发明人： Oberdan W. Otto
IPC分类号： G10K11/36 , H03F13/00 , H01L41/04
CPC分类号： H03F13/00 , G10K11/36 , G01N2291/02491
摘要： A surface acoustic wave device for use as an amplifier or convolver, or the like, and incorporating a plurality of parallel, spaced rails disposed between and separating a semiconductor slab and a surface acoustic wave propagating planar surface of a piezoelectric substrate a relatively small but finite distance apart, the rails having longitudinal axes aligned with the propagation beam path by and between a pair of spaced electro-acoustic transducers disposed on the substrate.
摘要翻译：一种用作放大器或卷积器等的表面声波装置，并且包括设置在压电基板的半导体板和表面声波传播平面之间并分离的多个平行的间隔的轨道，其相对较小但有限距离分开，轨道具有与设置在基板上的一对隔开的电声换能器之间和之间的传播路径对准的纵向轴线。

3. 发明授权

US3999147A Temperature stable surface acoustic wave and oscillator using the device 失效
标题翻译：温度稳定的表面声波和使用振荡器的器件
公开(公告)号：US3999147A
公开(公告)日：1976-12-21
申请号：US627801
申请日：1975-10-31
申请人： Oberdan W. Otto , Rolf D. Weglein
发明人： Oberdan W. Otto , Rolf D. Weglein
IPC分类号： H03B5/04 , H03B5/32 , H03H3/10 , H03H9/02 , H03H9/42 , H03H9/20 , H03H9/26
CPC分类号： H03H9/02834 , H03B5/32 , H03H3/10 , H03H9/42 , H03B2200/0018 , H03B5/04
摘要： A temperature stable surface acoustic wave device utilizing reflective gratings in a material such as Y-cut quartz having two propagation directions in which the temperature coefficients of delay are of opposite sign, the gratings reflecting the Rayleigh waves in the two propagation directions along suitable path lengths to provide a total linear zero temperature coefficient of delay. A temperature stable oscillator is formed by providing an amplifier in a feedback path from the output transducer to the input transducer of the surface acoustic wave device.
摘要翻译：一种使用诸如具有两个传播方向的Y切割石英材料的反射光栅的温度稳定的表面声波装置，其中延迟的温度系数具有相反的符号，沿着合适的路径长度在两个传播方向上反射瑞利波的光栅提供总线性零温度延迟系数。通过在从输出变换器到声表面波装置的输入变换器的反馈路径中设置放大器来形成温度稳定振荡器。

4. 发明授权

US06924899B2 System for measuring wavefront tilt in optical systems and method of calibrating wavefront sensors 有权
标题翻译：用于测量光学系统中的波前倾斜的系统和校准波前传感器的方法
公开(公告)号：US06924899B2
公开(公告)日：2005-08-02
申请号：US10158974
申请日：2002-05-31
申请人： Richard A. Hutchin , Oberdan W. Otto
发明人： Richard A. Hutchin , Oberdan W. Otto
IPC分类号： G01J9/00 , G01B9/02
CPC分类号： G01J9/00
摘要： A wavefront tilt measurement system for measuring the wavefront tilt of light passing through transmitting or receiving optical systems, the optical systems including a primary aperture and internal optical elements defining an optical system focal plane. A light source emits light at the optical system focal plane towards the internal optical elements such that light from the light source emerges from the primary aperture. A plurality of tilt sensors are disposed adjacent to the primary aperture to receive light emerging from the primary aperture. Each tilt sensor includes a sensor focal plane and a plurality of detector elements. Each tilt sensor generates at the focal plane a plurality of overlapping regions of zero and first order images of light emerging from the primary aperture. The measured intensity of light in the overlapping regions is used to determine the wavefront tilt of light emerging from the primary aperture.
摘要翻译：一种用于测量通过发射或接收光学系统的光的波前倾斜的波前倾斜测量系统，所述光学系统包括初级孔径和限定光学系统焦平面的内部光学元件。光源在光学系统焦平面朝向内部光学元件发射光，使得来自光源的光从主孔出射。多个倾斜传感器被布置成邻近主孔径以接收从主孔径出射的光。每个倾斜传感器包括传感器焦平面和多个检测器元件。每个倾斜传感器在焦平面处产生从主孔出射的光的零和一阶图像的多个重叠区域。重叠区域中测量的光强度用于确定从主孔径出射的光的波前倾斜。

5. 发明授权

US4110714A Surface acoustic wave filter 失效
标题翻译：表面声波滤波器
公开(公告)号：US4110714A
公开(公告)日：1978-08-29
申请号：US756929
申请日：1977-01-05
申请人： Oberdan W. Otto
发明人： Oberdan W. Otto
IPC分类号： H03H9/02 , H03H9/64 , H03H9/26 , H03H9/04 , H03H9/30 , H03H9/32
CPC分类号： H03H9/6489 , H03H9/02716 , H03H9/02881
摘要： A surface acoustic wave device wherein a reflective array is disposed on a surface of material capable of supporting propagating surface acoustic wave energy, the array including a plurality of spaced, parallel elements having longitudinal axes angularly oriented with respect to the direction of a beam path of propagating straight crested phase fronts, the device also including matching structures disposed adjacent the leading and trailing ends of the elements for converting the normal mode, straight crested phase front outside the reflective array region to the normal mode, sawtoothed shaped, phase front within the reflective array region, and the reverse thereof, and thereby avoid diffractive effects at the entry and exit points of the reflective array.
摘要翻译：一种表面声波装置，其中反射阵列设置在能够支撑传播的声波能量的材料的表面上，该阵列包括多个间隔开的平行元件，其具有相对于光束路径的方向成角度定向的纵向轴线传播直的峰顶相位，该装置还包括邻近元件的前端和后端设置的匹配结构，用于将反射阵列区域外的正常模式，直的顶峰相位前沿转换成正常模式，在反射器内形成锯齿状的相位前沿阵列区域和反向，从而避免在反射阵列的入射点和出射点的衍射效应。

6. 发明授权

US06580509B1 High speed high resolution hyperspectral sensor 有权
标题翻译：高速高分辨率高光谱传感器
公开(公告)号：US06580509B1
公开(公告)日：2003-06-17
申请号：US09556660
申请日：2000-04-24
申请人： Richard A. Hutchin , Oberdan W. Otto
发明人： Richard A. Hutchin , Oberdan W. Otto
IPC分类号： G01B902
CPC分类号： G01J3/453 , G01J3/2823
摘要： A high speed high resolution spectral sensor is formed by placing a cascade of chained wide field-of-view Mach-Zender interferometers inside a dispersive sensor between the sensor's grating and the focusing lens. Also is disclosed an optical filter with wide field-of-view capabilities. Such a filter is formed by inserting a plurality of gap plates of certain thicknesses and refractive indices. The invention provides formulas for calculation of optimal dimensions for such gap plates.
摘要翻译：通过在传感器光栅和聚焦透镜之间的色散传感器内放置一连串的宽视场Mach-Zender干涉仪级联来形成高速高分辨率光谱传感器。还公开了一种具有宽视野能力的滤光器。这种过滤器是通过插入多个具有某些厚度和折射率的间隙板而形成的。本发明提供了用于计算这种间隙板的最佳尺寸的公式。

7. 发明授权

US4017813A Surface acoustic wave notch filter 失效
标题翻译：表面声波陷波滤波器
公开(公告)号：US4017813A
公开(公告)日：1977-04-12
申请号：US673322
申请日：1976-04-05
申请人： Oberdan W. Otto
发明人： Oberdan W. Otto
IPC分类号： H03H9/64 , H03H9/26 , H01L41/04 , H03H9/30
CPC分类号： H03H9/6409 , H03H9/643
摘要： A surface acoustic wave device including a synchronous reflection array disposed in a delay line between the input and output transducers, the synchronous reflection array having a synchronous reflection frequency that distorts the beam profile of propagating surface acoustic wave energy in the delay line so that when the beam profile is amplitude averaged at the output transducer, the transducer output signal has a relatively deep notch in amplitude at the synchronous reflection frequency.
摘要翻译：一种表面声波装置，包括设置在输入和输出换能器之间的延迟线中的同步反射阵列，所述同步反射阵列具有使延迟线中的传播表面声波能量的波束轮廓变形的同步反射频率，使得当光束轮廓在输出传感器处的幅度平均，传感器输出信号在同步反射频率处具有相对较深的振幅陷波。

8. 发明授权

US3931509A Apparatus for obtaining the convolution and/or correlation of signals utilizing acoustic waves 失效
标题翻译：用于获得使用声波的信号的卷积和/或相关性的装置
公开(公告)号：US3931509A
公开(公告)日：1976-01-06
申请号：US449948
申请日：1974-03-11
申请人： Oberdan W. Otto
发明人： Oberdan W. Otto
IPC分类号： G06G7/195 , G06G7/19 , H03H7/30
CPC分类号： G06G7/195
摘要： Signal processing apparatus wherein true correlation or convolution of signals is obtained by a third order nonlinear parametric acoustic wave interaction in a piezoelectric medium.
摘要翻译：信号处理装置，其中通过压电介质中的三阶非线性参数声波相互作用获得信号的真实相关或卷积。

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