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    • 5. 发明申请
    • Low pH development solutions for chemically amplified photoresists
    • 用于化学放大光致抗蚀剂的低pH开发解决方案
    • US20050208429A1
    • 2005-09-22
    • US11133077
    • 2005-05-19
    • James DeYoungJames McClain
    • James DeYoungJames McClain
    • G03F20060101G03F7/00G03F7/32G03F7/36
    • G03F7/36G03F7/32G03F7/325G03F7/327
    • A method for carrying out positive tone lithography with a carbon dioxide development system is carried out by: (a) providing a substrate, the substrate having a polymer resist layer formed thereon, (b) exposing at least one portion of the polymer resist layer to radiant energy causing a chemical shift to take place in the exposed portion and thereby form at least one light field region in the polymer resist layer while concurrently maintaining at least one portion of the polymer layer unexposed to the radiant energy to thereby form at least one dark field region in the polymer resist layer; (c) optionally baking the polymer resist layer; (d) contacting the polymer resist layer to a carbon dioxide solvent system, the solvent system comprising a polar group, under conditions in which the at least one light field region is preferentially removed from the substrate by the carbon dioxide solvent system as compared to the at least one dark field region; wherein the carbon dioxide solvent system comprises a first phase and a second phase, the first phase comprising carbon dioxide and the second phase comprising a polar fluid, with the at least one light field region being preferentially soluble in the polar fluid as compared to the at least one dark field region.
    • 通过以下方式进行用二氧化碳显影系统进行正色调光刻的方法:(a)提供衬底,其上形成有聚合物抗蚀剂层的衬底,(b)将至少一部分聚合物抗蚀剂层暴露于 导致在暴露部分发生化学位移的辐射能,从而在聚合物抗蚀剂层中形成至少一个光场区域,同时保持聚合物层的至少一部分未暴露于辐射能,从而形成至少一个黑暗 聚合物抗蚀剂层中的场区域; (c)任选地烘烤聚合物抗蚀剂层; (d)将所述聚合物抗蚀剂层与二氧化碳溶剂体系接触,所述溶剂体系包含极性基团,其中所述至少一个光场区域优选地通过二氧化碳溶剂系统从所述底物除去, 至少一个暗场区域; 其中所述二氧化碳溶剂系统包括第一相和第二相,所述第一相包含二氧化碳,所述第二相包含极性流体,其中所述至少一个光场区域优先溶于极性流体中,与第 至少一个暗场区域。
    • 9. 发明授权
    • Polymer films for medical device coating
    • 用于医疗器械涂层的聚合物膜
    • US08900651B2
    • 2014-12-02
    • US12601101
    • 2008-12-04
    • James McClainDouglas Taylor
    • James McClainDouglas Taylor
    • B05D1/06B05D3/02B05D1/12B05D1/02A61L27/34A61L31/10B05D1/04B05D5/08
    • B05D1/025A61L27/34A61L31/10A61L2420/02B05D1/04B05D5/08B05D5/083B05D2401/90
    • A method for depositing a coating comprising a polymer and impermeable dispersed solid on a substrate, comprising the following steps: discharging at least one impermeable dispersed solid in dry powder form through a first orifice; discharging at least one polymer in dry powder form through a second orifice; depositing the polymer and/or impermeable dispersed solid particles onto said substrate, wherein an electrical potential is maintained between the substrate and the impermeable dispersed solid and/or polymer particles, thereby forming said coating; and sintering said coating under conditions that do not disrupt the activity and/or function of the substrate. A similar method is provided for depositing a coating comprising a hydrophobic polymer and a water-vapor-trapping material on a substrate.
    • 一种用于将包含聚合物和不渗透分散固体的涂层沉积在基材上的方法,包括以下步骤:通过第一孔排出至少一种干燥粉末形式的不可渗透的分散固体; 通过第二孔排出至少一种干粉形式的聚合物; 将聚合物和/或不可渗透的分散的固体颗粒沉积到所述基底上,其中在基底和不可渗透的分散的固体和/或聚合物颗粒之间保持电势,由此形成所述涂层; 并且在不破坏衬底的活性和/或功能的条件下烧结所述涂层。 提供了一种类似的方法,用于在衬底上沉积包含疏水性聚合物和水蒸汽捕获材料的涂层。
    • 10. 发明申请
    • Polymer Films for Medical Device Coating
    • 医疗器械涂层用聚合物膜
    • US20100228348A1
    • 2010-09-09
    • US12601101
    • 2008-05-23
    • James McClainDouglas Taylor
    • James McClainDouglas Taylor
    • A61F2/02B05D3/00
    • B05D1/025A61L27/34A61L31/10A61L2420/02B05D1/04B05D5/08B05D5/083B05D2401/90
    • A method for depositing a coating comprising a polymer and impermeable dispersed solid on a substrate, comprising the following steps: discharging at least one impermeable dispersed solid in dry powder form through a first orifice; discharging at least one polymer in dry powder form through a second orifice; depositing the polymer and/or impermeable dispersed solid particles onto said substrate, wherein an electrical potential is maintained between the substrate and the impermeable dispersed solid and/or polymer particles, thereby forming said coating; and sintering said coating under conditions that do not disrupt the activity and/or function of the substrate. A similar method is provided for depositing a coating comprising a hydrophobic polymer and a water-vapor-trapping material on a substrate.
    • 一种用于将包含聚合物和不渗透分散固体的涂层沉积在基材上的方法,包括以下步骤:通过第一孔排出至少一种干燥粉末形式的不可渗透的分散固体; 通过第二孔排出至少一种干粉形式的聚合物; 将聚合物和/或不可渗透的分散的固体颗粒沉积到所述基底上,其中在基底和不可渗透的分散的固体和/或聚合物颗粒之间保持电势,由此形成所述涂层; 并且在不破坏衬底的活性和/或功能的条件下烧结所述涂层。 提供了一种类似的方法,用于在衬底上沉积包含疏水性聚合物和水蒸汽捕获材料的涂层。