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1. 发明授权

US06782900B2 Methods and apparatus for cleaning and/or treating a substrate using CO2 失效
标题翻译：使用二氧化碳清洗和/或处理底物的方法和设备
公开(公告)号：US06782900B2
公开(公告)日：2004-08-31
申请号：US09951353
申请日：2001-09-13
申请人： James DeYoung , James B. McClain , Michael E. Cole , Steven Lee Worm , David Brainard
发明人： James DeYoung , James B. McClain , Michael E. Cole , Steven Lee Worm , David Brainard
IPC分类号： B08B300
CPC分类号： C23G5/00 , B08B7/0021 , B81C1/00841 , B81C2201/117 , H01L21/02063 , H01L21/67051 , Y10S134/902
摘要： An apparatus for cleaning a microelectronic substrate includes a pressure chamber, a supply of a process liquid including dense phase CO2 fluidly connected to the chamber and a distilling system. Distilling system includes a still fluidly connected to the chamber and operative to separate CO2 from the process fluid. The distilling system is operative to re-introduce the separated CO2 into the chamber or a further chamber.
摘要翻译：用于清洁微电子衬底的装置包括压力室，包括流体连接到室的致密相CO 2的处理液的供应和蒸馏系统。蒸馏系统包括仍然流体连接到室并且用于将CO 2与工艺流体分离。蒸馏系统可操作以将分离的CO 2重新引入室或另外的室中。

2. 发明授权

US06706641B2 Spray member and method for using the same 失效
标题翻译：喷涂部件及其使用方法
公开(公告)号：US06706641B2
公开(公告)日：2004-03-16
申请号：US09951352
申请日：2001-09-13
申请人： Steven Lee Worm , Michael E. Cole
发明人： Steven Lee Worm , Michael E. Cole
IPC分类号： H01L21302
CPC分类号： H01L21/67051
摘要： A process chamber assembly for use with a substrate and a flow of process fluid includes a vessel and a spray member. The vessel defines a chamber. The spray member includes at least one spray port formed therein adapted to distribute the flow of process fluid onto the substrate in the chamber. The spray member is operative to rotate about a rotational axis relative to the vessel responsive to a flow of the process fluid out of the spray member through the at least one spray port.
摘要翻译：用于与衬底和工艺流体流一起使用的处理室组件包括容器和喷射构件。容器限定一个室。喷雾构件包括形成在其中的至少一个喷雾口，其适于将工艺流体流分配到腔室中的基底上。喷雾构件可操作以响应于过程流体通过至少一个喷雾口流出喷射构件而相对于容器围绕旋转轴线旋转。

3. 发明授权

US06730612B2 Spray member and method for using the same 失效
公开(公告)号：US06730612B2
公开(公告)日：2004-05-04
申请号：US10434250
申请日：2003-05-08
申请人： Steven Lee Worm , Michael E. Cole
发明人： Steven Lee Worm , Michael E. Cole
IPC分类号： H01L21302
CPC分类号： H01L21/67051
摘要： A process chamber assembly for use with a substrate and a flow of process fluid includes a vessel and a spray member. The vessel defines a chamber. The spray member includes at least one spray port formed therein adapted to distribute the flow of process fluid onto the substrate in the chamber. The spray member is operative to rotate about a rotational axis relative to the vessel responsive to a flow of the process fluid out of the spray member through the at least one spray port.

4. 发明授权

US06619304B2 Pressure chamber assembly including non-mechanical drive means 失效
标题翻译：压力室组件包括非机械驱动装置
公开(公告)号：US06619304B2
公开(公告)日：2003-09-16
申请号：US09951355
申请日：2001-09-13
申请人： Steven Lee Worm
发明人： Steven Lee Worm
IPC分类号： B08B304
CPC分类号： H01L21/68785 , B08B7/0021 , H01L21/67126 , H01L21/68792
摘要： A pressure chamber assembly for processing a substrate includes a pressure vessel defining an enclosed pressure chamber. A substrate holder is disposed in the pressure chamber and is adapted to hold the substrate. A drive assembly is operable to move the substrate holder. The drive assembly includes a first drive member connected to the substrate holder for movement therewith relative to the pressure vessel and a second drive member fluidly isolated from the first drive member and the pressure chamber. A drive unit is operable to move the second drive member. The drive unit is fluidly isolated from the first drive member and the pressure chamber. The second drive member is non-mechanically coupled to the first drive member such that the drive unit can move the substrate holder via the first and second drive members.
摘要翻译：用于处理衬底的压力室组件包括限定封闭压力室的压力容器。衬底保持器设置在压力室中并且适于保持衬底。驱动组件可操作以移动衬底保持器。驱动组件包括连接到衬底保持器的第一驱动构件，用于相对于压力容器移动，以及与第一驱动构件和压力室流体隔离的第二驱动构件。驱动单元可操作以移动第二驱动构件。驱动单元与第一驱动构件和压力室流体隔离。第二驱动构件非机械地联接到第一驱动构件，使得驱动单元可以经由第一和第二驱动构件移动衬底保持器。

5. 发明授权

US08627596B2 Vegetation treatment 有权
标题翻译：植被治疗
公开(公告)号：US08627596B2
公开(公告)日：2014-01-14
申请号：US12814181
申请日：2010-06-11
申请人： Robby James Howerton , Gina Marie Stewart , Steven Lee Worm , Michael Alan Batalia
发明人： Robby James Howerton , Gina Marie Stewart , Steven Lee Worm , Michael Alan Batalia
IPC分类号： A01M7/00 , A01B41/00 , A01M15/00 , B05C11/00 , B05B13/02 , B05B7/02 , B05B1/28 , B05B15/04 , B05B9/04
CPC分类号： A01G7/02 , A01M21/00 , A01M21/04 , A01N25/00 , Y02A90/40
摘要： A method is provided for inhibiting plant growth by inducing hypothermia by applying a treating substance to summer annual weeds and grasses. Susceptible undesirable plants will be killed by this treatment, while non-susceptible desirable plants will not be adversely affected by this treatment. Compressed carbon dioxide may be applied to other summer grasses to cause the grasses to become dormant. An apparatus is provided for inducing hypothermia in undesirable plants by applying a treating substance. A canister capable of housing gas may be provided. A valve may be provided to control the amount and pressure of gas dispensed from the canister.
摘要翻译：提供了一种通过将处理物质施用于夏季一年生杂草和草地来诱导低体温来抑制植物生长的方法。易受害的不希望的植物将被这种处理杀死，而不敏感的所需植物不会受到这种处理的不利影响。压缩二氧化碳可以施用于其他夏季草，以使草种变得休眠。提供了一种通过施用处理物质来诱导不期望的植物体内的体温降低的装置。可以提供能够容纳气体的罐。可以提供阀以控制从罐排出的气体的量和压力。

6. 发明申请

US20100267558A1 VEGETATION TREATMENT 有权
标题翻译：植被处理
公开(公告)号：US20100267558A1
公开(公告)日：2010-10-21
申请号：US12814181
申请日：2010-06-11
申请人： Robby James Howerton , Gina Marie Stewart , Steven Lee Worm , Michael Alan Batalia
发明人： Robby James Howerton , Gina Marie Stewart , Steven Lee Worm , Michael Alan Batalia
IPC分类号： A01G7/02 , A01N59/16 , A01N63/02 , A01M21/00
CPC分类号： A01G7/02 , A01M21/00 , A01M21/04 , A01N25/00 , Y02A90/40
摘要： A method is provided for inhibiting plant growth by inducing hypothermia by applying a treating substance to summer annual weeds and grasses. Susceptible undesirable plants will be killed by this treatment, while non-susceptible desirable plants will not be adversely affected by this treatment. Compressed carbon dioxide may be applied to other summer grasses to cause the grasses to become dormant. An apparatus is provided for inducing hypothermia in undesirable plants by applying a treating substance. A canister capable of housing gas may be provided. A valve may be provided to control the amount and pressure of gas dispensed from the canister.
摘要翻译：提供了一种通过将处理物质施用于夏季一年生杂草和草地来诱导低体温来抑制植物生长的方法。易受害的不希望的植物将被这种处理杀死，而不敏感的所需植物不会受到这种处理的不利影响。压缩二氧化碳可以施用于其他夏季草，以使草种变得休眠。提供了一种通过施用处理物质来诱导不期望的植物体内的体温降低的装置。可以提供能够容纳气体的罐。可以提供阀以控制从罐排出的气体的量和压力。

7. 发明授权

US06666928B2 Methods and apparatus for holding a substrate in a pressure chamber 有权
公开(公告)号：US06666928B2
公开(公告)日：2003-12-23
申请号：US09951354
申请日：2001-09-13
申请人： Steven Lee Worm
发明人： Steven Lee Worm
IPC分类号： B08B700
CPC分类号： H01L21/67051 , H01L21/6838 , Y10S134/902
摘要： A process chamber assembly for use with a substrate includes a vessel and a substrate holder. The vessel defines a chamber. The substrate holder has a rotational axis and includes front and rear opposed surfaces. The front surface is adapted to support the substrate. At least one impeller vane extends rearwardly from the rear surface and radially with respect to the rotational axis. The impeller vane is operative to generate a pressure differential tending to hold the substrate to the substrate holder when the substrate holder is rotated about the rotational axis. Preferably, the process chamber assembly includes a plurality of the impeller vanes extending rearwardly from the rear surface and radially with respect to the rotational axis.

8. 发明授权

US5952648A Linear operating mechanism for an optical switch 失效
标题翻译：光开关的线性操作机构
公开(公告)号：US5952648A
公开(公告)日：1999-09-14
申请号：US748699
申请日：1996-11-13
申请人： Steven Lee Worm
发明人： Steven Lee Worm
IPC分类号： H01L31/167 , H03K17/968 , G01D5/34
CPC分类号： H03K17/968 , H01L31/167
摘要： A linear operating mechanism for a slotted optical switch 10 which produces a guaranteed OFF-point for a consistent linear displacement of a switch operator 58 with respect to a reference surface 66 of the device enclosure 62. The guaranteed OFF-point is consistently repeatable from one device to another. The device enclosure 62 defines an integrally formed support for receiving an emitter 14 and a receiver 18 of the slotted optical switch 10. The enclosure 62 further defines a fixed Off-plane 114 immediately adjacent the receiver 18 and precisely located with respect to a reference surface 66 on an outside surface of the enclosure 62. The switch operator 58 is received within the optical switch slot and has a distal end 86 extending outside the enclosure 62 a precise distance with respect to the reference surface 66 when the operator is in a normally biased first position. A window 74 defined by the operator at a predetermined position with respect to its distal end 84 determines the normal state of the optical switch 10 and changes that state as the operator 58 is linearly moved to a second position in response to an external force applied to its distal end 86. One edge 78/82 of the window 74 further defines a movable OFF-plane 78/82 located at a precise distance from the distal end 86. The guaranteed OFF-point is obtained when a predetermined linear displacement of the operator 58 with respect to the reference surface 66 permits the movable OFF-plane 78/82 to coincide with the fixed OFF-plane 114 thereby prohibiting light from reaching the receiver 18.
摘要翻译：用于开槽光开关10的线性操作机构，其产生用于开关操作器58相对于装置外壳62的参考表面66的一致的线性位移的保证的OFF点。保证的断点始终可从一个重复设备到另一个装置外壳62限定了用于接收开槽光开关10的发射器14和接收器18的整体形成的支撑件。外壳62还限定紧邻接收器18的固定离散平面114，并相对于基准表面精确定位切换操作器58被接收在光学开关狭槽内，并且当操作者处于正常偏压状态时，开关操作器58具有相对于参考表面66延伸到外壳62外部的远端86。第一名由操作者在相对于其远端84的预定位置处限定的窗口74确定光学开关10的正常状态，并且当操作者58响应于外力施加到线性移动到第二位置时改变该状态其远端86.窗口74的一个边缘78/82进一步限定位于与远端86精确距离的可移动的非平面78/82。当操作者的预定线性位移时，获得保证的关闭点 58相对于参考表面66允许可移动的OFF平面78/82与固定的OFF平面114重合，从而禁止光到达接收器18。

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