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1. 发明授权

US11512407B2 Method and device for laser-assisted electrochemical composite deposition using rifling-type hollow rotating electrode 有权
公开(公告)号：US11512407B2
公开(公告)日：2022-11-29
申请号：US17617005
申请日：2021-07-12
申请人： Jiangsu University
发明人： Zhaoyang Zhang , Yucheng Wu , Kun Xu , Xueren Dai , Shuai Yang , Sheng Guo , Douyan Zhao
IPC分类号： C25D5/18 , C25D5/02 , C25D13/00 , C25D17/12
摘要： The present invention discloses a method and a device for laser-assisted electrochemical composite deposition using a rifling-type hollow rotating electrode, which relate to the field of micro-composite processing in special processing technologies. A center of a laser beam is allowed to pass through a rifling-type hollow rotating electrode and focus onto a cathode substrate. When the rifling-type hollow rotating electrode is rotated at a constant speed, an electrodeposition solution rotates in the rifling-type hollow rotating electrode and generates a certain centripetal force to improve the precision and localization of deposition. During the process of the present invention, an internal rifling structure of the electrode is rotated at a high speed so that the deposition solution generates a centripetal force. The internal rifling structure and an external helical structure of the rifling-type hollow rotating electrode make the deposition solution move upward to form a “self-circulation” system.

2. 发明授权

US11295953B2 Method and apparatus for micromachining semiconductor material from opposing sides through synchronous coordination of laser and electrochemistry 有权
公开(公告)号：US11295953B2
公开(公告)日：2022-04-05
申请号：US17257328
申请日：2019-02-28
申请人： JIANGSU UNIVERSITY
发明人： Hao Zhu , Zhi Zhang , Senshan Mao , Shuaijie Zhu , Zhaoyang Zhang , Kun Xu , Anbin Wang , Douyan Zhao
IPC分类号： H01L21/268 , C23C18/12 , C23C14/08
摘要： An apparatus for micromachining a semiconductor material from opposing sides through synchronous coordination of laser and electrochemistry includes an optical path system, a stable low-pressure jet generation system, and an electrolytic machining system. The optical path system includes a laser generator, a beam expander, a reflector, a galvanometer, and a lens. The electrolytic machining system includes a direct-current pulsed power supply, an adjustable cathode fixture, an electrolyte tank, a current probe, and an oscilloscope. The stable low-pressure jet generation system provides an electrolyte flow into a metal needle. The electrolyte flow forms an electrolyte layer between a semiconductor material and a cathode copper plate, such that the cathode and the anode are in electrical contact with each other. In a method employing the apparatus, a laser beam is irradiated onto the semiconductor material to form a local high-temperature region, which leads to a localized increase in electrical conductivity.

3. 发明授权

US11150211B2 Method for preparing graphene modified composite planar pH sensor 有权
公开(公告)号：US11150211B2
公开(公告)日：2021-10-19
申请号：US15768185
申请日：2016-05-19
申请人： Jiangsu University
发明人： Xiliang Zhang , Kun Xu , Shoujuan Cui , Miaomiao Geng , Pingping Li , Shiqing Zhang
IPC分类号： G01N27/30 , C23C28/00 , C23C14/58 , C23C14/08 , C23C14/18 , C23C14/35
摘要： Provided is a fabrication method for a composite planar pH sensor modified by graphene film including: slotting into substrate, setting copper foil on both sides, and setting leads on the copper foil; coating graphene film on the copper foils using micro mechanical stripping method to form the first graphene film and the second graphene film; depositing Sb layer and Sb2O3 layer successively on the first graphene film by magnetron sputtering method, and coating Nafion™ perfluorinated sulfonic acid membrane on the Sb2O3 layer by spin-coating method to fabricate pH working electrode; depositing Ag layer on the second graphene film and dipping in FeCl3 solution to form AgCl layer; coating the third graphene film on the AgCl layer to fabricate reference electrode. The composite planar pH sensor modified by graphene film may be used in pH measurement for solid, semisolid, mash and solution samples.

4. 发明授权

US10690615B2 Micro-nano textured graphene-based bionic pH sensor and preparation method therefor 有权
公开(公告)号：US10690615B2
公开(公告)日：2020-06-23
申请号：US16078038
申请日：2016-05-27
申请人： JIANGSU UNIVERSITY
发明人： Kun Xu , Xiliang Zhang , Miaomiao Geng , Shoujuan Cui , Pingping Li , Shiqing Zhang
IPC分类号： B82Y15/00 , B82Y5/00 , G01N27/30 , H01L51/00 , B82Y30/00 , G01N27/414 , G01N27/44
摘要： A micro-nano textured graphene-based bionic pH sensor and a preparation method therefor. The micro-nano textured graphene-based bionic pH sensor comprises a substrate (1), a working electrode (4), a reference electrode (5), a copper contact A (6), a copper contact B (7), an inner lead A (8), and an inner lead B (9). A groove A (2) and a groove B (3) are formed in the substrate (1). The working electrode (4) is located in the groove A (2), and the reference electrode (5) is located in the groove B (3). The bottom of the working electrode (4) is connected to the inner lead A (8) by means of the copper contact A (6). The top of the reference electrode (5) is connected to the inner lead B (9) by means of the copper contact B (7). The working electrode (4) comprises a graphene group A (401) and a sensitive electrode material layer (402). The sensitive electrode material layer (402) is located on the upper layer of the graphene group A (401). The reference electrode (5) comprises a graphene group B (501) and a metal material silver layer (502). The metal material silver layer (502) is located on the lower layer of the graphene group B (501). Microgrooves or micro pits are formed in the upper surface of the sensitive electrode material layer (402) and the lower surface of the metal material silver layer (502). The pH sensor can fast adsorb water in soil and a culture medium and then adsorb hydrogen ions, and pH in-situ measurement of the soil, the culture medium and other heterogeneous systems is implemented.

5. 发明授权

US11331737B2 Device for insulating cathode surface in electrochemical machining 有权
公开(公告)号：US11331737B2
公开(公告)日：2022-05-17
申请号：US16467673
申请日：2018-07-06
申请人： JIANGSU UNIVERSITY
发明人： Kun Xu , Wenrong Shen , Zhaoyang Zhang , Hao Zhu , Xueren Dai , Qinming Gu
IPC分类号： B23H3/04 , B23K26/352
摘要： A device for insulating a cathode surface in electrochemical machining is provided. The cathode surface insulation device is characterized in that super-hydrophobic micro-structures are prepared in regions to be insulated on the cathode surface, so as to realize selective insulation of the surface of the tool cathode, and thereby achieve objects of constraining an electrical field in the processing area, reducing stray corrosion and side surface taper, and improving processing efficiency and accuracy.

6. 发明授权

US11306408B2 Device for microelectrodeposition through laser assisted flexible following tool electrode and deposition method using the device thereof 有权
公开(公告)号：US11306408B2
公开(公告)日：2022-04-19
申请号：US17296552
申请日：2020-01-19
申请人： Jiangsu University
发明人： Zhaoyang Zhang , Yucheng Wu , Kun Xu , Xueren Dai , Anbin Wang , Qinming Gu , Hong Wang
IPC分类号： C25D5/02 , C25D5/04 , C25D5/18 , C25D21/06 , C25D21/10
摘要： Disclosed are a device and a method for microelectrodeposition through a laser assisted flexible following tool electrode. Localization of electrodeposition and dimensional precision of members are enhanced by using the flexible following tool electrode to restrict a dispersion region of an electric field and a reaction region of electrodeposition, and a complex-shaped member can be deposited by controlling a motion path of the flexible following tool electrode. Since a laser has a high power density, introducing laser irradiation changes an electrode state in a radiated region, accelerates ion diffusion and electron transfer speeds, and increases a deposition rate, thus reducing defects such as pitting and cracking in a deposit, enhancing deposition quality, and achieving fabrication of a micro-part by a synergistic action of both electrochemical energy and laser energy.

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