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1. 发明授权

US07748944B2 Method and apparatus for semiconductor processing 有权
标题翻译：用于半导体处理的方法和装置
公开(公告)号：US07748944B2
公开(公告)日：2010-07-06
申请号：US11929357
申请日：2007-10-30
申请人： JB Price , Jed Keller , Laurence Dulmage , David Cheng
发明人： JB Price , Jed Keller , Laurence Dulmage , David Cheng
IPC分类号： B65G49/07
CPC分类号： H01L21/67178 , H01L21/67161 , H01L21/67167 , H01L21/67742 , H01L21/67766 , Y10S414/139
摘要： A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.
摘要翻译：公开了一种用于半导体处理的方法和装置。在一个实施例中，一种在群集工具内传送晶片的方法包括将晶片放置在真空封壳的第一段中，真空外壳附接到处理室和工厂接口。使用垂直传送机构将晶片传送到真空外壳的第二部分，其中第二部分在第一部分之上或之下。

2. 发明申请

US20050194096A1 Method and apparatus for semiconductor processing 审中-公开
标题翻译：用于半导体处理的方法和装置
公开(公告)号：US20050194096A1
公开(公告)日：2005-09-08
申请号：US10927703
申请日：2004-08-27
申请人： J.B. Price , Jed Keller , Laurence Dulmage , David Cheng
发明人： J.B. Price , Jed Keller , Laurence Dulmage , David Cheng
IPC分类号： C23F1/00 , H01L20060101 , H01L21/00 , H01L21/677
CPC分类号： H01L21/67178 , H01L21/67161 , H01L21/67167 , H01L21/67742 , H01L21/67766 , Y10S414/139
摘要： A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.
摘要翻译：公开了一种用于半导体处理的方法和装置。在一个实施例中，一种在群集工具内传送晶片的方法包括将晶片放置在真空封壳的第一段中，真空外壳附接到处理室和工厂接口。使用垂直传送机构将晶片传送到真空外壳的第二部分，其中第二部分在第一部分之上或之下。

3. 发明申请

US20080089774A1 A METHOD AND APPARATUS FOR SEMCONDUCTOR PROCESSING 有权
标题翻译：一种用于半导体加工的方法和装置
公开(公告)号：US20080089774A1
公开(公告)日：2008-04-17
申请号：US11929357
申请日：2007-10-30
申请人： J.B. Price , Jed Keller , Laurence Dulmage , David Cheng
发明人： J.B. Price , Jed Keller , Laurence Dulmage , David Cheng
IPC分类号： H01L21/677
CPC分类号： H01L21/67178 , H01L21/67161 , H01L21/67167 , H01L21/67742 , H01L21/67766 , Y10S414/139
摘要： A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.
摘要翻译：公开了一种用于半导体处理的方法和装置。在一个实施例中，一种在群集工具内传送晶片的方法包括将晶片放置在真空封壳的第一段中，真空外壳附接到处理室和工厂接口。使用垂直传送机构将晶片传送到真空外壳的第二部分，其中第二部分在第一部分之上或之下。

4. 发明申请

US20100221915A1 METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING 审中-公开
标题翻译：半导体加工方法与装置
公开(公告)号：US20100221915A1
公开(公告)日：2010-09-02
申请号：US12776235
申请日：2010-05-07
申请人： J.B. Price , Jed Keller , Laurence Dulmage , David Cheng
发明人： J.B. Price , Jed Keller , Laurence Dulmage , David Cheng
IPC分类号： H01L21/677 , H01L21/465
CPC分类号： H01L21/67178 , H01L21/67161 , H01L21/67167 , H01L21/67742 , H01L21/67766 , Y10S414/139
摘要： A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.
摘要翻译：公开了一种用于半导体处理的方法和装置。在一个实施例中，一种在群集工具内传送晶片的方法包括将晶片放置在真空封壳的第一段中，真空外壳附接到处理室和工厂接口。使用垂直传送机构将晶片传送到真空外壳的第二部分，其中第二部分在第一部分之上或之下。

5. 发明申请

US20080073031A1 METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING 审中-公开
标题翻译：半导体加工方法与装置
公开(公告)号：US20080073031A1
公开(公告)日：2008-03-27
申请号：US11929230
申请日：2007-10-30
申请人： J.B. Price , Jed Keller , Laurence Dulmage , David Cheng
发明人： J.B. Price , Jed Keller , Laurence Dulmage , David Cheng
IPC分类号： H01L21/67 , H01L21/00
CPC分类号： H01L21/67178 , H01L21/67161 , H01L21/67167 , H01L21/67742 , H01L21/67766 , Y10S414/139
摘要： A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.
摘要翻译：公开了一种用于半导体处理的方法和装置。在一个实施例中，一种在群集工具内传送晶片的方法包括将晶片放置在真空封壳的第一段中，真空外壳附接到处理室和工厂接口。使用垂直传送机构将晶片传送到真空外壳的第二部分，其中第二部分在第一部分之上或之下。

6. 外观设计

USD599707S1 Vehicle exterior 有权
公开(公告)号：USD599707S1
公开(公告)日：2009-09-08
申请号：US29327927
申请日：2008-11-14
申请人： David Cheng , Jason Matthew Wilbur
设计人： David Cheng , Jason Matthew Wilbur

7. 发明申请

US20070203875A1 System and method for retrieving files from a file server using file attributes 审中-公开
标题翻译：使用文件属性从文件服务器检索文件的系统和方法
公开(公告)号：US20070203875A1
公开(公告)日：2007-08-30
申请号：US11361848
申请日：2006-02-24
申请人： Ellis Cave , David Cheng
发明人： Ellis Cave , David Cheng
IPC分类号： G06F17/30
CPC分类号： G06F16/148 , G06F16/68
摘要： There is disclosed systems and methods for retrieving files from a file server using file attributes. In one embodiment, an audio file server is accessed to retrieve prerecorded audio files using file attributes. In one embodiment, the HTTP protocol is used by adding query attributes, such as a text version of the desired message, along with other required attributes of the audio file, to the audio file server. The audio file server accepts the attributes, including the message text attributes and parses them to resolve which audio (.wav) message to retrieve. The retrieved audio file is then returned to the voice browser, which normally plays the message. In this way, IVR application developers can specify the content, speaker, language, dialect, emotion, and other attributes of a required audio file utilizing standard voice browsers to access audio files.
摘要翻译：公开了使用文件属性从文件服务器检索文件的系统和方法。在一个实施例中，访问音频文件服务器以使用文件属性来检索预先记录的音频文件。在一个实施例中，通过将诸如所需消息的文本版本的查询属性与音频文件的其他所需属性一起添加到音频文件服务器来使用HTTP协议。音频文件服务器接受属性，包括消息文本属性，并解析它们以解析要检索哪个音频（.wav）消息。检索到的音频文件然后返回到通常播放消息的语音浏览器。这样，IVR应用程序开发人员可以使用标准语音浏览器来指定所需音频文件的内容，扬声器，语言，方言，情感和其他属性来访问音频文件。

8. 发明申请

US20060242080A1 Rights management system for streamed multimedia content 有权
标题翻译：流媒体内容的权限管理系统
公开(公告)号：US20060242080A1
公开(公告)日：2006-10-26
申请号：US11113216
申请日：2005-04-22
申请人： Clifford Van Dyke , David Cheng , Siva Mohan
发明人： Clifford Van Dyke , David Cheng , Siva Mohan
IPC分类号： G06F17/60
CPC分类号： G06F21/10 , G06F21/00 , G06Q20/1235 , H04N2201/3246
摘要： To communicate requirements for a digital license from a receiver of corresponding digital content to a computing device upon which the digital content is to be rendered, the receiver tunes the content and locates within the content information relating to the requirements for the license, constructs the requirements from the located information, and sends such constructed requirements to the computing device. The computing device upon receiving the sent requirements constructs the license based on such received requirements, stores such constructed license in a license store of such computing device, and thereafter renders the content only in accordance with the license. Thus, the receiver need not communicate the license itself to the computing device.
摘要翻译：为了将来自相应数字内容的接收机的数字许可证的要求传达到要在其上呈现数字内容的计算设备，接收机调谐内容并定位在与许可证的要求相关的内容信息内，构建要求从定位的信息，并将这种构造的要求发送到计算设备。计算设备在接收到所发送的请求后，根据此类接收的要求构建许可证，将此类构造的许可证存储在该计算设备的许可证存储器中，然后仅根据许可证呈现内容。因此，接收机不需要将许可证本身传送到计算设备。

9. 发明申请

US20060075025A1 System and method for data tracking and management 审中-公开
标题翻译：用于数据跟踪和管理的系统和方法
公开(公告)号：US20060075025A1
公开(公告)日：2006-04-06
申请号：US10538439
申请日：2003-01-21
申请人： David Cheng , Vivien Fung , Andrew Padilla
发明人： David Cheng , Vivien Fung , Andrew Padilla
IPC分类号： G06F15/16
CPC分类号： H04L41/06 , H04L41/026 , H04L41/046 , H04L41/0803 , H04L41/085 , H04L51/34 , H04L67/10 , H04L69/329
摘要： In one embodiment of the present invention's a system for tracking and managing data over a computer network including a plurality of application computers each operating a computer software application program is provided, comprising a key master (106, 108); a system startup module (100) connected to the key master (106, 108); a gatekeeper (102) connected to the system startup module (100); as task manager (122, 124, 126, 128's 130) connected to the key master (106, 108) and the gatekeeper (102); a central database (112, 114, 116) connected to the gatekeeper (102); a plurality of agents (132, 134, 136, 138, 140) connected to the task manager; a plurality of sub-agents (142, 144, 146, 148, 150) independently connected to the plurality of agents (132, 134, 136, 138, 140) and the plurality of application computers (152, 154,156, 158, 160); and an alert dispatcher (104) connected to the system startup module (100) and the gatekeeper (102).
摘要翻译：在本发明的一个实施例中，提供了一种用于在包括多个应用计算机的计算机网络上跟踪和管理数据的系统，每个应用计算机各自操作计算机软件应用程序，包括密钥主机（106,108）; 连接到所述键主机（106,108）的系统启动模块（100）; 连接到系统启动模块（100）的网闸（102）; 连接到密钥主机（106,108）和网守（102）的任务管理器（122,124,126,128,130）; 连接到关守（102）的中央数据库（112,114,116）; 连接到任务管理器的多个代理（132,134,136,138,140）; 独立地连接到多个代理（132,134,136,138,140）和多个应用计算机（152,154,156,158,160）的多个子代理（142,144,146,148,150） ; 以及连接到系统启动模块（100）和关守（102）的警报调度器（104）。

10. 发明授权

US5769588A Dual cassette load lock 失效
公开(公告)号：US5769588A
公开(公告)日：1998-06-23
申请号：US700267
申请日：1996-08-20
申请人： Masato M. Toshima , Phil M. Salzman , Steven C. Murdoch , Cheng Wang , Mark A. Stenholm , James Howard , Leonard Hall , David Cheng
发明人： Masato M. Toshima , Phil M. Salzman , Steven C. Murdoch , Cheng Wang , Mark A. Stenholm , James Howard , Leonard Hall , David Cheng
IPC分类号： H01L21/02 , B65G49/05 , B65G49/07 , B65G65/00 , H01L21/205 , H01L21/285 , H01L21/302 , H01L21/3065 , H01L21/677
CPC分类号： H01L21/67754 , H01L21/67201 , H01L21/67766 , H01L21/67772 , H01L21/67778 , Y10S414/137 , Y10S414/139 , Y10S414/14
摘要： A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate chambers. Each chamber may be separately pumped down. Thus, while a first cassette of wafers, from a first chamber is being accessed, a second cassette of wafers may be loaded in the second chamber and the second chamber pumped down. Each chamber is designed to minimize intrusion to a clean room. Thus a door to each chamber has a mechanism which, when opening the door, first moves the door slightly away from an opening in the chamber and then the door is moved down parallel to the chamber. After the door is opened, a cassette of wafers is lowered through the opening in a motion much like a drawbridge. The cassette may be pivoted within the chamber when the position from which wafers are accessed from the cassette differs from the position from which the cassette is lowered out of the chamber.

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