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    • 2. 发明授权
    • Temperature sensing module
    • 温度传感模块
    • US5826982A
    • 1998-10-27
    • US617847
    • 1996-06-14
    • Jorg SchieferdeckerReiner QuadMischa Schulze
    • Jorg SchieferdeckerReiner QuadMischa Schulze
    • G01J5/20G01J5/12H05B6/68G01K13/00G01J5/08G01J5/16
    • H05B6/68G01J5/12
    • The present invention concerns a sensor module with a hollow mirror (3) at whose focal point a sensor element (4) has been arranged whose output signal is compared with a reference signal and is transformed into a temperature signal in an evaluation circuit (15). The sensor module has a thermopile (6) in whose immediate vicinity a temperature reference element (5) has been arranged; a first pre-amplifier (8, 9), that is capable of being calibrated, amplifies the output signal from the thermopile (6); a second pre-amplifier (10-13) amplifies the output signal from the temperature reference element (5); and a third pre-amplifier (14) is connected into the circuit in the form of a difference amplifier and forms the difference in signal between the outputs from the first pre-amplifier (8, 9) and the second pre-amplifier (10-13).
    • PCT No.PCT / EP94 / 03041 Sec。 371日期1996年6月14日第 102(e)日期1996年6月14日PCT 1994年9月12日PCT PCT。 公开号WO95 / 08251 日期1995年3月23日本发明涉及一种具有中空反射镜(3)的传感器模块,其中焦点为传感器元件(4),其输出信号与参考信号进行比较,并被转换为温度信号 评估电路(15)。 所述传感器模块具有热电堆(6),所述热电堆(6)紧邻温度参考元件(5); 能够校准的第一预放大器(8,9)放大来自热电堆(6)的输出信号; 第二前置放大器(10-13)放大来自温度参考元件(5)的输出信号; 并且第三前置放大器(14)以差分放大器的形式连接到电路中,并且形成来自第一前置放大器(8,9)和第二前置放大器(10)的输出之间的信号差, 13)。
    • 3. 发明授权
    • Thermopile infrared sensor array
    • 热电堆红外传感器阵列
    • US07842922B2
    • 2010-11-30
    • US11913443
    • 2006-05-16
    • Wilhelm LenekeMarion SimonMischa SchulzeKarlheinz StorckJoerg Schieferdecker
    • Wilhelm LenekeMarion SimonMischa SchulzeKarlheinz StorckJoerg Schieferdecker
    • G01J5/16G01J5/04G01J5/12
    • G01J5/06G01J5/12H01L2224/48091H01L2224/48472H01L2924/1461H01L2924/3025H04N5/2253H04N5/33H01L2924/00014H01L2924/00
    • A thermopile infrared sensor array, comprises a sensor chip with a number of thermopile sensor elements, made from a semiconductor substrate and corresponding electronic components. The sensor chip is mounted on a support circuit board and enclosed by a cap in which a lens is arranged. The aim is the production of a monolithic infrared sensor array with a high thermal resolution capacity with a small chip size and which may be economically produced. The aim is achieved by arranging a thin membrane made from non-conducting material on the semiconductor substrate of the sensor chip on which the thermopile sensor elements are located in an array. Under each thermopile sensor element, the back side of the membrane is uncovered in a honeycomb pattern by etching and the electronic components are arranged in the boundary region of the sensor chip. An individual pre-amplifier with a subsequent low-pass filter may be provided for each column and each row of sensor elements.
    • 热电堆红外传感器阵列包括具有多个热电堆传感器元件的传感器芯片,由半导体衬底和相应的电子部件制成。 传感器芯片安装在支撑电路板上,并由其中布置透镜的盖子包围。 其目的是生产具有小的芯片尺寸并且经济地制造的具有高热分辨能力的单片式红外传感器阵列。 其目的是通过在传感器芯片的半导体衬底上布置由非导电材料制成的薄膜,其中热电堆传感器元件位于阵列中。 在每个热电堆传感器元件下,通过蚀刻将膜的背面未被覆盖成蜂窝图案,并且电子部件布置在传感器芯片的边界区域中。 可以为每列和每行传感器元件提供具有随后的低通滤波器的单个前置放大器。