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    • 4. 发明授权
    • Method for manufacturing solid-state image sensor
    • 固态图像传感器的制造方法
    • US08383497B2
    • 2013-02-26
    • US13088465
    • 2011-04-18
    • Takanori Watanabe
    • Takanori Watanabe
    • H01L21/425
    • H01L27/14689H01L27/14641H01L27/14643
    • A method for manufacturing a sensor having pixels on a substrate, each pixel including a photoelectric converter, a charge-voltage converter, and a gate for forming a channel for transferring charges in the photoelectric converter to the charge-voltage converter, comprises a step of implanting ions into target regions of the substrate, where the photoelectric converters are to be formed, wherein the step is performed N times, and in each of the steps, the ions are implanted along a direction with an inclined angle with respect to a normal to the substrate surface, the target regions where the ions are implanted are different in each step, and for each step, a mask is formed on the substrate, having an opening for every N pixels, a plurality of the openings periodically arranged in a direction along an intersection line between the surface and a plane determined by the normal and the direction.
    • 一种用于制造在基板上具有像素的传感器的方法,每个像素包括光电转换器,电荷 - 电压转换器和用于形成用于将光电转换器中的电荷转移到电荷 - 电压转换器的通道的栅极,包括以下步骤: 将离子注入到要形成光电转换器的衬底的靶区域中,其中步骤进行N次,并且在每个步骤中,离子沿着相对于法向的倾斜角的方向注入 衬底表面,离子注入的目标区域在每个步骤中是不同的,并且对于每个步骤,在基板上形成掩模,每个N个像素具有开口,沿着沿着方向周期性地排列的多个开口 表面与平面和方向确定的平面之间的交点。
    • 7. 发明申请
    • METHOD FOR MANUFACTURING SOLID-STATE IMAGE SENSOR
    • 制造固态图像传感器的方法
    • US20110281392A1
    • 2011-11-17
    • US13088465
    • 2011-04-18
    • Takanori Watanabe
    • Takanori Watanabe
    • H01L31/18
    • H01L27/14689H01L27/14641H01L27/14643
    • A method for manufacturing a sensor having pixels on a substrate, each pixel including a photoelectric converter, a charge-voltage converter, and a gate for forming a channel for transferring charges in the photoelectric converter to the charge-voltage converter, comprises a step of implanting ions into target regions, of the substrate, where the photoelectric converters are to be formed, wherein the step is performed N times, in each of the steps, the ions are implanted along a direction with an inclined angle with respect to a normal to the substrate surface, the target regions where the ions are implanted are different in each step, and for each step, a mask is formed on the substrate, having an opening for every N pixels, a plurality of the openings periodically arranged in a direction along an intersection line between the surface and a plane determined by the normal and the direction.
    • 一种用于制造在基板上具有像素的传感器的方法,每个像素包括光电转换器,电荷 - 电压转换器和用于形成用于将光电转换器中的电荷转移到电荷 - 电压转换器的通道的栅极,包括以下步骤: 将离子注入到要形成光电转换器的衬底的靶区域中,其中步骤进行N次,在每个步骤中,离子沿着相对于法向的倾斜角度的方向注入 衬底表面,离子注入的目标区域在每个步骤中是不同的,并且对于每个步骤,在基板上形成掩模,每个N个像素具有开口,沿着沿着方向周期性地排列的多个开口 表面与平面和方向确定的平面之间的交点。