会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Angular velocity sensor
    • 角速度传感器
    • US07188525B2
    • 2007-03-13
    • US10126750
    • 2002-04-22
    • Atsushi MachidaSuguru WarashinaHiroshi IshikawaTsutomu MiyashitaYoshio Satoh
    • Atsushi MachidaSuguru WarashinaHiroshi IshikawaTsutomu MiyashitaYoshio Satoh
    • G01P9/04
    • G01C19/5607
    • An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.
    • 提供了一种角速度传感器,其包括将振荡器连接到框架的框架,振荡器和扭杆。 通过在基板的厚度方向上蚀刻材料基板,将框架,振荡器和扭杆形成为一体。 以H形式构成的振荡器包括支撑件,两个第一臂和两个第二臂。 这些臂从支撑件沿与基板的厚度方向垂直的臂延伸方向延伸。 振荡器包括安装表面,该安装表面设置有用于产生振荡器的平面内振荡的压电驱动器,以及用于检测振荡器的平面外振荡的压电检测器。