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    • 1. 发明授权
    • Deposition mask and method of preparing the same
    • 沉积掩模及其制备方法
    • US06861358B2
    • 2005-03-01
    • US09953926
    • 2001-09-18
    • Isao HasegawaYoshio MiyaiNaoya Sotani
    • Isao HasegawaYoshio MiyaiNaoya Sotani
    • H05B33/10C23C14/04C23C14/24H01L51/50H01L41/04
    • C23C14/042
    • A deposition mask capable of relaxing nonuniformity of the thickness of a deposit formed on a substrate and reducing the width of a non-opening part of a mask layer by reducing the thickness of the mask layer is obtained. This deposition mask comprises a mask layer formed by a single silicon thin film and a mask pattern, formed on the mask layer, including a mask opening having an opening width increased toward a deposition source. The mask layer formed by a silicon thin film can be reduced in thickness due to small deflection caused by its own weight. Thus, the width of the non-opening part of the mask layer can be reduced, whereby the width of a part formed with no deposit can be reduced. The mask opening having the opening width increased toward the deposition source reduces the probability of deposit particles, obliquely scattered from the deposition source, hitting an end of the mask opening, whereby the deposit is prevented from being reduced in thickness on an end corresponding to the end of the mask opening as well as from nonuniformity of the thickness.
    • 获得能够减轻形成在基板上的沉积物的厚度不均匀性并通过减小掩模层的厚度来减小掩模层的非开口部分的宽度的沉积掩模。 该沉积掩模包括形成在掩模层上的由单个硅薄膜和掩模图案形成的掩模层,包括具有朝向沉积源增加的开口宽度的掩模开口。 由硅薄膜形成的掩模层由于其自重引起的挠曲小而可以减小厚度。 因此,可以减小掩模层的非开口部分的宽度,从而可以减少不形成沉积物的部分的宽度。 具有朝向沉积源增加的开口宽度的掩模开口减少了沉积颗粒从沉积源倾斜散射的可能性,击中掩模开口的一端,从而防止沉积物在对应于掩模开口的端部上减小厚度 面罩开口的末端以及厚度的不均匀性。
    • 10. 发明申请
    • SOLAR CELL MODULE
    • 太阳能电池模块
    • US20090320895A1
    • 2009-12-31
    • US12439247
    • 2007-08-28
    • Toshio YagiuraNaoya Sotani
    • Toshio YagiuraNaoya Sotani
    • H01L31/042
    • H01L31/0465Y02E10/50
    • In a thin film solar cell module, a photovoltaic layer and a sealing layer 16 are sequentially disposed on a transparent substrate 11, the photovoltaic layer formed by connecting in series multiple photovoltaic elements each formed by sequentially stacking a transparent conductive film 12, photovoltaic conversion layers, and a rear surface electrode 15. Meanwhile, in a region where the rear surface electrodes 15 of the photovoltaic elements adjacent to each other are electrically separated, a metal film 18 is provided on a surface of the transparent conductive film 12 at a side of the sealing layer 16.
    • 在薄膜太阳能电池模块中,光电层和密封层16依次设置在透明基板11上,通过串联连接多个光电元件形成的光电层,每个光电元件各自通过依次层叠透明导电膜12,光电转换层 和背面电极15.同时,在彼此相邻的光电元件的背面电极15电分离的区域中,金属膜18设置在透明导电膜12的一侧的表面上 密封层16。