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1. 发明授权

US08115987B2 Modulating the intensity of light from an interferometric reflector 失效
标题翻译：调制来自干涉式反射器的光强度
公开(公告)号：US08115987B2
公开(公告)日：2012-02-14
申请号：US11776490
申请日：2007-07-11
申请人： Ion Bita , Lior Kogut , Ming Hau Tung
发明人： Ion Bita , Lior Kogut , Ming Hau Tung
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , G02B26/005
摘要： An optical device for modulating the intensity of light from an interferometric reflector. In one embodiment, the optical device can include an optical stack having a reflective layer and a partially reflective, partially transmissive layer for reflecting light. The optical device can also include a fluid cell comprising an absorptive fluid and a transmissive fluid. The optical device can also include a mechanism for controlling the portion of the reflector which is shadowed by the absorptive fluid.
摘要翻译：一种用于调制来自干涉式反射器的光的强度的光学装置。在一个实施例中，光学装置可以包括具有反射层和用于反射光的部分反射部分透射层的光学堆叠。光学装置还可以包括包含吸收流体和透射流体的流体池。光学装置还可以包括用于控制被吸收流体遮蔽的反射器部分的机构。

2. 发明申请

US20080186581A1 MODULATING THE INTENSITY OF LIGHT FROM AN INTERFEROMETRIC REFLECTOR 失效
标题翻译：调节来自干涉仪反射器的光的强度
公开(公告)号：US20080186581A1
公开(公告)日：2008-08-07
申请号：US11776490
申请日：2007-07-11
申请人： Ion Bita , Lior Kogut , Ming-Hau Tung
发明人： Ion Bita , Lior Kogut , Ming-Hau Tung
IPC分类号： G02B27/00
CPC分类号： G02B26/001 , G02B26/005
摘要： An optical device for modulating the intensity of light from an interferometric reflector. In one embodiment, the optical device can include an optical stack having a reflective layer and a partially reflective, partially transmissive layer for reflecting light. The optical device can also include a fluid cell comprising an absorptive fluid and a transmissive fluid. The optical device can also include a mechanism for controlling the portion of the reflector which is shadowed by the absorptive fluid.
摘要翻译：一种用于调制来自干涉式反射器的光的强度的光学装置。在一个实施例中，光学装置可以包括具有反射层和用于反射光的部分反射部分透射层的光学堆叠。光学装置还可以包括包含吸收流体和透射流体的流体池。光学装置还可以包括用于控制被吸收流体遮蔽的反射器部分的机构。

3. 发明授权

US08102590B2 Method of manufacturing MEMS devices providing air gap control 有权
标题翻译：制造提供气隙控制的MEMS器件的方法
公开(公告)号：US08102590B2
公开(公告)日：2012-01-24
申请号：US12436059
申请日：2009-05-05
申请人： Ming-Hau Tung , Lior Kogut
发明人： Ming-Hau Tung , Lior Kogut
IPC分类号： G02B26/00
CPC分类号： B81B3/0072 , B81B2201/042 , B81C1/00047 , B81C2201/0167
摘要： Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.
摘要翻译：提供了用于控制光调制装置的两层之间的腔的深度的方法和装置。一种制造光调制装置的方法包括提供衬底，在衬底的至少一部分上形成牺牲层，在牺牲层的至少一部分上形成反射层，以及在衬底上形成一个或多个弯曲控制器所述挠曲控制器被配置为可操作地支撑所述反射层并且在去除所述牺牲层时形成可能与所述牺牲层的厚度相差的深度的空腔，其中所述深度垂直于所述基板测量。

4. 发明申请

US20110205615A1 MEMS DEVICES WITH MULTI-COMPONENT SACRIFICIAL LAYERS 失效
标题翻译：具有多组分功能层的MEMS器件
公开(公告)号：US20110205615A1
公开(公告)日：2011-08-25
申请号：US13098292
申请日：2011-04-29
申请人： Ming-Hau Tung , Lior Kogut
发明人： Ming-Hau Tung , Lior Kogut
IPC分类号： G02B26/00 , B05D5/06 , B05D3/10 , B05D1/36 , C23C16/44 , B05D5/00 , C23C14/34
CPC分类号： B81C1/00801 , B81B3/001 , B81B3/0072 , B81B2201/042 , B81C2201/0109 , B81C2201/017 , B81C2201/112 , B81C2201/115 , G02B26/001 , Y10T428/30 , Y10T428/31678 , Y10T428/31935
摘要： Methods of forming a protective coating on one or more surfaces of a microelectromechanical device are disclosed comprising the steps of forming a composite layer of a sacrificial material and a protective material, and selectively etching the sacrificial material to form a protective coating. The protective coatings of the invention preferably improve one or more aspects of the performance of the microelectromechanical devices in which they are incorporated. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices.
摘要翻译：公开了在微机电装置的一个或多个表面上形成保护涂层的方法，其包括以下步骤：形成牺牲材料和保护材料的复合层，并选择性地蚀刻牺牲材料以形成保护涂层。本发明的保护性涂层优选地改进了其中并入其中的微机电装置的性能的一个或多个方面。还公开了通过本发明的方法形成的微机电装置以及包括这种装置的视觉显示装置。

5. 发明授权

US07952789B2 MEMS devices with multi-component sacrificial layers 有权
标题翻译：具有多组分牺牲层的MEMS器件
公开(公告)号：US07952789B2
公开(公告)日：2011-05-31
申请号：US12719751
申请日：2010-03-08
申请人： Ming-Hau Tung , Lior Kogut
发明人： Ming-Hau Tung , Lior Kogut
IPC分类号： G02B26/00 , G02F1/03
CPC分类号： B81C1/00801 , B81B3/001 , B81B3/0072 , B81B2201/042 , B81C2201/0109 , B81C2201/017 , B81C2201/112 , B81C2201/115 , G02B26/001 , Y10T428/30 , Y10T428/31678 , Y10T428/31935
摘要： Methods of forming a protective coating on one or more surfaces of a microelectromechanical device are disclosed comprising the steps of forming a composite layer of a sacrificial material and a protective material, and selectively etching the sacrificial material to form a protective coating. The protective coatings of the invention preferably improve one or more aspects of the performance of the microelectromechanical devices in which they are incorporated. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices.
摘要翻译：公开了在微机电装置的一个或多个表面上形成保护涂层的方法，其包括以下步骤：形成牺牲材料和保护材料的复合层，并选择性地蚀刻牺牲材料以形成保护涂层。本发明的保护性涂层优选地改进了其中并入其中的微机电装置的性能的一个或多个方面。还公开了通过本发明的方法形成的微机电装置以及包括这种装置的视觉显示装置。

6. 发明授权

US07944599B2 Electromechanical device with optical function separated from mechanical and electrical function 有权
标题翻译：具有光学功能的机电装置与机电功能分离
公开(公告)号：US07944599B2
公开(公告)日：2011-05-17
申请号：US11772777
申请日：2007-07-02
申请人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
发明人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
摘要翻译：微机电（MEMS）装置包括衬底，在衬底上方的可移动元件以及可移动元件上方的致动电极。可移动元件包括可变形层和反射元件。可变形层与反射元件间隔开。

7. 发明授权

US07612932B2 Microelectromechanical device with optical function separated from mechanical and electrical function 失效
标题翻译：具有光学功能的微机电器件与机电功能分离
公开(公告)号：US07612932B2
公开(公告)日：2009-11-03
申请号：US11772730
申请日：2007-07-02
申请人： Clarence Chui , Denis Endisch , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang
发明人： Clarence Chui , Denis Endisch , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/001 , B81B3/0086 , B81B2201/042 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element.
摘要翻译：微机电（MEMS）装置包括第一反射层，可移动元件和致动电极。可移动元件在第一反射层之上。可移动元件包括可变形层和反射元件。致动电极位于可变形层和反射元件之间。

8. 发明申请

US20090051369A1 SYSTEM AND METHOD FOR MEASURING ADHESION FORCES IN MEMS DEVICES 审中-公开
标题翻译：用于测量MEMS器件中粘合力的系统和方法
公开(公告)号：US20090051369A1
公开(公告)日：2009-02-26
申请号：US11842914
申请日：2007-08-21
申请人： Lior Kogut , Ming-Hau Tung , Sauri Gudlavalleti
发明人： Lior Kogut , Ming-Hau Tung , Sauri Gudlavalleti
IPC分类号： G01R27/26 , G01J3/46 , G02B5/08 , G06F19/00 , G01N27/00
CPC分类号： G02B26/0841 , B81B2201/047 , B81C99/0045 , G02B26/001
摘要： A MEMS test device comprises a flexible beam spaced apart from an optical stack. The MEMS test device includes a reflective layer and a partially reflective layer, such that a change in the position of the MEMS test device can be observed without the use of an external interferometer. The flexible beam may be cantilevered or fixed at each end. The flexible beam may include a shoe suspended from the side of the beam facing the optical stack, to provide a fixed contact area. An array of MEMS test devices may be used to determine compliance, or to calculate adhesion forces.
摘要翻译： MEMS测试装置包括与光学堆叠间隔开的柔性梁。 MEMS测试装置包括反射层和部分反射层，使得可以在不使用外部干涉仪的情况下观察MEMS测试装置的位置的改变。柔性梁可以在每一端悬臂或固定。柔性梁可以包括从面向光学堆叠的梁的侧面悬挂的鞋，以提供固定的接触面积。可以使用一系列MEMS测试装置来确定柔量，或计算附着力。

9. 发明申请

US20080003710A1 Support structure for free-standing MEMS device and methods for forming the same 失效
公开(公告)号：US20080003710A1
公开(公告)日：2008-01-03
申请号：US11476998
申请日：2006-06-28
申请人： Lior Kogut , Ming-Hau Tung , Brian Arbuckle
发明人： Lior Kogut , Ming-Hau Tung , Brian Arbuckle
IPC分类号： H01L21/00
CPC分类号： B81B3/0072
摘要： A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first material. The deformable layer is mechanically coupled to the functional layer at a junction. The functional layer and the deformable layer have substantially equal internal stresses at the junction.

10. 发明授权

US07952787B2 Method of manufacturing MEMS devices providing air gap control 有权
标题翻译：制造提供气隙控制的MEMS器件的方法
公开(公告)号：US07952787B2
公开(公告)日：2011-05-31
申请号：US12436064
申请日：2009-05-05
申请人： Ming-Hau Tung , Lior Kogut
发明人： Ming-Hau Tung , Lior Kogut
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： B81B3/0072 , B81B2201/042 , B81C1/00047 , B81C2201/0167
摘要： Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.
摘要翻译：提供了用于控制光调制装置的两层之间的腔的深度的方法和装置。一种制造光调制装置的方法包括提供衬底，在衬底的至少一部分上形成牺牲层，在牺牲层的至少一部分上形成反射层，以及在衬底上形成一个或多个弯曲控制器所述挠曲控制器被配置为可操作地支撑所述反射层并且在去除所述牺牲层时形成可能与所述牺牲层的厚度相差的深度的空腔，其中所述深度垂直于所述基板测量。

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