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1. 发明授权

US07944599B2 Electromechanical device with optical function separated from mechanical and electrical function 有权
标题翻译：具有光学功能的机电装置与机电功能分离
公开(公告)号：US07944599B2
公开(公告)日：2011-05-17
申请号：US11772777
申请日：2007-07-02
申请人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
发明人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
摘要翻译：微机电（MEMS）装置包括衬底，在衬底上方的可移动元件以及可移动元件上方的致动电极。可移动元件包括可变形层和反射元件。可变形层与反射元件间隔开。

2. 发明授权

US08289613B2 Electromechanical device with optical function separated from mechanical and electrical function 失效
标题翻译：具有光学功能的机电装置与机电功能分离
公开(公告)号：US08289613B2
公开(公告)日：2012-10-16
申请号：US13086113
申请日：2011-04-13
申请人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
发明人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
摘要翻译：微机电（MEMS）装置包括衬底，在衬底上方的可移动元件以及可移动元件上方的致动电极。可移动元件包括可变形层和反射元件。可变形层与反射元件间隔开。

3. 发明申请

US20110188109A1 ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 失效
标题翻译：具有从机械和电气功能分离的光学功能的机电装置
公开(公告)号：US20110188109A1
公开(公告)日：2011-08-04
申请号：US13086113
申请日：2011-04-13
申请人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
发明人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
摘要翻译：微机电（MEMS）装置包括衬底，在衬底上方的可移动元件以及可移动元件上方的致动电极。可移动元件包括可变形层和反射元件。可变形层与反射元件间隔开。

4. 发明申请

US20080013145A1 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 有权
标题翻译：具有从机械和电气功能分离的光学功能的微电子器件
公开(公告)号：US20080013145A1
公开(公告)日：2008-01-17
申请号：US11772777
申请日：2007-07-02
申请人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
发明人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
IPC分类号： B81B7/02 , B81C5/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
摘要翻译：微机电（MEMS）装置包括衬底，在衬底上方的可移动元件以及可移动元件上方的致动电极。可移动元件包括可变形层和反射元件。可变形层与反射元件间隔开。

5. 发明授权

US07612932B2 Microelectromechanical device with optical function separated from mechanical and electrical function 失效
标题翻译：具有光学功能的微机电器件与机电功能分离
公开(公告)号：US07612932B2
公开(公告)日：2009-11-03
申请号：US11772730
申请日：2007-07-02
申请人： Clarence Chui , Denis Endisch , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang
发明人： Clarence Chui , Denis Endisch , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/001 , B81B3/0086 , B81B2201/042 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element.
摘要翻译：微机电（MEMS）装置包括第一反射层，可移动元件和致动电极。可移动元件在第一反射层之上。可移动元件包括可变形层和反射元件。致动电极位于可变形层和反射元件之间。

6. 发明申请

US20080013144A1 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 失效
标题翻译：具有从机械和电气功能分离的光学功能的微电子器件
公开(公告)号：US20080013144A1
公开(公告)日：2008-01-17
申请号：US11772730
申请日：2007-07-02
申请人： Clarence Chui , Denis Endisch , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang
发明人： Clarence Chui , Denis Endisch , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang
IPC分类号： B81B7/02 , B81C5/00
CPC分类号： G02B26/001 , B81B3/0086 , B81B2201/042 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element.
摘要翻译：微机电（MEMS）装置包括第一反射层，可移动元件和致动电极。可移动元件在第一反射层之上。可移动元件包括可变形层和反射元件。致动电极位于可变形层和反射元件之间。

7. 发明申请

US20140289843A1 METHOD OF UNLOCKING ELECTRONIC DEVICE BY DISPLAYING UNLOCKING OBJECTS AT RANDOMIZED/USER-DEFINED LOCATIONS AND RELATED COMPUTER READABLE MEDIUM THEREOF 有权
标题翻译：通过在随机/用户定义的位置显示解锁对象和相关计算机可读介质来解锁电子设备的方法
公开(公告)号：US20140289843A1
公开(公告)日：2014-09-25
申请号：US14360933
申请日：2012-09-12
申请人： Chih-Wei Chiang
发明人： Chih-Wei Chiang
IPC分类号： G06F3/0484 , G06F3/0488 , G06F21/36 , G06F3/0481
CPC分类号： G06F3/04842 , G06F3/04817 , G06F3/0488 , G06F3/04883 , G06F3/04886 , G06F21/36
摘要： A method of unlocking an electronic device having a touch-sensitive display includes at least the following steps: controlling the touch-sensitive display to have unlocking objects displayed at different locations for different time points; and when at least one contact is detected on the touch-sensitive display, determining whether to unlock the electronic device by referring to a contact status on the touch-sensitive display. Besides, a computer readable medium storing a program code is also provided, where the program code causes a processor to perform following steps when executed by the processor: controlling the touch-sensitive display to have unlocking objects displayed at different locations for different time points; and when at least one contact is detected on the touch-sensitive display, determining whether to unlock an electronic device by referring to a contact status on the touch-sensitive display.
摘要翻译：解锁具有触敏显示器的电子设备的方法至少包括以下步骤：控制触敏显示器以在不同时间点在不同位置显示解锁对象; 并且当在所述触敏显示器上检测到至少一个接触时，通过参考所述触敏显示器上的接触状态来确定是否解锁所述电子设备。此外，还提供了存储程序代码的计算机可读介质，其中程序代码使得处理器在由处理器执行时执行以下步骤：控制触摸敏感显示器以在不同时间点处在不同位置显示解锁对象; 并且当在所述触敏显示器上检测到至少一个接触时，通过参照所述触敏显示器上的接触状态来确定是否解锁电子设备。

8. 发明申请

US20080311690A1 ELIMINATE RELEASE ETCH ATTACK BY INTERFACE MODIFICATION IN SACRIFICIAL LAYERS 失效
标题翻译：通过界面修改消除泄漏蚀刻侵蚀层
公开(公告)号：US20080311690A1
公开(公告)日：2008-12-18
申请号：US12061592
申请日：2008-04-02
申请人： Thanh Nghia Tu , Qi Luo , Chia Wei Yang , David Heald , Evgeni Gousev , Chih-Wei Chiang
发明人： Thanh Nghia Tu , Qi Luo , Chia Wei Yang , David Heald , Evgeni Gousev , Chih-Wei Chiang
IPC分类号： H01L21/52 , G02B26/00 , C23C16/00
CPC分类号： B81C1/00476 , B81B2201/047
摘要： Methods of making a microelectromechanical system (MEMS) device are described. In some embodiments, the method includes forming a sacrificial layer over a substrate, treating at least a portion of the sacrificial layer to form a treated sacrificial portion, forming an overlying layer over at least a part of the treated sacrificial portion, and at least partially removing the treated sacrificial portion to form a cavity situated between the substrate and the overlying layer, the overlying layer being exposed to the cavity.
摘要翻译：描述制造微机电系统（MEMS）装置的方法。在一些实施例中，该方法包括在衬底上形成牺牲层，处理牺牲层的至少一部分以形成经处理的牺牲部分，在经处理的牺牲部分的至少一部分上形成覆盖层，并且至少部分地去除经处理的牺牲部分以形成位于衬底和上覆层之间的空腔，上覆层暴露于空腔。

9. 发明授权

US08803249B2 Profile pre-shaping for replacement poly gate interlayer dielectric 有权
标题翻译：轮廓预成型用于替代多晶硅层间电介质
公开(公告)号：US08803249B2
公开(公告)日：2014-08-12
申请号：US13570527
申请日：2012-08-09
申请人： Chih-Wei Chiang , Kuang-Cheng Wu , Wen-Long Lee , Po-Hsiung Leu , Ding-I Liu
发明人： Chih-Wei Chiang , Kuang-Cheng Wu , Wen-Long Lee , Po-Hsiung Leu , Ding-I Liu
IPC分类号： H01L29/78
CPC分类号： H01L21/28132 , H01L21/28114 , H01L21/76834 , H01L21/823425 , H01L21/823437 , H01L21/823468 , H01L21/823481 , H01L29/42376 , H01L29/66545
摘要： Some embodiments relate to an integrated circuit (IC). The IC includes a semiconductor substrate having an upper surface with a source region and drain region proximate thereto. A channel region is disposed in the substrate between the source region and the drain region. A gate electrode is disposed over the channel region and separated from the channel region by a gate dielectric. Sidewall spacers are formed about opposing sidewalls of the gate electrode. Upper outer edges of the sidewall spacers extend outward beyond corresponding lower outer edges of the sidewall spacers. A liner is disposed about opposing sidewalls of the sidewall spacers and has a first thickness at an upper portion of liner and a second thickness at a lower portion of the liner. The first thickness is less than the second thickness. Other embodiments are also disclosed.
摘要翻译：一些实施例涉及集成电路（IC）。 IC包括具有上表面的半导体衬底，源表面和漏区附近。在源极区域和漏极区域之间的衬底中设置沟道区域。栅电极设置在沟道区上方并通过栅极电介质与沟道区分离。侧壁间隔件围绕栅电极的相对侧壁形成。侧壁间隔件的上外边缘向外延伸超过侧壁间隔件的相应的下外边缘。衬套设置在侧壁间隔物的相对侧壁周围，并且在衬垫的上部具有第一厚度，在衬垫的下部具有第二厚度。第一厚度小于第二厚度。还公开了其他实施例。

10. 发明授权

US07535621B2 Aluminum fluoride films for microelectromechanical system applications 失效
标题翻译：用于微机电系统应用的氟化铝膜
公开(公告)号：US07535621B2
公开(公告)日：2009-05-19
申请号：US11646059
申请日：2006-12-27
申请人： Chih-Wei Chiang
发明人： Chih-Wei Chiang
IPC分类号： G02B26/00 , H01L29/00 , H01L21/00
CPC分类号： G02B26/001 , B81B2201/047 , B81C1/00801 , B81C2201/014 , B81C2201/112
摘要： A microelectromechanical systems (MEMS) device utilizing an aluminum fluoride layer as an etch stop is disclosed. In one embodiment, a MEMS device includes a first electrode having a first surface; and a second electrode having a second surface facing the first surface and defining a gap therebetween. The second electrode is movable in the gap between a first position and a second position. At least one of the electrodes includes an aluminum fluoride layer facing the other of the electrodes. During fabrication of the MEMS device, a sacrificial layer is formed between the first and second electrodes and is released to define the gap. The aluminum fluoride layer serves as an etch stop to protect the first or second electrode during the release of the sacrificial layer.
摘要翻译：公开了一种利用氟化铝层作为蚀刻阻挡层的微机电系统（MEMS）装置。在一个实施例中，MEMS器件包括具有第一表面的第一电极; 以及第二电极，其具有面向所述第一表面的第二表面并且在其间限定间隙。第二电极可以在第一位置和第二位置之间的间隙中移动。至少一个电极包括面对另一个电极的氟化铝层。在MEMS器件的制造期间，在第一和第二电极之间形成牺牲层并被释放以限定间隙。氟化铝层用作蚀刻停止件，以在释放牺牲层期间保护第一或第二电极。

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