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    • 1. 发明申请
    • Chemical Sensors Based on Plasmon Resonance in Graphene
    • 基于石墨烯等离子体共振的化学传感器
    • US20150369735A1
    • 2015-12-24
    • US14313456
    • 2014-06-24
    • International Business Machines Corporation
    • Phaedon AvourisDamon B. FarmerYilei LiHugen Yan
    • G01N21/552H01L21/04H01L21/31H01L21/02
    • G01N21/554H01L21/02422H01L21/02527H01L21/0277H01L21/041H01L21/042H01L21/31H01L21/31144H01L21/56H01L29/1606
    • Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.
    • 提供了形成纳米薄片或体积石墨烯的SPR传感器的技术。 一方面,提供一种形成基于石墨烯的SPR传感器的方法,其包括以下步骤:将石墨烯沉积到衬底上,其中所述衬底包括导电层上的电介质层,并且其中所述石墨烯沉积在所述介电层上 ; 以及将所述石墨烯图案化成多个均匀间隔的石墨烯条,其中每个所述石墨烯条的宽度为约50纳米至约5微米,并且在其间的范围,并且其中所述石墨烯条彼此间隔开距离 约5纳米至约50微米,并且其间的范围。 或者,可以使用块状石墨烯,并且使用电介质层形成具有不同介电常数的周期性区域。 还提供了使用本SPR传感器分析样品的测试装置和方法。
    • 4. 发明授权
    • Chemical sensors based on plasmon resonance in graphene
    • 基于石墨烯等离子体共振的化学传感器
    • US09594018B2
    • 2017-03-14
    • US15225286
    • 2016-08-01
    • International Business Machines Corporation
    • Phaedon AvourisDamon B. FarmerYilei LiHugen Yan
    • G01N21/75G01N21/552H01L21/02H01L21/311H01L21/027H01L21/04
    • G01N21/554H01L21/02422H01L21/02527H01L21/0277H01L21/041H01L21/042H01L21/31H01L21/31144H01L21/56H01L29/1606
    • Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.
    • 提供了形成纳米薄片或体积石墨烯的SPR传感器的技术。 一方面,提供一种形成基于石墨烯的SPR传感器的方法,其包括以下步骤:将石墨烯沉积到衬底上,其中所述衬底包括导电层上的电介质层,并且其中所述石墨烯沉积在所述介电层上 ; 以及将所述石墨烯图案化成多个均匀间隔的石墨烯条,其中每个所述石墨烯条的宽度为约50纳米至约5微米,并且在其间的范围,并且其中所述石墨烯条彼此间隔开距离 约5纳米至约50微米,并且其间的范围。 或者,可以使用块状石墨烯,并且使用电介质层形成具有不同介电常数的周期性区域。 还提供了使用本SPR传感器分析样品的测试装置和方法。
    • 10. 发明授权
    • Chemical sensors based on plasmon resonance in graphene
    • 基于石墨烯等离子体共振的化学传感器
    • US09423345B2
    • 2016-08-23
    • US14313456
    • 2014-06-24
    • International Business Machines Corporation
    • Phaedon AvourisDamon B. FarmerYilei LiHugen Yan
    • G01N21/75G01N21/552H01L21/04H01L21/31
    • G01N21/554H01L21/02422H01L21/02527H01L21/0277H01L21/041H01L21/042H01L21/31H01L21/31144H01L21/56H01L29/1606
    • Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.
    • 提供了形成纳米薄片或体积石墨烯的SPR传感器的技术。 一方面,提供一种形成基于石墨烯的SPR传感器的方法,其包括以下步骤:将石墨烯沉积到衬底上,其中所述衬底包括导电层上的电介质层,并且其中所述石墨烯沉积在所述介电层上 ; 以及将所述石墨烯图案化成多个均匀间隔的石墨烯条,其中每个所述石墨烯条的宽度为约50纳米至约5微米,并且在其间的范围,并且其中所述石墨烯条彼此间隔开距离 约5纳米至约50微米,并且其间的范围。 或者,可以使用块状石墨烯,并且使用电介质层形成具有不同介电常数的周期性区域。 还提供了使用本SPR传感器分析样品的测试装置和方法。